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81.
2-D dopant profiling in VLSI devices using dopant-selectiveetching: an atomic force microscopy study
We report a detailed mapping of a 2-D dopant profile on a fully processed industrial sample with large dynamic range and high spatial resolution by utilizing a dopant-selective etching process and Atomic Force Microscopy. The experimental results show excellent agreement with those obtained from SRP and SIMS as corroborative methods. We also discuss the most critical factors which influence the applicability, reproducibility, and reliability of this method 相似文献
82.
Chun Hu Ji Zhao Li G.P. Liu P. Worley E. White J. Kjar R. 《Electron Device Letters, IEEE》1995,16(2):61-63
The effects of the plasma etching process induced gate oxide damages on device's low frequency noise behavior are investigated on MOSFET's fabricated with different field plate perimeter to gate area ratio antennas. Abnormal 1/f noise spectrum with a shoulder centered in the frequency range of 100 and to 1 kHz was frequently observed in small geometry devices, and it is attributable to a nonuniform distribution of oxide traps induced by plasma etching process 相似文献
83.
84.
85.
Li W. Aiken M. 《IEEE transactions on systems, man and cybernetics. Part C, Applications and reviews》1998,28(2):288-294
Many real-world decision-making problems fall into the general category of classification. Algorithms for constructing knowledge by inductive inference from example have been widely used for some decades. Although these learning algorithms frequently address the same problem of learning from preclassified examples and much previous work in inductive learning has focused on the algorithms' predictive accuracy, little attention has been paid to the effect of data factors on the performance of a learning system. An experiment was conducted using five learning algorithms on two data sets to investigate how the change in labeling the class attribute can alter the behavior of learning algorithms. The results show that different preclassification rules applied on the training examples can affect either the classification accuracy or classification structure 相似文献
86.
受中国电信委托、原邮电部经济技术发展研究中心在全国进行一次农村电信市场调查,以了解当前农村通信市场发展潜力,本文公布了此次调查的结果,从经济能力、资费和潜在市场等方面提出了发展农话的建议 。 相似文献
87.
The authors reply to the comments by Koppelaar and Tolhuizen (see ibid. vol.46, no.9, p.573, 1998). They state that the optimum choice of the slopes used to perform the encoding process in a projection code always results in maximizing the minimum Hamming distance so that d=2 r 相似文献
88.
Zi‐Cai Li Tzon‐Tzer Lu Hung‐Tsai Huang Alexander H.‐D. Cheng 《Numerical Methods for Partial Differential Equations》2007,23(1):93-144
In this article we survey the Trefftz method (TM), the collocation method (CM), and the collocation Trefftz method (CTM). We also review the coupling techniques for the interzonal conditions, which include the indirect Trefftz method, the original Trefftz method, the penalty plus hybrid Trefftz method, and the direct Trefftz method. Other boundary methods are also briefly described. Key issues in these algorithms, including the error analysis, are addressed. New numerical results are reported. Comparisons among TMs and other numerical methods are made. It is concluded that the CTM is the simplest algorithm and provides the most accurate solution with the best numerical stability. © 2006 Wiley Periodicals, Inc. Numer Methods Partial Differential Eq, 2007 相似文献
89.
We develop a lattice-dynamical model based on the screw symmetry of single-walled carbon nanotubes that allows for reducing the size of the dynamical matrix to six, for all tube chiralities. The model uses force constants derived from fitting to the phonon dispersion of 2D graphite. We present the calculation procedure in a clear and transparent way, making the model easier to follow. We calculate the phonon dispersions of a number of nanotubes of different chiralities. The splitting of two highest Raman active modes and the radial breathing mode frequency are studied by changing the tube diameter and chirality. 相似文献
90.
Ke Sha Dongshuang Li Yapeng Li Xiaotian Liu Shuwei Wang Jingqi Guan Jingyuan Wang 《Journal of polymer science. Part A, Polymer chemistry》2007,45(22):5037-5049
Amphiphilic diblock copolymer polycaprolactone‐block‐poly(glycidyl methacrylate) (PCL‐b‐PGMA) was synthesized via enzymatic ring‐opening polymerization (eROP) and atom transfer radical polymerization (ATRP). Methanol first initiated eROP of ?‐caprolactone (?‐CL) in the presence of biocatalyst Novozyme‐435 under anhydrous conditions. The resulting monohydroxyl‐terminated polycaprolactone (PCL–OH) was subsequently converted to a bromine‐ended macroinitiator (PCL–Br) for ATRP by esterification with α‐bromopropionyl bromide. PCL‐b‐PGMA diblock copolymers were synthesized in a subsequent ATRP of glycidyl methacrylate (GMA). A kinetic analysis of ATRP indicated a living/controlled radical process. The macromolecular structures were characterized for PCL–OH, PCL–Br, and the block copolymers by means of nuclear magnetic resonance, gel permeation chromatography, and infrared spectroscopy. Differential scanning calorimetry and wide‐angle X‐ray diffraction analyses indicated that the copolymer composition (?‐CL/GMA) had a great influence on the thermal properties. The well‐defined, amphiphilic diblock copolymer PCL‐b‐PGMA self‐assembled into nanoscale micelles in aqueous solutions, as investigated by dynamic light scattering and transmission electron microscopy. © 2007 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 45: 5037–5049, 2007 相似文献