内圆切片机张刀对切片质量的影响

对内圆切片机的切削原理和刀片的张紧与张紧装置和刀片在切削过程中的动态特性进行了研究。     

A novel slotted helix slow-wave structure for high power Ka-band traveling-wave tubes

A novel slotted helix slow-wave structure （SWS） is proposed to develop a high power, wide-bandwidth, and high reliability millimeter-wave traveling-wave tube （TWT）. This novel structure, which has higher heat capacity than a conven- tional helix SWS, evolves from conventional helix SWS with three parallel rows of rectangular slots made in the outside of the helix tape. In this paper, the electromagnetic characteristics and the beam-wave interaction of this novel structure operating in the Ka-band are investigated. From our calculations, when the designed beam voltage and beam current are set to be 18.45 kV and 0.2 A, respectively, this novel circuit can produce over 700-W average output power in a frequency range from 27.5 GHz to 32.5 GHz, and the corresponding conversion efficiency values vary from 19% to 21.3%, and the maximum output power is 787 W at 30 GHz.     

Study of Borromean halo nuclei by the neutron wall with simulation

The model of three-body Borromean halo nuclei breakup was described by using standard phase space distributions and the Monte Carlo simulation method was established to resolve the detection problem of two neutrons produced from breakup reaction on the neutron wall detector. For ⁶He case,overall resolution σE_k for the Gaussian part of the detector response and the detection efficiency including solid angle acceptance with regard to the excitation energy E_k are obtained by the simulation of two neutrons from ⁶He breakup into the neutron wall. The effects of the algorithm on the angular and energy correlations of the fragments are briefly discussed.     

Charge state distribution analysis of Al and Pb ions from thelaser ion source at IMP

A prototype laser ion source that could demonstrate the possibility of producing intense pulsed high charge state ion beams has been established with a commercial Nd:YAG laser (E_max=3 J,1064 nm,8-10 ns) to produce laser plasma for the research of Laser Ion Source (LIS). At the laser ion source test bench,high purity (99.998%) aluminum and lead targets have been tested for laser plasma experiment. An Electrostatic Ion Analyzer (EIA) and Electron Multiply Tube (EMT) detector were used to analyze the charge state and energy distribution of the ions produced by the laser ion source. The maximum charge states of Al¹²⁺ and Pb⁷⁺ were achieved. The results will be presented and discussed in this paper.     

Study of the data analysis process of the neutron wall with simulation

We study the response function of the neutron wall for 300 MeV neutrons with GEANT4 simulations. The methods to find the correct neutron incident position and time are discussed, and the neutron emission angle and energy are reconstructed and compared with the simulation.     

CMP承载器的初步研究

在CMP中,由于抛光垫在与其接触的晶圆边缘产生异常压力点,以及转台和承载器旋转的线速度之差在边缘处较其他点大得多,从而导致了晶圆边缘效应的产生。阐述了承载器在CMP中的作用,详细分析了边缘效应产生的原因和克服的方法。在承载器上采用与晶圆保持适当间隙的保持环结构,对保持环施加适当的压力,使保持环和晶圆位于同一抛光平面上;针对旋转式CMP设备固有的线速度之差导致片内非均匀性增大的问题,对200mm晶圆划分两区域进行微压力补偿,同时详细说明了压力补偿气路的设计和实现的功能,指出今后多区域微压力补偿将采用矩阵控制技术。     

铜布线化学机械抛光的失效研究

分析了铜电连接在今后晶片制造中的主导作用,阐述了铜布线的结构,即在由钽作为阻挡层及采用电镀铜形成的电连接的情况下,抛光规律符合经典普莱斯顿方程;在粗抛磨料采用氧化铝,精抛配比采用武亚红提出的方案情况下,采用旋转式低速较大下压力情况下抛光,整个晶片依然存在较大的不均匀性。分析100μm线宽的碟形缺陷会逐渐减小但最后会有少许增大。整个晶片的侵蚀会和其图案密度成正比,但在同种分布情况下,精抛时间越长,则侵蚀缺陷越大。最后指出了今后发展的高速底压力会显著解决当前不均匀性问题,但失效机制分析意义依然很重大。     

基于SVM的近红外黑木耳多糖含量分类

黑木耳作为一种胶质食用菌,富含多种营养物质,其中多糖是其中所占比重最大、含量最高的功能性成分之一。针对黑木耳多糖的分类,区别于传统的化学方法检测操作复杂、检测速度慢的问题,文中利用红外光谱技术,对东北黑木耳样本进行多糖成分进行无损检测,并利用支持向量机(SVM)的算法进行建模仿真。通过选定核函数的最优惩罚系数C=100、正则化系数V=10 ^-1,测得黑木耳多糖分类模型的识别结果的精确率为85.7%,召回率为87.3%,F1-score为0.864,达到了预期目标。试验证明,相比较于常规的黑木耳多糖检测方法来说,根据支持向量机算法建立的高精度黑木耳近红外光谱多糖分类模型是可行的。     

基于局域场加强的近场纳米加工技术

介绍了一种全新的基于飞秒激光局域场加强效应的纳米加工技术,通过使用了微焦级别脉宽为130 fs、波长800 nm的飞秒激光照射于原子力显微镜的探针针尖,利用其局域场加强效应在金薄膜表面加工出各种纳米图形。对加工参数对加工线宽的影响中,我们发现了随着加工能量的减小和加工速度的不断增大将导致加工线宽不断减小,最终达到了极限线宽(～10 nm)。这项技术可以广泛的应用与各种材料的加工中,尤其适合各种金属薄膜的加工,特别是结合了现有的自动化控制系统更是可以加工出任意复杂的二维纳米图形。     

L-Shell X-Ray Yields and Production Cross Sections of Zr and Mo Bombarded by Slow Highly Charged Ar16+ Ions

The L-shell x-ray yields of Zr and Mo bombarded by slow Ar16＋ ions are measured. The energy of the Ar^16＋ ions ranges from about 150 keV to 350 keV. The L-shell x-ray production cross sections of Zr and Mo are extracted from these yields data. The explanation of these experimental results is in the framework of the adiabatic direct- ionization and the binding energy modified BEA approximation. We consider, in the slow asymmetric collisions such as Ar and Mo/Zr, the transient united atoms （UA） are formed during the ion-surface interaction and the direct-ionization is the main mechanism for the inner-shell vacancy production. Generally, the theoretical results are in good agreement with the experimental data.