Pseudo-steady-state solutions for solidification in a wedge

Polubarinova-Kochina's analytical differential equation methodis used to determine the pseudo-steady-state solution to problemsinvolving the freezing (solidification) of wedges of liquidwhich are initially at their fusion temperature. In particular,we consider four distinct problems for wedges which are: freezingwith the same constant boundary temperature, freezing with thesame constant boundary heat fluxes, freezing with distinct constantboundary temperatures and freezing with distinct constant fluxesat the boundaries. For the last two problems, a Heun's differentialequation with an unknown singularity is derived, which in bothcases admits a particularly elegant simple solution for thespecial case when the wedge angle is . The moving boundariesobtained are shown pictorially.     

用于高产量MEMS以及3D互联技术的低成本深层反应离子刻蚀系统

新兴的 3D 互联技术以及高产量的 MEMS 应用需要成本低廉以及高产量的深层反应离子刻蚀系统。最优化的 Alcatel 深层反应离子刻蚀系统可以同时满足工艺以及硬件生产性能的高要求。这些都已经在典型刻蚀工艺上进行了研究, 包括斜面刻蚀、堆叠时的 CMOS 刻蚀侧壁角度、3D 高精度惯性传感器的良好控制的形貌、大面积刻蚀的打印机喷头和硅麦克风应用。优化的工艺参数意味着在刻蚀率, 刻蚀的深宽比, notch free 的工艺, 光滑度以及高精度控制各方面的显著提高。Alcatel AMS 200 “I-Productivity”DRIE 机台用于高产量的工艺同时也确保了生产参数如整机效率的提高以及使用成本的降低, 这是通过机台的无可替代的硬件以及工艺方案实现的。