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针对VO2薄膜在微测辐射热计上的应用,采用射频反应溅射法,在室温下制备氧化钒薄膜;研究了氧分压对薄膜沉积速率、电学性质及成分的影响.通过调节氧分压,先获得成分接近VO2的非晶化薄膜,再在400℃空气中氧化退火,便可制得高电阻温度系数,低电阻率的VO2薄膜,电阻温度系数约为-4%/℃,薄膜方块电阻为R□为100—300kΩ;薄膜在室温下沉积,400℃下退火的制备方法与微机电加工(micro electromechanic
关键词:
二氧化钒
电阻温度系数
氧分压
射频反应溅射法 相似文献
44.
High index of refraction via quantum interference in a three-level system of Er^3+-doped yttrium aluminium garnet crystal 下载免费PDF全文
A simple three-level system is proposed to produce high index of refraction with zero absorption in an Er^3+-doped yttrium aluminium garnet (YAG) crystal, which is achieved for a probe field between the excited state 4I13/2 and ground state 4I15/2 by adjusting a strong coherent driving field between the upper excited state 4I11/2 and 4I15/2. It is found that the changes of the frequency of the coherent driving field and the concentration of Er^3+ ions in the YAG crystal can maximize the index of refraction accompanied by vanishing absorption. This result could be useful for the dispersion compensation in fibre communication, laser particle acceleration, high precision magnetometry and so on. 相似文献
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46.
Junxiang Zhang Yabin Dong Haihong Wang Jiangrui Gao 《量子光学学报》2006,12(B08):74-74
The quantum coherence effects of the transition Fe = 2←→Fg = 3 depending on the polarization of the coupling and probe beam are observed in a Cs vapor cell. The splitting of electromagnetically induced transparency (EIT) window is observed when the degeneracy of two-level system is broken using a magnetic field. It is also shown that the splitted transparency points of two of three windows are shifted with the intensity of magnetic field ( i. e. Zeeman splitting in the upper and lower levels ) increasing. On the contrary, when we fix the intensity of magnetic field, and increase the Rabi frequency of the coupling beam, the splitted transparency peaks become wider. A qualitative agreement between experiment and theory is found. 相似文献
47.
Liang Y.C. Wenjiang Zeng Pick Hong Ong Zhaoxia Gao Jun Cai Balasubramanian N. 《Electron Device Letters, IEEE》2002,23(12):700-703
In this letter, a concise process technology is proposed for the first time to enable the fabrication of good quality three-dimensional (3-D) suspended radio frequency (RF) micro-inductors on bulk silicon, without utilizing the lithography process on sidewall and trench-bottom patterning. Samples were fabricated to demonstrate the applicability of the proposed process technology. 相似文献
48.
两种波长激光血管内照射生物效应比较 总被引:2,自引:0,他引:2
目的:研究同等照射条件的低强度532nm与633nm激光血管内照射生物效应的特点。方法:用532nm和633nm激光对健康大耳白家兔血管内照射,平均照射功率均设定在5mW左右,照射总能量约12J。两组家兔均于照前及照后1d、4d、7d、11d采集外周血,检测血浆ET、NO、MDA含量和SOD活性。结果:两组家兔上述各指标随照后时间的变化规律相似,经方差分析组间各指标都没有显著性差异。结论:同等照射条件下,低强度532nm与633nm激光照射血液的生物效应相似。 相似文献
49.
Guofen Yu Yuanci Gao Shenggang Liu Wenxiang Wang Jin Wu 《International Journal of Infrared and Millimeter Waves》2002,23(8):1261-1269
Analysis of the field distributions in a single biological cell under electromagnetic wave is given. With Debye approximation, the dielectric relaxation of each part of the cell, including the extracellular and cellular media, the cell membrane and the nuclear membrane, was taken into account. Making use of some typical parameters for a cell, the voltage across nuclear and cytoplasma membranes under electromagnetic waves are calculated up to millimeter wave frequency range. The calculated result indicates that it is unlikely to generate electroporation by present available millimeter wave sources. 相似文献
50.
The existence and uniqueness of classical global solutions to a type of Boussinesq equations with initial and boundary values are studied in this paper. The existence of such solutions is proved by means of compactness theorem and Schauders fixed point theorem, and its uniqueness by the so called energy method.Projects Supported by the Science Fund of the Chinese Academy of Sciences. 相似文献