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感应耦合等离子休技术用于熔融石英表面凹凸光栅的刻蚀 总被引:2,自引:0,他引:2
感应耦合等离子体(ICP)刻蚀技术是一种新的干法刻蚀技术,具有刻蚀速率高和各向异性刻蚀等优点,并且能够独立控制等离子体密度和自偏置电压。然而,在利用这种技术进行刻蚀的过程中,经常会发生聚合物的沉积,从而阻碍了刻蚀过程的继续。我们报道了在熔融石英表面刻蚀光栅时不产生聚合物沉积的技术,给出了优化参数。所制作的熔融石英普通光栅和600线/mm的高密度光栅的表面很干净,没有聚合物沉积。光栅衍射效率的实际测量值和预期的理论值吻合得很好。最后还研究了ICP技术的刻蚀速度.刻蚀均匀性和过程可重复性等参数。 相似文献
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自从德国科学家罗曼于60年代提出计算机全息图以来,计算全息图已成为信息光学最重要的一个学科分支,得到了广泛的应用,极大地促进了信息光学技术的发展。与此相关.最早提山全息概念的盖伯获得了1971年的诺贝尔奖。 相似文献
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把粗糙物体表面受到相干光照明时产生的散斑场看作是一个稳态随机信号,在此基础上,本文提出了一种能做到大量程,高精度位移测量的新方法——电子散斑归一化互相关法测位移或称电子散斑照相法测位移.该法实质上是借助数字图像处理技术,通过物体位移前后二个散斑场之间的相关性来进行位移测量方法的发展.文中给出了理论分析和实验系统.实验结果表明,该法有诸如准实时,大量程(毫米级),高精度和线性可靠等优点. 相似文献
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受益于光子独特的优势,光计算技术在构建高速、高算力和高能效比的专用计算加速器方面被寄予厚望,目前已经涌现出了许多极具吸引力的方案。特别是对于涉及运算量巨大的二维矩阵-矩阵乘加操作的专用场景,光计算有望在算力和能效比等方面实现超越当前最先进电子计算机几个数量级的性能提升。不同于电子计算通过构建逻辑门实现通用数字计算,主要受深度学习驱动而复兴的光计算更倾向于模拟计算。本文从模拟和数字光计算的角度出发对主流的光计算架构进行分析和讨论,指出了目前光计算技术发展面临的瓶颈,并对光计算未来的发展趋势进行了展望。 相似文献
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We report a laser writing system for fabrication of diffractive optical elements with He-Cd laser. The wavelength of the light source is 441.6 nm. The output beam is collimated into parallel light with uniform intensity distribution after passing through the spatial filter with a pinhole of 25μm and the collimating device. A microscopy objective lens with numerical aperture (NA) of 0.65 is used to focus the beam into a small diffraction spot. Any pattern can be written with this system. Experimental results are presented.The written gratings and the phase patterns were verified with a conventional optical microscopy and the Taylor Hobson equipment. 相似文献
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We proposed a novel wavelength-spread compression technique for spectral beam combining of a diode laser array. A reflector, which is parallel to the grating, is introduced to achieve a double pass with a single grating.This facilitated the reduction of the wavelength spread by half and doubled the number of combined elements in the gain range of the diode laser. We achieved a power of 26.1 W under continuous wave operation using a19 element single bar with a wavelength spread of 6.3 nm, which is nearly half of the original wavelength spread of 14.2 nm, demonstrating the double-compressed spectrum capability of this structure. The spectral beam combining efficiency was 63.7%. The grating efficiency and reflector reflectance were both over 95%; hence, the efficiency loss of the double-pass grating with a reflector is acceptable. In contrast to double-grating methods,the proposed method introduces a reflector that efficiently uses the single grating and shows significant potential for a more efficient spectral beam combining of diode laser arrays. 相似文献
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An optically fixed photorefractive correlator is presented,where two-centre non-volatile holographic recording is employed to write and fix the matched filter in doubly doped LiNbO3 crystals.This correlator shows good correlation characteristics and insensitivity to the writing beam during readout.It can be used in cased requiring stability and not requiring modification for a long period,and it is refreshed optically when new information needs to be registered. 相似文献
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