Single-shot grating-based x-ray differential phase contrast imaging with a modified analyzer grating

X-ray grating interferometer has attracted widely attention in the past years due to its capability in achieving x-ray phase contrast imaging with low brilliance source. However, the widely used phase stepping information extraction method reduces system stability and prolongs data acquisition time by several times compared with conventional x-ray absorptionbased imaging. The mechanical stepping can be avoided by using a staggered grating, but at the cost of low vertical spatial resolution. In this paper, employing a modified staggered grating and the angular signal radiography, we proposed a single-shot grating-based x-ray differential phase contrast imaging with decent vertical spatial resolution. The theoretical framework was deduced and proved by numerical experiments. Absorption, phase, and scattering computed tomography can be performed without phase stepping. Therefore, we believe this fast and highly stable imaging method with decent resolution would be widely applied in x-ray grating-based phase contrast imaging.     

A new method for information retrieval in two-dimensional grating-based X-ray phase contrast imaging

Grating-based X-ray phase contrast imaging has been demonstrated to be an extremely powerful phase-sensitive imaging technique.By using two-dimensional(2D) gratings,the observable contrast is extended to two refraction directions.Recently,we have developed a novel reverse-projection(RP) method,which is capable of retrieving the object information efficiently with one-dimensional(1D) grating-based phase contrast imaging.In this contribution,we present its extension to the 2D grating-based X-ray phase contrast imaging,named the two-dimensional reverseprojection(2D-RP) method,for information retrieval.The method takes into account the nonlinear contributions of two refraction directions and allows the retrieval of the absorption,the horizontal and the vertical refraction images.The obtained information can be used for the reconstruction of the three-dimensional phase gradient field,and for an improved phase map retrieval and reconstruction.Numerical experiments are carried out,and the results confirm the validity of the 2D-RP method.     

快速高能X射线光栅相衬成像

X射线光栅相衬成像对弱吸收物质成像能够获得较高的图像衬度,然而使用高分辨探测器,成像时间长。此外,受光栅工艺限制,成像能量通常在30 keV左右。文中基于投影成像原理,大大放宽了对光栅工艺的要求,提高了成像能量。同时,利用医用CT球管以及医用探测器,基于周步进扫描模式,实现了快速相衬CT成像。在国家同步辐射实验室搭建的成像系统上,完成了80 kV管电压（等效能量约48 keV）180 mA管电流,物体80 s曝光的二维和三维成像实验。针对实验结果,进一步探讨了提高密度分辨率的方法和途径。     

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介绍了离子束刻蚀的二次效应对图形轮廓以及离子束刻蚀入射角对图形侧壁陡度的影响。利用能量为450eV,束流密度为80mA/cm2的离子束分别以0°、15°、30°、45°和60°的刻蚀入射角对石英基片进行了刻蚀,得到了不同离子束入射角度下的图形侧壁的陡直情况。从电镜照片中可以看出,以30°入射角刻蚀出的图形质量最佳。结果表明,在离子束刻蚀中,选择适当的离子束入射角可以提高图形侧壁陡度,改善图形质量。因此对于离子束刻蚀来说,为控制二次效应,保证图形质量,必须重视离子束入射角的选择。     

Ar/CHF_3反应离子束刻蚀SiO_2的研究

介绍了Ar/CHF3反应离子束刻蚀和离子束入射角对图形侧壁陡直度及刻蚀选择比的影响。使用紫外曝光技术在SiO2基片上获得光刻胶掩模图形,采用Ar CHF3来刻蚀石英基片,调节二者的流量配比,混合后通入离子源。在Ar和CHF3的流量比为1∶2,总压强为2×10-2Pa,离子束流能量为450 eV,束流为80 mA,加速电压220 V~240 V,离子束入射角15°并旋转样品台的情况下,刻蚀20 min后,得到光栅剖面倾角陡直度为80°~90°。同时发现,添加CHF3后,提高了SiO2的刻蚀速率和刻蚀SiO2与光刻胶的选择比,最高可达7∶1。     

一种PMMA表面改性的热压键合方法研究

介绍了一种基于表面改性技术的PMMA热压键合新方法。PMMA表面首先用其单体MMA进行改性，然后在真空热压设备中热压键合。主要的键合参数如下：键合压力0．5MPa～2．5MPa，温度88℃～100℃，时间180s。通过拉力法测量了键合强度，其最大值可达到0．15MPa。实验结果表明，与常规的热压键合方法相比，该方法可有效地降低键合温度，减少键合时间，提高键合强度，从而可减少对PMMA基片上微细图形结构的破坏。使用聚合物的单体（MMA）对PMMA进行改性，可避免对微管道产生化学污染，有利于集成毛细管电泳的生化分析。利用品红和氢氧化钠混合溶液对键合后的微流体芯片进行密封性测试，结果表明，封装后的微流体芯片没有出现泄漏的情况。     

同步辐射讲座第五讲微电子机械系统加工新方法--LIGA技术

简述了微电子机械系统的起源和特点，介绍了LIGA技术的基本原理以及一些相关技术，对同步辐射深度光刻的技术要求进行了详细地说明，并介绍了国内外利用LIGA技术进行微电子机械系统研发的现状。     

接近式光刻的计算机模拟研究

分析了菲涅耳近似模型在接近式光刻模拟中的应用和误差起源,并根据光的标量衍射理论,对菲涅耳近似模型进行了修正,得到了更加准确的类菲涅耳近似模型;并对这两种模型的模拟结果进行了比较。     

The photoresponse and photoconductivity of micron-sized C60 whiskers and sub-millimeter-sized C60 clusters

The photoresponse and photoconductivity properties of micron-sized C60whiskers and sub-millimeter-sized C60clusters are successfully studied by the microfabrication technologies.According to the ultraviolet-visible-near infrared（UVVis-NIR）absorption spectroscopic study,a highly intense absorption is observed in the UV and visible light regions,which indicates probable applications in photoelectric devices.Furthermore,a large photocurrent is measured under the illumination of white light in nitrogen（N2）atmosphere.The micron-sized C60whiskers and the sub-millimeter-sized C60clusters have different photoresponse curves under the same condition of measurement.A quick transformation of photoelectric response is detected in parallel multi-arranged micron-sized C60whiskers,but the recovery of the photocurrent of self-assembly sub-millimeter-sized C60clusters is much slower.     

Fabrication of high aspect ratio gratings for X-ray imaging

Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies with exposure dose, the relationship between linewidth broadening and exposure dose is studied experimentally. A series of gratings with different periods and different duty cycles are designed by optimizing the linewidth and exposure dose. Finally, the gratings are successfully fabricated by combining UV lithography and electroplating.