氧分压和沉积速率对YSZ薄膜残余应力的影响

采用摩尔分数为7%的Y2O3掺杂的ZrO2混合烧结料为原料,在不同的氧分压和沉积速率下用电子柬蒸发方法沉积氧化钇稳定氧化锫(YSZ)薄膜样品.利用ZYGO Mark Ⅲ-GPI数字波面干涉仪对YSZ薄膜的残余应力进行了研究,讨论了氧分压和沉积速率等工艺参量对残余应力的影响.实验结果表明,不同氧分压和沉积速率下,YSZ薄膜的残余应力均为张应力;应力值随氧分压的升高先增大后减小,随沉积速率的增加单调增加.热应力对薄膜所呈现的张应力性质起着决定性作用,同时应力值的大小受本征应力和附加应力的影响.通过对样品的X射线衍射(XRD)测试,结合薄膜微结构的变化,对应力的形成原因进行了解释.     

张量投票方法的投票域计算分析

张量投票方法是一种鲁棒性很强的特征提取方法,而投票域的计算则是应用该方法进行图像处理的关键步骤之一。通过实验分析了该方法的投票域计算时的唯一关键参数—尺度参数对投票结果的影响,并通过实例说明在具体应用领域中可以根据图像特点简化投票域的计算。     

可编程序控制器在混合液体加工控制中的应用

通过对某一混合液体加工工艺过程的分析,采用FX2N-48MR可编程序控制器实现加工生产过程的自动／手动控制,利用PLC输出的开关信号,经过由光电偶合器组成的驱动电路,输出数字信号去控制阀门电动执行器,以控制阀门的开启与关闭,完成液体生产过程的自动／手动控制。克服了采用继电器-接触器控制系统大量使用中闻继电器,存在故障率高、体积大、操作复杂、控制精度低等缺点,从而实现对温度、阀门等对象的控制。减少了设备的故障率和废料率,降低了生产成本。控制过程稳定、可靠,提高了生产效率。     

0.13 μm CMOS低功耗10位100MS/S 电流舵 D/A IP设计与验证

Based on a low supply voltage curvature-compensated bandgap reference and central symmetry Q² random walk NMOS current source layout routing method, a 1.2-V 10-bit 100-MSPS CMOS current-steering digital-to-analog converter is implemented in a SMIC 0.13-μ m CMOS process. The total consumption is only 10 mW from a single 1.2-V power supply, and the integral and differential nonlinearity are measured to be less than 1 LSB and 0.5 LSB, respectively. When the output signal frequency is 1–5 MHz at 100-MSPS sampling rate, the SFDR is measured to be 70 dB. The die area is about 0.2 mm².     

LD侧泵模块结构参数优化实验研究方法与装置

提出了对LD侧泵棒状激光介质模块结构参数进行定量优化研究的简便实验装置和方法,该装置与方法能够定量分析研究LD与激光棒表面间距、环绕激光棒泵浦光方向数量及激光棒掺杂浓度等参数对于激光棒内增益分布均匀性及模块耦合吸收效率的影响;利用上述装置与方法定量分析了LD与激光棒侧面间距对侧泵Nd：YAG模块的耦合效率及增益分布均匀性的影响,确定了其优化值。     

Silver Hollow Microspheres: Large-scale Synthesis, Characterization and Electromagnetic Shielding Property

A facile and large-scale synthesis method to fabricate silver hollow microspheres with controllable morphologies and shell thickness is described using low-cost glass microspheres as templates. The method mainly involves two steps of the preparation of silver-coated glass microsphere core-shell particles by a controllable liquid reduced reaction of Ag[(NH3)2]+ solution, which only produces silver nanoparticles anchored on the surface of the thiolated glass microsphere templates, and the removal of glass microspheres by wet chemical etching with HF solution. The products are well characterized by field emitted scanning electron microscopy (SEM), transmitted electron microscopy (TEM), X-ray photoelectron spectra (XPS), X-ray diffraction (XRD) and energy dispersive X-ray (EDX) etc. The as-prepared core-shell particles and hollow particles have even and compact silver shells. The electromagnetic shielding coatings based on the silver hollow microspheres are demonstrated to have high conductivity, excellent shielding effectiveness and long durability, suggesting that the silver hollow microspheres obtained here are a novel light-weight electromagnetic shielding filler and will have extensive applications in the electromagnetic compatibility fields.     

基于随机共振的不同非线性系统的微弱信号检测性能分析

从随机共振基本原理出发,分析研究了随机共振应用于强噪声背景下的微弱信号检测问题。由于随机共振是非线性系统（单稳、双稳以及多维多稳系统）中的一种动力学现象,采用不同的非线性系统,因其非线性结构的不同,对微弱信号的检测性能也不同。文章采用Matlab中的Simulink工具进行仿真,比较分析了常用的一维双稳Langevin系统和二维双稳Duffing系统在不同信噪比条件下对微弱信号的检测性能。     

真空紫外光学薄膜及薄膜材料

概述了真空紫外(VUV)波段光学薄膜及薄膜材料的研究进展,金属Al膜因到短至80nm还能提供较高的反射率而得到普遍关注,在高真空和30 nm/s左右沉积速率下沉积了保护层的金属Al膜在157 nm处反射率可达90%.介质氧化物薄膜机械应力小,环境稳定性比氟化物薄膜好,在190 nm以上波段应用较广泛,但在180 nm以下波段吸收大大增加而应由氟化物薄膜取代.氟化物薄膜带宽大、吸收系数小,沉积了致密SiO2保护层的氟化物高反膜,在中心波长180 nm处可得到接近99%的反射率,而且膜系的稳定性和抗激光损伤也大大提高.氟化物减反膜在157 nm处可得到0.1%以下的反射率;到目前为止氟化物薄膜最好的沉积工艺是电阻热蒸发.     

Real-time surface figure monitoring of optical elements in continuous polishing

A real-time monitoring system is set up based on a computer, dynamic interferometer, beam expanding system,and a beam reflecting system. The stability and repeatability of the monitoring system is verified. A workpiece and a glass monitoring plate are placed in the same ring. The surface figure of the workpiece, monitored by the monitoring plate, synchronizes with the surface of the glass monitoring plate in terms of peak–valley and power.The influence of the reflection and transmission surface are discussed in theory and a numeral deviation in online and offline testing data is quantitatively analyzed. The new method provides a quick and easy real-time method to characterize changes to the optical surface during polishing.