LB技术制备大面积超薄PMMA抗蚀层的研究

采用自行研制的ＬＢ自动提膜装置，制备出大面积（１０×８ｃｍ２）、高质量的ＰＭＭＡ超薄抗蚀剂膜，并将其用于高分辨率铬掩模版的研制。通过电子束曝光，湿法蚀刻，制作了分辨率优于０．５μｍ，特征线宽０．３８μｍ的４（１００ｍｍ）铬掩模版。     

用于红外地平仪的双列硅集成热堆传感器

本文报道了试用于红外地平仪的新型热堆传感器。由于尺寸小、集成热偶对数高,故设计成双列硅集成结构,集成B-Sb热偶对为112对。采用集成电路工艺和微细加工技术研制,使器件获得较好的稳定性和可靠性。测得器件性能为:电阻10±1kΩ,响应率0.9～1.2V/W,时间常数<100ms.探测率D~*≈1×10~8cmHz~(1/2)/W。     

基于公共存储器进行数据交换的高速数字图象处理系统

本文介绍了一种基于公共存储器进行数据交换的高速数字图象处理系统．给出了公共存储器的设计，描述了处理器对公共存储器的进程同步控制．     

The Cubooctahedron Shape──A Suboptimal Cell Shape for 3－Dimensional Cellular System

ＴｈｅＣｕｂｏｏｃｔａｈｅｄｒｏｎＳｈａｐｅ──ＡＳｕｂｏｐｔｉｍａｌＣｅｌｌＳｈａｐｅｆｏｒ３－ＤｉｍｅｎｓｉｏｎａｌＣｅｌｌｕｌａｒＳｙｓｔｅｍＣｈａＧｕａｎｇｍｉｎｇ；ＬｉＺｈｅｎｇｍａｏ；ＬｕＦａｎ（ＵｎｉｖｅｒｓｉｔｙｏｆＥｌｅｃｔｒｏｎｉ...     

Laser-induced etching of polycrystalline Al2O3TiC in KOH aqueous solution

Laser-induced etching of polycrystalline Al₂O₃TiC material by a tightly-focused cw Ar ion laser has been investigated in a KOH solution with different concentrations. It is found that the KOH concentration can strongly affect the etching quality where low KOH concentration can result in rough and irregular patterns. Laser-induced etching of polycrystalline Al₂O₃TiC in a KOH solution is found to be a photothermal reaction in which a threshold laser power exists. With an appropriate set of etching parameters, well-defined grooves can be obtained with clean side walls and with an etching rate up to several hundred micrometers per second. The etching behavior is also found to depend on laser scanning direction. It is also found that the grains in the polycrystalline Al₂O₃TiC material play an important role in the etching dynamics and etching quality. This etching process is believed to be applicable to the formation of a slider surface of magnetic heads in the future.     

Closed-form physical model for VLSI bipolar devices consideringenergy transport

A closed-form physical model is reported for VLSI bipolar devices considering energy transport. Based on the model, for a base width of 810 Å, the bipolar device, biased at V_cb=2 V, has a peak electron temperature of over 700 K, which results in a 5% reduction in the collector current     

Moment maps at the quantum level

We introduce the notion of moment maps for quantum groups acting on their module algebras. When the module algebras are quantizations of Poisson manifolds, we prove that the construction at the quantum level is a quantization of that at the semi-classical level. We also prove that the corresponding smashed product algebras are quantizations of the semi-direct product Poisson structures.Research partially supported by NSF grant DMS-89-07710     

紫外可调谐辐射的波长自动跟踪研究

脉冲染料激光器的可见光波段辐射通过共线倍频和非共线混频实现紫外波段的连续可调谐输出.本文报道了一种闭环跟踪方法;在调谐起始波长处,将取样光束在垂直相位匹配方向分割成等光强的两部分,然后在波长调谐时比较和平衡这两部分光强.对该方法在理论上作了分析并在实验中得到成功的验证.获得的自动跟踪效率大于90%.     

Rotational Spectra of Argon Acetone: A Two-Top Internally Rotating Complex

The rotational spectra of the argon acetone weakly bound complex was studied by pulsed jet Fabry-Perot Fourier transform microwave spectroscopy. Over 500 transitions of the complex were measured between 5.5 and 26 GHz from J=2-1 to J=12-11. The two methyl groups undergo hindered internal rotation resulting in four or five internal rotation states. The microwave transitions are within these states, resulting in a splitting of each rotational transition into four and sometimes five distinct transitions. The three-fold barrier to internal rotation is determined to be 260 cm⁻¹, 2% less than the 266 cm⁻¹ barrier in acetone itself. The structure of the complex has the argon atom above the heavy atom plane of the acetone, 3.52 Å from the CO bond and approximately in the C_s plane, which is perpendicular to the CCC plane of acetone.