用于共振腔光电探测器的Si基Bragg反射器

Si基共振腔型光电探测器的关键工艺是隐埋Bragg反射器镜面的制备.用PECVD方法在Si衬底上制备了SiOxNy/SiBragg反射器,研究了Bragg反射器的反射谱和退火行为.     

Photocurrent Measurement of Si1-xGex/SiMultiple Quantum Wells With Ion Implantation and Thermal Annealing

Ｐｈｏｔｏｃｕｒｒｅｎｔｓｐｅｃｔｒｏｓｃｏｐｙｉｓａｗｅｌｌ－ｋｎｏｗｎｍｅｔｈｏｄｆｏｒｔｈｅｉｎｖｅｓｔｉｇａｔｉｏｎｏｆｔｈｅｂａｎｄｇａｐｅｎｅｒｇｙｏｆＳｉＧｅａｌｌｏｙ［１～３］．Ｔｈｅｍｅａｓｕｒｅｍｅｎｔ...     

用于共振腔光电探测器的Si基Bragg反射器

Si基共振腔型光电探测器的关键工艺是隐埋Bragg反射器镜面的制备.用PECVD方法在Si衬底上制备了SiOxNy/Si Bragg反射器,研究了Bragg反射器的反射谱和退火行为.     

应用电镜技术对病毒混合感染的研究

有证据表明 ,一些严重影响畜牧业发展威胁畜禽健康的主要疾病在临床症状 ,病理变化和致病性等方面都发生了一些不同于经典型病例的改变 ,例如潜伏期缩短 ,康复期推迟 ,死亡率增加 ,病理变化严重等等。这些后果的产生除了病原本身可能会发生的变异或是出现新的病毒株之外 ,另一个重要的原因就是混合感染。混合感染无疑会对疾病的诊断和治疗产生十分不利的影响。到目前为止 ,在临床上广泛应用的各种血清学方法都是针对一种病原的 ,要对多种病原的混合感染做出准确的诊断是一件很麻烦的事。应用电子显微镜技术对病毒混合感染进行检测具有其它方…     

Phosphorus diffusion and activation in fluorine co-implanted germanium after excimer laser annealing

The diffusion and the activation of phosphorus in phosphorus and fluorine co-implanted Ge after being annealed by excimer laser are investigated. The results prove that the fluorine element plays an important role in suppressing phosphorus diffusion and enhancing phosphorus activation. Moreover, the rapid thermal annealing process is utilized to evaluate and verify the role of fluorine element. During the initial annealing of co-implanted Ge, it is easier to form high bonding energy F_nV_m clusters which can stabilize the excess vacancies, resulting in the reduced vacancy-assisted diffusion of phosphorus. The maximum activation concentration of about 4.4×10²⁰ cm^-3 with a reduced diffusion length and dopant loss is achieved in co-implanted Ge that is annealed at a tailored laser fluence of 175 mJ/cm². The combination of excimer laser annealing and co-implantation technique provides a reference and guideline for high level n-type doping in Ge and is beneficial to its applications in the scaled Ge MOSFET technology and other devices.     

Energy band design for p-type tensile strained Si/SiGe multi-quantum well infrared photodetector

The band structure of the confined states is calculated for Si/SiGe multi-quantum well infrared photodetector(M-QWIP).The influence of the Ge component in pseudosubstrate on the energy band structure of Si/Si0.54Ge0.46 multi-quantum wells(MQWs) is investigated.It is found that the high energy levels in the MQWs move up while the low energy levels move down as the Ge component in pseudosubstrate increases.The influence of the barrier width on the energy band structure of MQWs is also studied based on the 6 ×...     

中红外半导体光源和探测器件及其应用

中红外波段(2～25 μm)的光电子器件在气体检测、红外遥感和红外对抗等领域都有重要应用.介绍了笔者近年来在中红外波段的半导体光源和光电探测器方面的工作进展,包括InP基量子级联激光器、2μm波段锑化物量子阱激光器和波长扩展InGaAs光伏型探测器的研制以及器件应用方面的工作.这些光电子器件所用高性能材料都是笔者采用分...     

大口径光学系统测试用双回转子孔径扫描装置设计与误差分析

设计了一种新颖的双回转子孔径扫描装置,得到了可以覆盖大口径光学系统全口径的子孔径扫描光斑,从而满足了大口径光学系统光谱透射特性的测试需求.结合双回转扫描装置的结构参数误差,基于齐次坐标变换矩阵原理,建立了双回转扫描装置的数学模型,提出了一套分析子孔径扫描精度的方法,并且在设计双回转子孔径扫描装置中实现了应用.分析结果表...     

Cr，Tm∶YAG晶体中的能量转移

通过对Ｃｒ∶ＹＡＧ、Ｔｍ∶ＹＡＧ和Ｃｒ，Ｔｍ∶ＹＡＧ晶体吸收光谱和发射光谱的比较，研究了Ｃｒ，Ｔｍ∶ＹＡＧ晶体中的能量转移过程．指出Ｃｒ３＋→Ｔｍ３＋能量转移过程中，无辐射能量转移占绝对优势．