预注入对Si1-xCx合金形成的影响

室温下在单晶Si中注入(0.6—1.5)at%的C原子,部分样品在C离子注入之前在其中注入²⁹Si⁺离子产生损伤,然后在相同条件下利用高温退火固相外延了Si_1-xC_x合金,研究了预注入对Si_1-xC_x合金形成的影响.如果注入C离子的剂量小于引起Si非晶化的剂量,在950℃退火过程中注入产生的损伤缺陷容易与C原子结合形成缺陷团簇,难于形成Si_1-xC关键词： 离子注入 固相外延 1-xC_x合金')" href="#">Si_1-xC_x合金     

高质量氮化镓材料的光致发光研究

利用氨气源分子束外延（GSMBE）技术,在改型Ⅳ型分子束外延设备上生长高质量GaN单晶外延材料,并对样品进行了光致发光测量。分析室温和低温光致发光谱,系统地研究GaN的发光峰及其起源,并对常见的黄色发光带现象及其微结构起因进行探讨。     

INCREASING THE PHOTOLUMINESCENCE INTENSITY OF Ge ISLANDS BY CHEMICAL ETCHING

Self-assembled Ge islands were grown on Si(100) substrate by Si₂H₆-Ge molecular beam epitaxy. After being subjected to chemical etching, it is found that the photoluminescence from the etched Ge islands became more intense and shifted to the higher-energy side compared to that of the as-deposited Ge islands. This behaviour was explained by the effect of chemical etching on the morphology of the Ge islands. Our results demonstrate that chemical etching can be a way to change the luminescence property of the as-deposited islands.     

用气态源分子束外延生长法制备Si/SiGe/Sinpn异质结双极晶体管

用气态源分子束外延法制备了Ｓｉ／ＳｉＧｅ／Ｓｉｎｐｎ异质结双极晶体管．晶体管基区Ｇｅ组分为０．１２,Ｂ掺杂浓度为１．５e１９ｃｍ－３,ＳｉＧｅ合金厚度约４５ｎｍ．直流特性测试表明,共发射极直流放大倍数约５０,击穿电压ＶＣＥ约９Ｖ;射频特性测试结果表明,晶体管的截止频率为７ＧＨｚ,最高振荡频率为２．５ＧＨｚ．     

赝形δ掺杂AlGaAs/InGaAs/GaAs量子阱的光致发光性质研究

测量了一系列不同隔离层(spacer)厚度、阱宽和硅δ掺杂浓度的单边掺杂的赝形高电子迁移率晶体管(p-HEMTs)量子阱的变温和变激发功率光致发光谱,详细研究了(el-hh1)和(e2-hh1)两个发光峰之间的动态竞争发光机制,并运用有限差分法自洽求解薛定谔方程和泊松方程以得出电子限制势、子带能级以及相应的电子包络波函数、子带占据几率和δ掺杂电子转移效率,研究了两个峰的相对积分发光强度随隔离层厚度、阱宽和δ掺杂浓度的变化.     

Effect of Stress in GaN/AIInGaN Grown on GaN Templates with Different Stress States

We clarify the effect of the stress in GaN templates on the subsequent AIlnGaN deposition by simply growing 150nm AIInGaN on a 30μm GaN template （sample 1） prepared by hydride vapor phase epitaxy and a 2.3μm thin control GaN template （sample 2） prepared by metalorganic chemical vapor deposition. X-ray diffraction and secondary iron mass spectroscopy measurements reveal the stress states （tensile stress and full relaxed for samples 1 and 2, respectively） and compositions （Al0.169In0.01 Ga0.821N, Al0.171In0.006 Ga0.823N for samples 1 and 2, respectively） of AlInGaN. By carefully eliminating other possible factor, as template surface roughness, it is concluded that different stress states of AlInGaN should stem from different stress states of GaN templates.     

High quality GaN-based LED epitaxial layers grown in a homemade MOCVD system

A homemade 7×2 inch MOCVD system is presented.With this system,high quality GaN epitaxial layers,InGaN/GaN multi-quantum wells and blue LED structural epitaxial layers have been successfully grown. The non-uniformity of undoped GaN epitaxial layers is as low as 2.86%.Using the LED structural epitaxial layers, blue LED chips with area of 350×350μm~2 were fabricated.Under 20 mA injection current,the optical output power of the blue LED is 8.62 mW.     

百瓦皮秒光纤放大器

<正>以低功率固体被动锁模激光器作为种子源,经过主振荡功率放大的皮秒高功率光纤放大器,具备峰值功率高、散热性好、光光转换效率高、光束质量好、体积小、易于集成等优点。因此在激光精细加工、超快光学、非线性光频率转换、军事和国防安全等领域都有广泛的应用。然而在高功率脉冲激光输出时,光纤放大器受限于光纤纤芯内部的非线性效     

n型和p型4H-SiC的二级喇曼谱

给出了n型和p型4H-SiC的二级喇曼谱的实验结果.指认了所观察到的一些光谱结构对应的特定声子支及其在布里渊区中相应的对称点.发现在4H-SiC的二级喇曼谱中存在能量差约为10cm-1的双谱线结构,这一结构与六方相GaN,ZnO和AlN的双谱线结构具有相同的能量差.二级喇曼谱的截止频率对于不同掺杂情况的4H-SiC具有相同的值.它并不等于n型掺杂4H-SiC的A1(LO)声子的倍频,而是等于未掺杂样品的A1(LO)声子的倍频.掺杂类型和杂质浓度对4H-SiC的二级喇曼谱几乎没有影响.     

高质量GaN材料的GSMBE生长

在国内首次用NH3作氮源的GSMBE方法在α－Al2O3衬底上成功地生长出了高质量的GaN单晶外延膜．GaN外延膜的（0002）X射线双晶衍射峰回摆曲线的半高宽最窄为8’；背景电子浓度最低为2．7×1018cm－3，霍尔迁移率最好为91cm2／（V·s）；室温光致发光谱上只观察到一个强而锐的带边发光峰，谱峰位于363nm处，室温谱峰半高宽最窄为8nm（75meV）．