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121.
In reactive plasma processing, species produced in the plasma reach the surface of a substrate and cause etching, deposition and surface modification through surface reactions. These reactions are characterized by the densities and energies of species incident on the surfaces. In order to realize nano-scale plasma processing, important species for plasma processing have been identified and characterized, and their behavior, not only in the gas phase, but also on the surface, have been clarified and controlled. One of the most critical parameters for insights into surface reaction kinetics of radicals is sticking and surface loss probability. On the basis of radical densities measured by various methods, the sticking and surface reaction loss probabilities have been compiled, and they enable the quantitative understanding of the kinetics of radicals on the surface in the plasma. In this article, the sticking and surface reaction loss probabilities measured thus far are reviewed focusing on fluorocarbon gas, silane gas and methane gas based plasma processes. The establishment of a smart plasma process and the development of an autonomous production device with control of radicals on the basis of insights into the surface reactions for nano-scale plasma processing are presented. 相似文献
122.
Oscar Lopez-Pamies Martín I. Idiart Toshio Nakamura 《Journal of the mechanics and physics of solids》2011,59(8):1464-1487
It is by now well established that loading conditions with sufficiently large triaxialities can induce the sudden appearance of internal cavities within elastomeric (and other soft) solids. The occurrence of such instabilities, commonly referred to as cavitation, can be attributed to the growth of pre-existing defects into finite sizes. This paper introduces a new theory to study the phenomenon of cavitation in soft solids that: (i) allows to consider general 3D loading conditions with arbitrary triaxiality, (ii) applies to large (including compressible and anisotropic) classes of nonlinear elastic solids, and (iii) incorporates direct information on the initial shape, spatial distribution, and mechanical properties of the underlying defects at which cavitation can initiate. The basic idea is to first cast cavitation in elastomeric solids as a homogenization problem of nonlinear elastic materials containing random distributions of zero-volume cavities, or defects. This problem is then addressed by means of a novel iterated homogenization procedure, which allows to construct solutions for a specific, yet fairly general, class of defects. These include solutions for the change in size of the defects as a function of the applied loading conditions, from which the onset of cavitation — corresponding to the event when the initially infinitesimal defects suddenly grown into finite sizes — can be readily determined. In spite of the generality of the proposed approach, the relevant calculations amount to solving tractable Hamilton-Jacobi equations, in which the initial size of the defects plays the role of “time” and the applied load plays the role of “space”. When specialized to the case of hydrostatic loading conditions, isotropic solids, and defects that are vacuous and isotropically distributed, the proposed theory recovers the classical result of Ball (1982) for radially symmetric cavitation. The nature and implications of this remarkable connection are discussed in detail. 相似文献
123.
Effect of refraction index and thickness of the light guide in the position-sensitive gamma-ray detector using compact PS-PMTs 总被引:1,自引:0,他引:1
Koji Inoue Haruo Saito Yasuyuki Nagashima Toshio Hyodo Yasuyoshi Nagai Shinichi Muramatsu Shota Nagai 《Radiation Physics and Chemistry》2000,58(5-6):763-766
We constructed a position-sensitive gamma-ray detector consisting of an array of BGO scintillators, a light guide and compact PS-PMTs. The effects of refractive index and thickness of the light guide of a glass plate on the detector performance were investigated. A light guide with higher refractive index and smaller thickness is found better for a good spatial resolution. 相似文献
124.
125.
126.
Total synthesis of fumitremorgin B 总被引:2,自引:0,他引:2
Total synthesis of fumitremorgin B, one of the potent tremorgic mycotoxins, was achieved in 7 steps. 相似文献
127.
Yusaku Iwasawa Tetsuroh Shirasawa Takehiro Nojima Toshio Takahashi Masuaki Matsumoto Koichi Akimoto Hiroshi Sugiyama 《Applied Surface Science》2008,254(23):7803-7806
The structure of buried Si(1 1 1)-5 × 2-Au capped with amorphous Si was investigated using surface X-ray diffraction. It was found that the 5 × 2 structural periodicity is kept under the amorphous Si from the in-plane measurement. Furthermore, the intensity variation along the fractional-order rod indicates that Au atoms are located almost on the same plane. 相似文献
128.
