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21.
Cresswell M.W. Allen R.A. Guthrie W.F. Sniegowski J.J. Ghoshtagore R.N. Linholm L.W. 《Semiconductor Manufacturing, IEEE Transactions on》1998,11(2):182-193
The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features 相似文献
22.
A new commercially available diode model is described. This unified model is capable of simulating the widest range of diode technologies of any presently available. The emphasis of this paper is on describing the model's extensive features and flexibility in the different domains of operation and is of particular interest in power applications 相似文献
23.
The capacitive idling converters derived from the Cuk, SEPIC, Zeta, and flyback topologies allow soft commutation of power switches without the need for additional circuitry, making it possible to increase the switching frequency while maintaining high efficiency 相似文献
24.
Daniel L. Feldheim Del R. Lawson Charles R. Martin 《Journal of Polymer Science.Polymer Physics》1993,31(8):953-957
We report a strong dependence of the thermal stability of Nafion® perfluorosulfonate ionomer on the nature of the counterion associated with the fixed sulfonate site. These results were obtained using thermal gravimetric analysis on a series of alkali metal and alkyl ammonium cation-exchanged Nafion films. We have found that the temperature of decomposition of Nafion is inversely dependent on the size of the exchanged cation; i.e., Nafion films show improved thermal stability as the size of the counter cation decreases. We attribute this inverse relationship of thermal stability with counterion size to an initial decomposition reaction which is strongly influenced by the strength of the sulfonate-coun-terion interaction. © 1993 John Wiley & Sons, Inc. 相似文献
25.
Jean-Michel L. Bernard 《电信纪事》1994,49(11-12):673-683
The time-scattering of an electromagnetic wave by a wedge-shaped region in a lossy medium, both with frequency dependent electric characteristics, is analyzed for plane wave and line source illuminations. New exact analytical expressions, satisfying explicitely the causality and allowing useful physical decompositions of the field, are obtained in these cases, using the particularities of the harmonic response in Sommerfeld-Maliuzhinets integral, especially original properties of the spectral function attached to it. 相似文献
26.
Fractal error for detecting man-made features in aerial images 总被引:3,自引:0,他引:3
A technique is proposed for aiding photointerpreters in detecting man-made features in aerial reconnaissance images. The technique, which uses a metric called fractal error, is based on the observed propensity of natural image features to fit a fractional Brownian motion model. Man-made features usually do not fit this model well, and consequently the fractal error metric may be used as a discriminant function for detecting man-made scene features 相似文献
27.
28.
A novel typed of hybrid-mode feed horn is presented. It comprises a hollow conical dielectric waveguide whose outer surface is metallized, and whose inner surface is coated with circumferentially oriented conducting strips. It may be designed to have mimimal cross polarization at two arbitrarily separated frequencies, as for a dual depth corrugated horn. Compared to the corrugated horn, it has the potential of lower weight and lower price. Small horns will have some cross polarization due to undesired radiation from the fields transmitted within the dielectric. 相似文献
29.
30.
We describe a simple way to achieve CW single-frequency laser operation with a grating as the sole tuning element. It is Shown, both experimentally and theoretically, that by proper choice of cavity parameters, the competing hole burning modes can be completely suppressed. Experiments to demonstrate the theoretical calculations were carried out in a CW color center laser using Tl0(1) centers. Linewidths of 0.01 cm-1were obtained and this figure can probably be much improved by proper cavity stabilization. The method can be readily extended to any compact gain medium. 相似文献