Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

CONCEPTUAL DESIGN STUDIES OF AN 84 GHz, 500 kW, CW GYROTRON

The feasibility of an 84 GHz, 500 kW, CW gyrotron for ECRH on an experimental tokamak will be presented in this paper. Mode competition and mode selection procedures are carefully investigated by considering various candidate modes and the TE_10,4 mode is chosen as the operating mode. A conventional cylindrical cavity resonator with weak input and output tapers and parabolic roundings is considered for interaction studies. Self-consistent, both single mode and time-dependent, calculations are carried out and power and efficiencies are computed for a typical set of beam parameters. The results show that an output power of well over 500 kW, CW and efficiency around 40% can be reached without a depressed collector.     

Investigations of low- and high-spin states of <Superscript>132</Superscript>La

The fusion evaporation reaction ¹²²Sn(¹⁴N, 4n)¹³²La was used to populate the high-spin states of ¹³²La at the beam energy of 60 MeV. A new band consisting of mostly E2 transitions has been discovered. This band has the interesting links to the ground state 2^- and the isomeric state 6^-. A new transition of energy 351 keV connecting the low-spin states of the positive-parity band based on the πh _11/2 ⊗ νh _11/2 particle configuration, has been found. This has played a very important role in resolving the existing ambiguities and inconsistencies in the spin assignment of the band head. Received: 12 August 2002 / Accepted: 18 March 2003 / Published online: 7 May 2003     

Closed-form solutions for a rectangular layer with central crack under anti-plane shear stress

We consider the problem of determining the stress distributionin a finite rectangular elastic layer containing a Griffithcrack which is opened by internal shear stress acting alongthe length of the crack. The mode III crack is assumed to belocated in the middle plane of the rectangular layer. The followingtwo problems are considered: (A) the central crack is perpendicularto the two fixed lateral surfaces and parallel to the othertwo stress-free surfaces; (B) all the lateral surfaces of therectangular layer are clamped and the central crack is parallelto the two lateral surfaces. By using Fourier transformations,we reduce the solution of each problem to the solution of dualintegral equations with sine kernels and a weight function whichare solved exactly. Finally, we derive closed-form expressionsfor the stress intensity factor at the tip of the crack andthe numerical values for the stress intensity factor at theedges of the cracks are presented in the form of tables.     

Essay: The Quantum Gravitational Black Hole Is Neither Black Nor White

Understanding the end state of black hole evaporation, the microscopic origin of black hole entropy, the information loss paradox, and the nature of the singularity arising in gravitational collapse - these are outstanding challenges for any candidate quantum theory of gravity. Recently, a midisuperspace model of quantum gravitational collapse has been solved using a lattice regularization scheme. It is shown that the mass of an eternal black hole follows the Bekenstein spectrum, and a related argument provides a fairly accurate estimate of the entropy. The solution also describes a quantized mass-energy distribution around a central black hole, which in the WKB approximation, is precisely Hawking radiation. The leading quantum gravitational correction makes the spectrum non-thermal, thus providing a plausible resolution of the information loss problem.     

Photodegradation of a herbicide derivative, 2,4-dichlorophenoxy acetic acid in aqueous suspensions of titanium dioxide

The photocatalytic degradation of a herbicide derivative, 2,4-dichlorophenoxy acetic acid (2,4-D, 1), has been investigated in aqueous suspensions of titanium dioxide. The degradation was studied by monitoring the change in substrate concentration employing UV spectroscopic analysis and decrease in Total Organic Carbon (TOC) content as a function of irradiation time in the presence of UV light source. The degradation kinetics was investigated under a variety of conditions, such as different types of TiO₂, pH, catalyst and substrate concentrations. Higher photonic efficiencies were observed with Degussa P25 as compared with other photocatalysts. The degradation products were analysed by GC-MS and probable pathways for the formation of different products were proposed.     

Critical Behavior of Two Interacting Linear Polymer Chains in a Good Solvent

A model of two interacting (chemically different) linear polymer chains is solved exactly using the real-space renormalization group transformation on a family of Sierpinski gasket type fractals and on a truncated 4-simplex lattice. The members of the family of the Sierpinski gasket-type fractals are characterized by an integer scale factorb which runs from 2 to ∞. The Hausdorff dimensiond _F of these fractals tends to 2 from below asb → ∞. We calculate the contact exponenty for the transition from the State of segregation to a State in which the two chains are entangled forb = 2-5. Using arguments based on the finite-size scaling theory, we show that forb→∞, y = 2 - v(b) d _F, wherev is the end-toend distance exponent of a chain. For a truncated 4-simplex lattice it is shown that the system of two chains either remains in a State in which these chains are intermingled in such a way that they cannot be told apart, in the sense that the chemical difference between the polymer chains completely drop out of the thermodynamics of the system, or in a State in which they are either zipped or entangled. We show the region of existence of these different phases separated by tricritical lines. The value of the contact exponenty is calculated at the tricritical points.     

Finite-difference time-domain analysis and experimental examinationof the performance of a coupled-cavity MQW laser/active waveguide at1.54 μm

The performance characteristics of a coupled cavity InGaAsP-InP MQW laser/active waveguide made by one-step epitaxy and well-controlled reactive ion etching (RIE) have been theoretically analyzed and experimentally determined. A theoretical model based on a finite-difference time-domain (FDTD) technique was used to simulate the propagation of an optical wave launched in the coupled system and determine the reflectivity of the facets created by RIE. The calculated effective reflectivity of the coupling region consisting of two facets and an air gap is between 0.45 and 0.55, which is in good agreement with the experimentally measured value of 0.5. The reflectivity of a single etched mirror derived from this value is estimated to be 0.3. A 120-μm-long monolithically integrated active waveguide when biased as a modulator and excited by the laser shows a maximum extinction ratio of 8 dB and a modulation bandwidth ⩾14 GHz at a dc bias of -0.5 V with a bias swing of 2 V