Shinobu Onoda Toshio Hirao Takeshi Ohshima Hisayoshi Itoh 《Radiation Physics and Chemistry》2009,78(12):1116-1119
The effect of radial ion-track distribution on the transient current in semiconductors caused by a high-energy heavy ion strike was studied. Reasonable agreement was observed in experimental and calculated transient currents for ion energies ranging from several to several hundred MeV when the radius of the ion track used in the numerical simulations was shorter or equivalent to that of the penumbra radius. 相似文献
129.
Fareha Zafar Khan Masashi Shiotsuki Fumio Sanda Yoshiyuki Nishio Toshio Masuda 《Journal of polymer science. Part A, Polymer chemistry》2008,46(7):2326-2334
The amino acid esters of hydroxypropyl cellulose (HPC) [R′ = H ( 2a ), CH3 ( 2b ), CH2CH(CH3)2 ( 2c ), CH2CONH2 ( 2d ), CH2CH2CONH2 ( 2e ), CH2CH2CH2CH2 NHOCOC(CH3)3 ( 2f )] were synthesized in good yield by the reaction of t‐butoxycarbonyl (t‐Boc)‐protected amino acids with hydroxy groups of HPC ( 1 ; molar substitution (MS), 4.61). The amino acid functionalities displaying varied chemical nature, shape, and bulk were utilized and the bulk of the substituent on the α‐carbon of amino acids was elucidated to be of vital significance for the observed degree of incorporation (DSEst). The 1H NMR spectra and elemental analysis were employed to determine the degree of incorporation of amino acid moiety (DSEst) and almost complete substitution of the hydroxy protons was revealed for 2a , 2b , and 2f . The presence of the peaks characteristic of the carbonyl group in the FTIR spectra furnished further evidence for the successful esterification of HPC. The starting as well as the resulting polymers ( 1 and 2a – f ) were soluble in polar organic solvents; however, the esterification of 1 with bulky organic moieties resulted in an increased hydrophobicity as all of the amino acid‐functionalized polymers ( 2a – f ) were insoluble in water. The onset temperatures of weight loss of 2a – f were 175–230 °C, indicating fair thermal stability. The amino acid functionalization led to the enhanced polymer chain stiffness, and the glass transition temperatures of the derivatized polymers were 30–40 °C higher than that of 1 (Tg 3.9 °C; cf. Tg of 2a – f , 35.1–43.3 °C). © 2008 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 46: 2326–2334, 2008 相似文献
130.
Ruiyuan Liu Fumio Sanda Toshio Masuda 《Journal of polymer science. Part A, Polymer chemistry》2008,46(12):4175-4182
Copolymerization of ornithine‐ and lysine‐derived N‐propargylamides, N‐α‐tert‐butoxycarbonyl‐N‐δ‐fluorenylmethoxycarbonyl‐L ‐ornithine N′‐propargylamide ( 1 ), N‐α‐tert‐butoxycarbonyl‐N‐ε‐fluorenylmethoxycarbonyl‐L ‐lysine N′‐propargylamide ( 2 ), N‐α‐fluorenylmethoxycarbonyl‐N‐δ‐tert‐butoxycarbonyl‐L ‐ornithine N′‐propargylamide ( 3 ), and N‐α‐fluorenylmethoxycarbonyl‐N‐ε‐tert‐butoxycarbonyl‐L ‐lysine N′‐propargylamide (4) with dipropargyl adipate was carried out using (nbd)Rh+[η6‐C6H5B?(C6H5)3] as a catalyst in THF to obtain polymer gels in 80–93% yields. The gels adsorbed N‐benzyloxycarbonyl L ‐alanine, N‐benzyloxycarbonyl L ‐alanine methyl ester, and (S)‐(+)‐1‐phenyl‐1,2‐ethanediol preferably than the corresponding optical isomers. The order of chiral discrimination was poly( 1 ) > poly( 4 ) > poly( 2 ), poly( 3 ) gels. The fluorenylmethoxycarbonyl groups of the gels could be partly removed by piperidine treatment, leading to increase of adsorptivity but decrease of chiral recognition ability. © 2008 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 46: 4175–4182, 2008 相似文献