评价IC芯片质量与可靠性的关键技术研究

对CPK、SPC和PPM三项评价IC芯片质量和可靠性的关键技术进行了研究.使用这三项技术,实际评价了芯片制造工艺中的氧化工艺.实践证明,这三项技术在工艺生产能力评估、工艺过程控制和失效分析等方面具有广阔的应用前景,特别是在工艺过程中对特殊工艺的评估.     

活性炭负载纳米TiO_2光催化降解甲醛废水研究

甲醛对人和温血动物的毒性很强,如果人类长期饮用被甲醛污染的水源,会引发头昏、贫血以及各种神经系统疾病.为此,研究学者对甲醛废水的处理进行了很多的试验研究.目前处理甲醛废水的主要方法有:芬顿法、光催化氧化法、湿式氧化处理等高级氧化技术,二氧化氯法,蒸汽吹脱法,氧化吸附法,SBR工艺等.     

DSP技术在短波收信机中的应用

本文叙述了数字信号处理技术在短收信机中完成的主要功能，同时介绍了ＩＳＢ解调的数学模型，另外还分析了ＤＳＰ的技术难点。     

Improve the performance of interferometer with ultra-cold atoms

Ultra-cold atoms provide ideal platforms for interferometry.The macroscopic matter-wave property of ultra-cold atoms leads to large coherent length and long coherent time,which enable high accuracy and sensitivity to measurement.Here,we review our efforts to improve the performance of the interferometer.We demonstrate a shortcut method for manipulating ultra-cold atoms in an optical lattice.Compared with traditional ones,this shortcut method can reduce the manipulation time by up to three orders of magnitude.We construct a matter-wave Ramsey interferometer for trapped motional quantum states and significantly increase its coherence time by one order of magnitude with an echo technique based on this method.Efforts have also been made to enhance the resolution by multimode scheme.Application of a noise-resilient multi-component interferometer shows that increasing the number of paths could sharpen the peaks in the time-domain interference fringes,which leads to a resolution nearly twice compared with that of a conventional double-path two-mode interferometer.With the shortcut method mentioned above,improvement of the momentum resolution could also be fulfilled,which leads to atomic momentum patterns less than 0.6hkL. To identify and remove systematic noises,we introduce the methods based on the principal component analysis (PCA) that reduce the noise in detection close to the 1/√2 of the photon-shot noise and separate and identify or even eliminate noises.Furthermore,we give a proposal to measure precisely the local gravity acceleration within a few centimeters based on our study of ultracold atoms in precision measurements.     

CAN总线接口扩展设计与驱动开发

介绍了一种基于S3C6410的CAN总线接口扩展方案,通过SPI接口对CAN接口进行扩展,并给出具体的硬件电路。重点研究了WINCE系统下独立CAN控制器MCP2515的驱动程序。结合CAN总线技术规范和MCP2515的特点设计了相关的软件代码,编写了CAN流接口驱动程序,实验结果表明,在WINCE系统下能够较好实现CAN总线的通信。     

SOI电路窄沟槽隔离技术研究

文章利用SOI材料片做衬底,开展了SOI电路窄沟槽隔离技术的研究,解决了窄槽刻蚀、多晶硅回填、平整化等技术难题,获得了优化的SOI电路窄沟槽隔离工艺技术条件;岛与岛之间的隔离击穿达到300 V,为下一步研制生产SOI电路打下了坚实的基础.     

基于MUX的PSK调制系统设计

载波的两种相位随二进制数字基带信号离散变化称为二进制移相键控（2PSK）。对BPSK和DPSK调制原理研究基础上,讨论了数字化处理2PSK调制系统的模块建立,在Max＋PlusⅡ开发环境中,用VHDL语言设计BPSK和DPSK调制,利用MUX模块完成了PSK调制系统,仿真和验证了其设计功能。     

真空键合技术制作三层结构的MEMS器件的研究

采用真空键合技术,成功地将表面具有深度不同的硅槽或框架结构的硅圆片与另外两个硅圆片贴合形成三层夹心结构,经高温退火处理,得到一种粘合牢固的硅“三明治“体.这种“三明治“体的上下两个硅片仍可进行IC加工,为MEMS传感部分和测试电路的三维一体化集成打下了坚实的基础.