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21.
Cresswell M.W. Allen R.A. Guthrie W.F. Sniegowski J.J. Ghoshtagore R.N. Linholm L.W. 《Semiconductor Manufacturing, IEEE Transactions on》1998,11(2):182-193
The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features 相似文献
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For part I see, ibid., p. 134, 1998. The basic approach outlined in the previous article is applied to the difficult problem of computing the optical modes of a vertical-cavity surface-emitting laser. The formulation utilizes a finite difference equation based upon the lowest order term of an infinite series solution of the scalar Helmholtz equation in a local region. This difference equation becomes exact in the one-dimensional (1-D) limit, and is thus ideally suited for nearly 1-D devices such as vertical-cavity lasers. The performance of the resulting code is tested on both a simple cylindrical cavity with known solutions and an oxide-confined vertical-cavity laser structure, and the results compared against second-order-accurate code based upon Crank-Nicolson differencing 相似文献
24.
In order to build models that relate thematic mapper (TM) imagery to field forest variables, several regression techniques, such as the ones based on the Mallows' Cp and the adjusted R2 statistics, were applied. Nevertheless, although the best created models had good fittings (R2>0.65) apparently supported by a clear statistical significance (p<0.0001), later trials tested with additional plots showed that these models were, in fact, nonrobust models (models with very low-predictive capabilities). Two factors were pointed out as causes of these inconsistencies between predicted and observed values: a relatively small number of available field plots and a relatively high number of possible independent variables. Actually, different trials suggested much lower fittings for the expected “really” predictive models. Some restrictions of TM satellite data, such as its radiometric, spectral, and spatial limitations, together with restrictions arising from gathering and processing of field data, might have led to these poor relations. This study shows the need for guarantees stronger than the usual ones before concluding that there is a clear possibility of using satellite information to estimate forest parameters by means of regression techniques 相似文献
25.
Daniel L. Feldheim Del R. Lawson Charles R. Martin 《Journal of Polymer Science.Polymer Physics》1993,31(8):953-957
We report a strong dependence of the thermal stability of Nafion® perfluorosulfonate ionomer on the nature of the counterion associated with the fixed sulfonate site. These results were obtained using thermal gravimetric analysis on a series of alkali metal and alkyl ammonium cation-exchanged Nafion films. We have found that the temperature of decomposition of Nafion is inversely dependent on the size of the exchanged cation; i.e., Nafion films show improved thermal stability as the size of the counter cation decreases. We attribute this inverse relationship of thermal stability with counterion size to an initial decomposition reaction which is strongly influenced by the strength of the sulfonate-coun-terion interaction. © 1993 John Wiley & Sons, Inc. 相似文献
26.
A criterion for determining the maximum spacing between magnetometers for measuring the magnetic field is derived. A two-dimensional (2-D) filter model is employed to determine the maximum spatial frequency component present in the magnetic field that is above the spectral noise level. This maximum frequency component is then sampled at a rate greater than twice per period as indicated by the Nyquist criterion, yielding the required magnetometer spacing. It is shown that the rule-of-thumb employed in current clinical biomagnetic array systems, that the spacing between the coils should be approximately equal to the depth of the source, is adequate when the signal-to-noise power ratio is less than 28.4 (14.5 dB). The analysis also quantitatively demonstrates that reducing the separation between the measurement and source planes has a greater effect on the resolution than decreasing the noise level by the same factor. This result is important for employing high Tc superconductor magnetometers that allow thinner thermal insulating layers at the cost of higher thermal noise 相似文献
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28.
Modeling and CW operation of a quasi-three-level 946 nm Nd: YAG laser 总被引:18,自引:0,他引:18
A model is developed for an end-pumped quasi-three-level laser with population in the lower laser level at equilibrium such as for transitions to the manifolds4I9/2 in Nd3+,4I15/2 in Er3+,5I8 in Ho3+and3H6 in Tm3+. It is shown that the effect of residual lower laser level population on laser operation can be treated as a saturable loss. Room temperature operation on the4F3/2 -4I9/2 transition in Nd:YAG under CW dye laser pumping has been demonstrated with a threshold as low as 11.5 mW incident power and a slope efficiency of 7 percent with 0.3 percent output coupling. Performance is limited by the low output coupling and diffraction loss. 相似文献
29.
30.
Statistics on the backscatter coefficient σ0 from the Ku -band Seasat-A Satellite Scatterometer (SASS) collected over the world's land surfaces are presented. This spaceborne scatterometer provided data on σ0 between latitude 80° S and 80° N at incidence angles up to 70°. The global statistics of vertical (V ) and horizontal (H ) polarization backscatter coefficients for 10° bands in latitude are presented for incidence angles between 20° and 70° and compared with the Skylab and ground spectrometer results. Global images of the time-averaged V polarization σ0 at a 45° incidence angle and its dependence on the incidence angle are presented and compared to a generalized map of the terrain type. Global images of the differences between the V an H polarization backscatter coefficients are presented and discussed. The most inhomogeneous region, which contains the deserts of North Africa and the Arabian Peninsula, is studied in greater detail and compared with the terrain type 相似文献