GaAs亚微米自对准工艺技术研究

总结了在５０ｍｍＧａＡｓ圆片上实现自对准介质膜隔离等平面工艺技术的研究，着重描述了离子注入、自对准亚微米难熔栅制备、钝化介质膜生长、干法刻蚀、电阻和电容制备等关键工艺的研究结果。这套工艺的均匀性、重复性好，在５０ｍｍＧａＡｓ圆片上获得了满意的成品率。采用这套工艺已成功地研制出多种性能良好的ＧａＡｓＩＣ和ＧａＡｓ功率ＭＥＳＦＥＴ，证明国家自然科学基金委员会这一重大课题的选择对发展我国ＧａＡｓＩＣ确实具有重大意义。     

微波BJT超宽带低噪声放大器的设计

本文给出了一种频带覆盖达１０－１６００ＭＨｚ的微波ＢＪＴ超宽带低噪声放大器的设计方法，从微波ＢＪＴ的噪声模型出发，通过拟合５０Ω源阻抗下微波ＢＪＴ的噪声系数ＮＦ５０和Ｓ参数来提取其噪声参数，然后根据增益，噪声及驻波比要求优化设计放大器，使放大器在超宽带范围内获得平坦增益和低噪声，本文所给出的微波ＢＪＴ惨数提取及放大器优化设计方法已由实验结果所验证。     

寄生电容不敏感的开关电容乘法器的设计与分析

本文论述了寄生电容不敏感型开关电容四象限模拟乘法器的设计，并提出了一种新型的电路结构，分析了它的性能，以及元器件的非理想特性对其性能的影响和采取的补偿方法。     

微波辐射电镜生物样品制备方法研究

本文报道一种快速微波辐射电镜样品制备方法──水浴法，以及这个方法在动植物样品超薄切片制备中的应用。实验结果表明，水浴法使得样品可以接受相对较长时间的微波辐射而不致造成任何损伤，浸泡液和样品的温度控制简单而且准确，样品处理的结果内外均匀一致，超微结构保存优秀，完全可与常规制样法和Ｌｏｇｉｎ法的结果相媲美，而且在某些方面水浴法要优于常规法和Ｌｏｇｉｎ法。     

温度调谐LBO晶体光参量振荡器

本文详细研究０．５３２μｍ激光泵浦、温度调谐Ⅱ型非临界相位匹配ＬＢＯ光参量振荡器。当温度从２０℃升高到２００℃时，其信号波和闲置波的调谐范围分别为１．００２～０．８９８μｍ和１．１３４～１．３０６μｍ。本装置最吸引人之处是本征输出线宽比Ⅰ型情形小一个量级。     

利用空间多普勒调谐技术冷却原子及其速度单一化

本文理论计算了用圆锥管内多次全反射激光而产生的多普勒频移来冷却原子束的机制。给出了最佳冷却原子束的圆锥管的夹角、长度、反射次数及激光入、出射角等参数。理论计算了原子束经过圆锥管冷却的速度分布情况。数值计算结果表明：采用两个长１３０ｃｍ的锥形管来冷却原子束，选用合适的失谐量可使极大部分速度小于１２００ｍ／ｓ的原子冷却到８ｌｍ／ｓ，并且可得到单一速度的高亮度的原子束。     

Protocol design and performance analysis for manufacturing messagespecification: A Petri net approach

The manufacturing message specification (MMS) is the ISO standard communication protocol specific to manufacturing. To analyze MMS design and performance, service unit automats are introduced to represent individual MMS services, while service connection Petri Nets (PNs) are constructed from these automats to describe MMS service connections and processes. This approach makes MMS protocol specification and analysis possible in terms of well-developed concepts and methods in PN theory. It leads to a distributed and hierarchical model of MMS software system by integrating service connection PNs. A generalized stochastic PN for MMS performance evaluation is obtained by incorporating service parameters and time factors into the model. A technique based on T-invariants is used to simplify the performance analysis     

Suppression of boron penetration in p+ polysilicon gateP-MOSFETs using low-temperature gate-oxide N2O anneal

It has been reported that high-temperature (~1100°C) N₂ O-annealed oxide can block boron penetration from poly-Si gates to the silicon substrate. However, this high-temperature step may be inappropriate for the low thermal budgets required of deep-submicron ULSI MOSFETs. Low-temperature (900~950°C) N₂O-annealed gate oxide is also a good barrier to boron penetration. For the first time, the change in channel doping profile due to compensation of arsenic and boron ionized impurities was resolved using MOS C-V measurement techniques. It was found that the higher the nitrogen concentration incorporated at Si/SiO₂ interface, the more effective is the suppression of boron penetration. The experimental results also suggest that, for 60~110 Å gate oxides, a certain amount of nitrogen (~2.2%) incorporated near the Si/SiO₂ interface is essential to effectively prevent boron diffusing into the underlying silicon substrate     

Enhancement of oxide break-up by implantation of fluorine inpoly-Si emitter contacted p+-n shallow junctionformation

In this study, it is demonstrated that the incorporation of fluorine can enhance poly-Si/Si interfacial oxide break-up in the poly-Si emitter contacted p⁺-n shallow junction formation. The annealing temperature for breaking up the poly-Si/Si interfacial oxide has been found to be as low as 900°C. As a result, the junction depth of the BF₂-implanted device is much larger than that of the boron-implanted device     

Design model and guidelines for n-well guard ring in epitaxial CMOS

This work reports the development of design model for n-well guard rings in a CMOS process utilizing a low-doped epitaxial layer on a highly doped substrate. The validity of the model has been judged by a wide range of experimental data measured from the fabricated n-well guard ring structures with guard ring width as parameter. From the model developed, guidelines have been drawn to minimize the guard ring width while critically suppressing the amount of electrons escaping from the guard ring