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101.
就如何在4英寸热氧化硅衬底上沉积高质量的磁性隧道结纳米多层薄膜材料和如何利用光刻方法微加工制备均匀性较好的磁性隧道结方面做了初步研究,并对磁性隧 道结的磁电性质及其工作特性进行了初步测量和讨论.利用现有的光刻设备和工艺条 件在4英寸热氧化硅衬底上直接制备出的磁性隧道结,其结电阻与面积的积 矢的绝对误差在10% 以内,隧穿磁电阻的绝对误差在7% 以内,样品的磁性隧道结性质具有较好的均匀性和一致性,可以满足研制磁随机存储器存储单元演示器件的基本要求.
关键词:
磁性隧道结
隧穿磁电阻
磁随机存储器
4英寸热氧化硅衬底 相似文献
102.
103.
Onishi K. Rino Choi Chang Seok Kang Hag-Ju Cho Young Hee Kim Nieh R.E. Jeong Han Krishnan S.A. Akbar M.S. Lee J.C. 《Electron Devices, IEEE Transactions on》2003,50(6):1517-1524
Bias-temperature instabilities (BTI) of HfO/sub 2/ metal oxide semiconductor field effect transistors (MOSFETs) have been systematically studied for the first time. NMOS positive BTI (PBTI) exhibited a more significant V/sub t/ instability than that of PMOS negative BTI (NBTI), and limited the lifetime of HfO/sub 2/ MOSFETs. Although high-temperature forming gas annealing (HT-FGA) improved the interface quality by passivating the interfacial states with hydrogen, BTI behaviors were not strongly affected by the technique. Charge pumping measurements were extensively used to investigate the nature of the BTI degradation, and it was found that V/sub t/ degradation of NMOS PBTI was primarily caused by charge trapping in bulk HfO/sub 2/ rather than interfacial degradation. Deuterium (D/sub 2/) annealing was found to be an excellent technique to improve BTI immunity as well as to enhance the mobility of HfO/sub 2/ MOSFETs. 相似文献
104.
105.
Wei-Hua Guo Yong-Zhen Huang Chun-Lin Han Li-Juan Yu 《Quantum Electronics, IEEE Journal of》2003,39(6):716-721
To improve the accuracy of measured gain spectra, which is usually limited by the resolution of the optical spectrum analyzer (OSA), a deconvolution process based on the measured spectrum of a narrow linewidth semiconductor laser is applied in the Fourier transform method. The numerical simulation shows that practical gain spectra can be resumed by the Fourier transform method with the deconvolution process. Taking the OSA resolution to be 0.06, 0.1, and 0.2 nm, the gain-reflectivity product spectra with the difference of about 2% are obtained for a 1550-nm semiconductor laser with the cavity length of 720 /spl mu/m. The spectra obtained by the Fourier transform method without the deconvolution process and the Hakki-Paoli method are presented and compared. The simulation also shows that the Fourier transform method has less sensitivity to noise than the Hakki-Paoli method. 相似文献
106.
Yong‐Jin Kim Jin‐Woong Kim Jung‐Eun Lee Jee‐Hyun Ryu Junoh Kim Ih‐Seop Chang Kyung‐Do Suh 《Journal of polymer science. Part A, Polymer chemistry》2004,42(22):5627-5635
Mesoporous polymer microspheres with gold (Au) nanoparticles inside their pores were prepared considering their surface functionality and porosity. The Au/polymer composite microspheres prepared were characterized by transmission electron microscope (TEM), X‐ray diffraction (XRD), and Brunauer–Emmett–Teller (BET) techniques. The results showed that the adsorption of Au nanoparticles could be increased by imparting the pore structure and surface‐functional groups into the supporting polymer microspheres (in this study, poly (ethylene glycol dimethacrylate‐co‐acrylonitrile) and poly (EGDMA‐co‐AN) system). Above all, from this study, it was established that the porosity of the polymer microspheres is the most important factor that determines the distribution and adsorption amount of face‐centered cubic (fcc) Au nanoparticles in the final products. Our study showed that the continuous adsorption of Au nanoparticles with the aid of the large surface area and surface interaction sites formed more favorably the Au/polymer composite microspheres. The BET measurements of Au/poly(EGDMA‐co‐AN) composite microspheres reveals that the adsorption of Au nanoparticles into the pores kept the pore structure intact and made it more porous. © 2004 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 42: 5627–5635, 2004 相似文献
107.
Yu-hai WU~ 《中国科学A辑(英文版)》2007,50(7):925-940
This paper concerns the number and distributions of limit cycles in a Z_2-equivariant quintic planar vector field.25 limit cycles are found in this special planar polynomial system and four different configurations of these limit cycles are also given by using the methods of the bifurcation theory and the qualitative analysis of the differential equation.It can be concluded that H(5)≥25=5~2, where H(5)is the Hilbert number for quintic polynomial systems.The results obtained are useful to study the weakened 16th Hilbert problem. 相似文献
108.
109.
Deguang Han 《应用数学学报(英文版)》1994,10(2):213-219
In this paper we will prove some theorems on theM-ideals of compact operators and the best approximation of quasitriangular operator algebras. These results improve and extend the known results in [4, 5, 7].This work is supported in part by the National Natural Science Foundation of China. 相似文献
110.