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51.
The impact of single-wafer processing on semiconductor manufacturing   总被引:1,自引:0,他引:1  
In this paper, we have described the importance of single-wafer processing (SWP) in semiconductor manufacturing. As compared to batch processing, reduced cycle time, better control of surface and interface properties, and reduced defect densities are some of the attractive features of SWP. We have provided the example of new SWP tools that have the answers to address virtually all process integration issues in dealing with new materials as well as conventional materials in ultra small dimensions. Driven by reduced I/O pitches, and emergence of system-on-chip, system-in-package or system-on-package as the driver of semiconductor growth, SWP tools have started to play an important role in the surface cleaning in IC assembly and packaging. Global acceptance of SWP in manufacturing can address the supply chain problem of the semiconductor industry.  相似文献   
52.
New model compounds for poly[N,N′-bis(phenoxyphenyl)pyromellitimide] have been synthesized in order to investigate the formation of imine bonds which are proposed to form during the curing process and lead to crosslinking in the bulk polymer. Raman studies show that terminal amines can react with imide carbonyls during curing to form C?N bonds. The Raman band due to C?N appears at 1656 cm?1 and the band due to C?O closest to the imine bond is observed at 1742 cm?1. These results are in agreement with previously published results on vapor deposited polyimide films.  相似文献   
53.
A novel small fluid controlled optical lens system that is capable of displaying dynamic variation of its focal length and field-of-view (FOV) is designed and fabricated. In this active lens system, appropriate volume of the optical fluid can be pumped into or out of the lens chamber to provide double-convex (DCX) or double-concave (DCV) lens effect. Simple optical imaging experiments were performed using different sets of glass lenses with fixed focal lengths to determine the optimum lens configuration required for designing a dynamic optical lens system. The experimental results obtained from the glass lenses demonstrate that a combination of a single DCX lens with three DCV lenses provides a wider FOV. The flexible membranes for fluid controlled lenses were fabricated using polydimethylsiloxane polymer material, which has good optical transparency and elasticity. A simple fluid injection system is used to vary the radius of curvature of the lenses, and thereby to change the focal length. A dynamic optical lens system with a combination of one DCX and multiple variable focal length DCV lenses as designed here can image an object with a wide range of focal length and FOV. With this fluid controlled optical system, the FOV and focal length could be continuously varied and a maximum FOV of 118.3° could be achieved. The smallest f-number (f/#) for this fluid controlled single lens system was found to be 1.3, which corresponds to the numerical aperture value of 0.35.  相似文献   
54.
55.
Conductivity, viscosity, turbidity, and NMR measurements were performed over most of the mole fraction range for sodium deoxycholate (SDC) with hexadecyltrimethylammonium bromide (HTAB), hexadecylpyridinium bromide (HPyBr), and hexadecylpyridinium chloride (HPyCl). All studies demonstrate that the mixed-micelle formation is more favorable in SDC plus HTAB rather than SDC plus HPyBr or SDC plus HPyCl mixtures. The results showed that the bulky pyridinium head groups of HPyBr or HPyCl create steric incompatibility with rigid SDC monomers in the mixed state.  相似文献   
56.
Studies of the muonium fractions in the amorphous oxide a-SiO have been carried out by RF resonance at TRIUMF, Canada and LF repolarization techniques at RAL, U.K. The resonance measurements confirm the presence of the interstitial Mu centre in this intermediate oxide of silicon. Analysis of the data gathered at RAL, using a recently-developed fitting technique, reveals that the Mu* state is present here as well, but with lower relative fractions than in a-Si. However, as in the latter material, but in contrast to c-Si, this bond-centre species appears to be stable up to room temperature.  相似文献   
57.
Using upper consolute temperatures (UCT) and corresponding consolute compositions (CC) of water-phenol systems with each of 0.1 mol kg?1 salts and acids, 1.0% polyethylene glycol 200, 0.01 mol kg?1 surfactant and aromatic compounds, we obtained 0.01 mol kg?1 CaF2 and CrCl3 compositions. Focusing on UCT and CC, the role of valence electrons and shell number, basicity, hydrophilic, hydrophobic and π conjugated electrons of corresponding additives are reported. The surfactants and π conjugation electrons are noted to decrease the UCT in a constant ratio that depicts the state and inherent strength of ionic and molecular-water interactions. The data are useful in the investigation of cloud points of immiscible solutions based on the Hofmeister series.  相似文献   
58.
59.
A (p, q)-sigraph S is an ordered pair (G, s) where G = (V, E) is a (p, q)-graph and s is a function which assigns to each edge of G a positive or a negative sign. Let the sets E + and E consist of m positive and n negative edges of G, respectively, where m + n = q. Given positive integers k and d, S is said to be (k, d)-graceful if the vertices of G can be labeled with distinct integers from the set {0, 1, ..., k + (q – 1)d such that when each edge uv of G is assigned the product of its sign and the absolute difference of the integers assigned to u and v the edges in E + and E are labeled k, k + d, k + 2d, ..., k + (m – 1)d and –k, – (k + d), – (k + 2d), ..., – (k + (n – 1)d), respectively.In this paper, we report results of our preliminary investigation on the above new notion, which indeed generalises the well-known concept of (k, d)-graceful graphs due to B. D. Acharya and S. M. Hegde.  相似文献   
60.
This is the report of neutrino and astroparticle physics working group at WHEPP-7. Discussions and work on CP violation in long baseline neutrino experiments, ultra high energy neutrinos, supernova neutrinos and water Cerenkov detectors are discussed.  相似文献   
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