基于超精密激光直写系统制作二维光栅

二维光栅是光刻机光栅尺系统的核心元件。搭建了超精密激光直写系统,基于二维超精密工件台,通过旋转基片90°进行两次曝光,制作出栅线密度为1200 line/mm的二维光栅掩模。原子力显微镜和扫描电镜结果表明,所制作的掩模轮廓清晰,空间分布均匀。实验结果证明了超精密激光直写系统能够制作出二维光栅掩模,在制作大尺寸、高精度二维计量光栅方面有着广阔的应用前景。     

Narrow-wavelength-spread spectral combining laser with a reflector for a double pass with a single grating

We proposed a novel wavelength-spread compression technique for spectral beam combining of a diode laser array. A reflector, which is parallel to the grating, is introduced to achieve a double pass with a single grating.This facilitated the reduction of the wavelength spread by half and doubled the number of combined elements in the gain range of the diode laser. We achieved a power of 26.1 W under continuous wave operation using a19 element single bar with a wavelength spread of 6.3 nm, which is nearly half of the original wavelength spread of 14.2 nm, demonstrating the double-compressed spectrum capability of this structure. The spectral beam combining efficiency was 63.7%. The grating efficiency and reflector reflectance were both over 95%; hence, the efficiency loss of the double-pass grating with a reflector is acceptable. In contrast to double-grating methods,the proposed method introduces a reflector that efficiently uses the single grating and shows significant potential for a more efficient spectral beam combining of diode laser arrays.     

高精度微结构聚合物光栅的复制技术

光栅复制是降低光栅制造成本,提高产量的一条有效途径。研究了利用紫外压印技术复制微结构光栅的方法。使用玻璃基底矩形浮雕结构的微结构光栅作为母光栅,给出了利用聚二甲基硅氧烷(PDMS)制作光栅模具和在光敏聚合物材料上复制微结构光栅的详细过程。经过优化工艺条件,成功地复制了一系列不同周期和开口比的微结构光栅,测试了复制光栅和母光栅的衍射图像和0级与±1级的衍射强度,结果表明,复制光栅和母光栅的衍射图像与光强分布基本一致。     

基于反射式达曼光栅的频率分辨光学开关装置

采用反射式达曼光栅对飞秒激光进行分束,可以避免材料色散的影响.搭建了利用反射式1×2达曼光栅为基础的频率分辨光学开关(FROG)装置,并把测量结果与传统多发频率分辨光学开关装置的测量结果进行了对比.理论和实验结果表明,当输入脉冲宽度大于50 fs时,用达曼光栅作为分光器和使用分光镜分光的效果是一样的;当输入脉冲的宽度小于50 fs时,用达曼光栅作为分光器引入的展宽量明显小于分光镜引入的展宽量,尤其是当输入脉冲的宽度小于20 fs时用达曼光栅作为分光器的效果更为突出.     

基于达曼光栅的动态光耦合器

提出了一种基于达曼光栅的动态光耦合器,通过控制装置中达曼光栅位移参量,可实现入射光束的分束或合束以及两者之间的动态转换。适当选择达曼光栅类型可实现任意N×M的动态光耦合。实验中以1550 nm光波长为例,对1×8达曼动态光耦合器进行测量,测得其实现光开关功能时插入损耗为0.43 dB,实现光分束功能时均匀性达到0.03,单路插入损耗均值为10.5 dB。该实验装置易于调节、体积小、能耗低,且关键元件达曼光栅制作工艺成熟,易于批量化生产。特别是在实现中大规模光交换阵列时,该方案就具有更明显的优越性,有实用意义。     

Femtosecond laser induced microripple on PDMS surface

We find the femtosecond laser induced microripple beside the focused femtosecond laser spot and along the movement direction of the laser spot on polydimethylsiloxane （PDMS） surface. The microripple may be due to the melting of PDMS induced by femtosecond laser pulses and the subsequent cool-down solidification of the melting PDMS along with the movement of the femtosecond laser spot. This result will be helpful to understand the interaction between the femtosecond laser and the polymer.     

Wide band polarizer with suspended germanium resonant grating

An ultra broad band polarizer that operates in the telecommunication wavelength band is proposed.This device,which consists of a single suspended germanium resonant grating layer,is designed using the inverse mathematical method and the rigorous vector diffraction theory.Calculated results indicate that the ultra broad band polarizer exhibits extremely high reflection(R > 99%) for TE polarization light and high transmission(T > 99%) for TM polarization at the wavelength range greater than 300 nm,and it has an extinction ratio of approximately 1 000 at the 1 550-nm central wavelength.The results of the rigorous coupled wave analysis indicate that the extremely wide band property of the TE polarization is caused by the excitation of strong modulation guided modes in the design wavelength range.     

一种新型聚合物微透镜阵列的制造技术

提出了一种利用软模压印制备微透镜阵列的技术.采用传统的光刻胶热熔方法制备微透镜阵列母板,利用复制模具的方法在聚二甲基硅氧烷(PDMS)上得到一个和母板表面图形相反的模具,最后通过压印的方法把PDMS模具上的图形转移到涂有紫外固化胶的玻璃基片上,待紫外胶完全固化后可得到和母板一致的微透镜阵列.经过测试微透镜阵列的焦点图像和表面形貌可发现最后制备的微透镜阵列表面形貌均匀、聚焦性能良好、光忖强均匀.     

Modal analysis of the 0th order nulled phase masks

A simple modal analysis (MA) method to explain the diffraction process of 0th order nulled phase mask is presented. In MA, multiple reflections of the grating modes at grating interfaces are considered by introducing equivalent Fresnel coefficients. Analytical expressions of the diffraction efficiencies and modal guidelines for the 0th order nulled phase grating design are also presented. The phase mask structure, which comprises a high-index contrast HfO 2 grating and a fused-silica substrate, is optimized using rigorous coupled-wave analysis around the 800-nm wavelength, after which the modal guideline for cancellation of the 0th order in a phase mask is verified. The proposed MA method illustrates the inherent physical mechanism of multiple reflections of the grating modes in the diffraction process, which can help to analyze and design both low-contrast and high-contrast gratings.     

Simplified mode analysis of guided mode resonance gratings with asymmetric coatings

A simplified modal method to explain the resonance phenomenon in guided mode resonance(GMR) gratings with asymmetric coatings is presented.The resonance observed is due to the interaction of two propagation modes inside the grating.The reflectivity spectra and electric field distributions calculated from the simplified modal method are compared using rigorous coupled-wave analysis(RCWA).The influences of high-order evanescent modes on the resonance peak are analyzed.A matrix Fabry-Perot(FP) resonance condition is developed to evaluate the resonance wavelength.An explanation for the resonance phenomenon observed based on the FP resonance phase condition is also proposed and demonstrated.The simplified method provides clear physical insights into GMR gratings that are useful for the analysis of a variety of other resonance gratings.