Effect of stepper lens operating conditions on proximity effects in DUV optical lithography down to 250nm

Reduction of optical proximity effects (OPE), at deep uv wavelength of 248nm, caused by the variation of stepper lens operating conditions is investigated. It is shown that many of these effects, which increase as the Rayleigh limit is approached, can be minimised, and in many cases eliminated, by suitable choice of lens numerical aperture (NA) and partial coherence (sigma, σ).

Application of these results should enable the user of advanced wafer steppers to carry out high resolution lithography with a minimum of time consuming optical proximity correction (OPC).     

Orientational ordering of liquid crystals containing a difluoro-substituted phenyl ring

The orientational ordering of several liquid crystals containing a difluorosubstituted phenyl ring has been studied through the use of C-13 NMR. The fluorinated phenyl ring of these liquid crystals have C_s symmetry, so three order parameters are required to completely describe the ordering of this ring. All three of these order parameters have been calculated from carbon-fluorine dipolar coupling constants obtained from the carbon-fluorine splittings in the C-13 NMR spectra. Because of the complexity of the fluorine-coupled spectra, variable angle spinning (VAS) was used to resolve the carbon-fluorine splittings. In order to study the orientational ordering over wide ranges of temperature, we have developed an empirical correlation between the order parameter and the value of a carbon-fluorine dipolar coupling constant. This enabled us to study the change in the order parameter with temperature. The results of applying this method to several structurally similar liquid crystals containing the same type of difluorinated phenyl ring are presented. A comparison is made to a similar mono-fluorinated liquid crystal.     

New reals: Can live with them,can live without them

We give a self‐contained proof of the preservation theorem for proper countable support iterations known as “tools‐preservation”, “Case A” or “first preservation theorem” in the literature. We do not assume that the forcings add reals. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

The search for top quarks at hadron colliders: a realistic appraisal

We study means of identifying top quarks of mass in the range 70–120 GeV at the CERN and FNAL \(\bar pp\) colliders. We show that “W+dijet” production presents a serious background to the conventional “isolated electron+dijet” signature of top. We study an improved signature, calculate the expected event rates, and discuss the determination of the mass of the top quark.     

A New Method for the Construction of Macrolides Stereoselective Synthesis of (±)-Phoracantholide J. Preliminary communication

Starting from 5-chloro-2-pentanone ( 1 ) the naturally occurring 10-membered lactone phoracantholide J ( 8a ) has been synthesized as its racemate in a sequence of six steps (Scheme 2). Salient features of the syntheis include an internal selenium assisted acetal formation ( 4→5 ) and a stereoselective Claisen rearrangement ( 6→7→8 ). This general synthetic strategy offers an alternative approach towards the construction of macrocyclic lactones.     

Studies in mass spectrometry. IV—Fragmentation of aryltriflates. Substituent effects on [ArO]+ ion abundances: Looking for a best suited electron energy in the steady state approach. Experimental evidence for the ‘through bond’ stabilization of aryl cations by meta electron donor Substituents

The fragmentation patterns of 24 substituted phenyltrifluoromethanesulfonates has been determined by exact mass and metastable transition measurements. The influence of the ring substituent(s) on the abundance of the [ArO]+ ions has been investigated at low energies and a new standard parameter for plotting against Hammett's ó constants is proposed. The direct loss of CF₃SO₃ from the molecular ion of 3,5-(diisopropyl)-phenyl-, 3,5-(dicyclopropyl)phenyl- and 3,5-di(α-methylcyclopropyl)-phenyl-methanesulfonate, and further observations on the fragmentation processes of these compounds are consistent with M.O. calculations on the ‘through bond’ stabilization of the [Ar]+ σ state by meta electron donor substituents.     

Structural Aspects of the Enantioselectivity of Tartrates with α-Amino-alcohol Salts. Part II. Crystal structures of (1R, 2S)-norephedrine hydrochloride and (1R, 2R)- norpseudoephedrine hydrochloride

Enantioselective host-guest complexes between α-amino-alcohol salts and chiral tartrates can not be crystallised up to now. To study structural aspects of their enantioselectivity, crystal structures of the components were determined. Norephedrine was used as a reference guest α-amino-alcohol. (1R, 2S)-Norephedrine hydrochloride (monoclinic, space group P2₁ Z = 4, a = 8.455, b = 10.331, c = 12.570 Å, β = 107.45°) and (1R, 2R)-norpseudoephedrine hydrochloride (monoclinic, space group P2₁ Z = 2, a = 5.493, b = 8.052, c = 11.986 Å, β = 104.62°) both adopt M-synclinal conformations with respect to the ammonium and hydroxy groups. Rather short intramolecular N…?O distances indicate interaction between ammonium and hydroxy groups.     

A Highly Stereoselective Synthesis of C(11)-Functionalized Aromatic Steroids by an Intramolecular Benzocyclobutene-Olefin -Cycloaddition. Preliminary Communication

The racemic cis-anti-trans-steroids 9 to 11 have been synthesized in a highly stereoselective manner starting from 4-methoxybenzocyclobutene carboxylic acid via the key step 8 → 9 . (cf. Scheme 2).