Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process

Si wafers are widely used as a substrate material for fabricating ICs. The quality of ICs depends on the quality of Si wafers. The chemo-mechanical grinding (CMG) with soft abrasive grinding wheels (SAGW) has been recently found to be a great potential process for machining Si wafers to generate superior surface quality at low cost. However, there have been very few studies on observing variation of topography of scratch/texture and understanding basic eliminating process of scratch/texture on the ground Si wafer. Furthermore, few reports on the variation of surface roughness and material removal rate (MRR) during CMG process and relationship between MRR and surface roughness during CMG process are presented. In this paper, a series of CMG experiments have been conducted to study the elimination process of artificial scratches created on etched Si surfaces and residual textures induced by SD1500 diamond wheel in CMG process, and to understand the topography variations of Si surfaces and some basic grinding characteristics during CMG process.     

Evolution of long-period stacking order (LPSO) in Mg97Zn1Gd2 cast alloys viewed by HAADF-STEM multi-scale electron tomography

We have studied three-dimensional (3D) structures and growth processes of 14H-type long-period stacking order (LPSO) formed in Mg₉₇Zn₁Gd₂ cast alloys by single tilt-axis electron tomography (ET) using high-angle annular dark-field scanning transmission electron microscopy. Evolution of the solute-enriched stacking faults (SFs) and the 14H LPSO by ageing were visualised in 3D with a high spatial resolution in multi-scale fields of views from a few nanometres to ~10 μm. Lateral growth of the solute-enriched SFs and the LPSO in the (0?0?0?1)_Mg plane is notable compared to the out-of-plane growth in the [0?0?0?1]_Mg direction. The 14H LPSO grows at the cost of decomposition of the (Mg, Zn)₃Gd-type precipitates, and accompany a change of in-plane edge angles from 30 to 60°. We have updated the Time–Temperature–Transformation diagram for precipitation in Mg₉₇Zn₁Gd₂ alloys: starting temperatures of both solute-enriched SFs and LPSO formation shifted to a shorter time side than those in the previous diagram.     

Spectroscopic and crystallographic studies on the stability of self-assembled coordination nanotubes

On complexation with (en)Pd(NO3)2, tetrakis(3,5-pyridine) ligand gives two isomeric coordination nanotubes, which are in slow equilibrium despite the presence of sixteen Pd-N bonds in the tube framework.     

Difference-frequency terahertz-wave generation from 4-dimethylamino-N-methyl-4-stilbazolium-tosylate by use of an electronically tuned Ti:sapphire laser

Among nonlinear materials, the organic ionic salt crystal 4-dimethylamino- N -methyl-4-stilbazolium-tosylate (DAST) is known for its large nonlinearity. We generated a coherent terahertz (THz) wave, using DAST, from the difference frequency between two oscillating wavelengths of an electronically tuned Ti:sapphire laser. In LiNbO(3), LiTaO(3), KTiOPO(4), and GaP crystals, THz-wave generation was not observed under the same experimental conditions. This result proves the high efficiency of DAST crystals for generation of difference-frequency THz waves.     

Hyperon structure and projectile fragmentation

We investigate the hadron productions in hyperon proton collisions in terms of the quark-diquark cascade model with diffractive component. We compare our predicted spectra Ξ^?→Ξ^? X and Ξ^?→Ω^? X with the experimental data. The distribution functions of constituents in incident hadrons and the momentum sharing functions of cascade processes are characterized by the intercepts of Regge trajectories, revealing the difference betweens quark and non-strange quark.     

Raman probe using a single hollow waveguide

A simple Raman probe was realized using a single flexible hollow waveguide (HW). A HW coated with a silver film, which had reasonable transmission and little optical background noise, was used as a bidirectional transmission fiber for both the excitation and collection of Raman scattered light. The HW itself generated no Raman scattering or fluorescence noise during transmission. A complex filtering system at the end of the waveguide was thus unnecessary. In addition, the measured Raman spectra showed better signal-to-noise ratios than a conventional Raman fiber probe. The HW's suitability as a Raman fiber probe was also demonstrated.     

The Huggins band of ozone: unambiguous electronic and vibrational assignment

The Huggins band of ozone is investigated by means of exact dynamics calculations using a new (diabatic) potential energy surface for the (1)B(2) state. The remarkable agreement with the measured spectrum strongly suggests that the Huggins band is due to the two C(s) potential wells of the (1)B(2) state. The vibrational assignment, based on the nodal structure of wave functions, supports the most recent experimental assignment.     

High-pressure elastic properties of solid argon to 70 GPa

The acoustic velocities, adiabatic elastic constants, bulk modulus, elastic anisotropy, Cauchy violation, and density in an ideal solid argon (Ar) have been determined at high pressures up to 70 GPa in a diamond anvil cell by making new approaches of Brillouin spectroscopy. These results place the first complete study for elastic properties of dense Ar and provide an improved basis for making the theoretical calculations of rare-gas solids over a wide range of compression.     

Investigation of structural changes related to temperature: An understanding of H-bond based proton transfer in 4(5)-vinylimidazole and acrylic acid copolymer membrane

An attempt to understand how proton transfer proceeds in poly (acrylic acid-co-4(5)-vinylimidazole) has been carried out based on the temperature dependent characterization techniques, i.e., Fourier transform infrared spectroscopy (FTIR), wide angle X-ray diffraction (WAXD), Raman spectroscopy, including the atomic distance calculations. Systematical studies are achieved from a series of poly (acrylic acid-co-4(5)-vinylimidazole) with different acrylic acid content. When the copolymer is almost an ideal in equimolar ratio of an alternating structure, the hydrogen bond between carboxylic acid and imidazole is maintained and initiates the proton conductivity even at 120 °C. Whereas when the copolymer is carboxylic acid rich, the dehydration to form anhydride proceeds resulting in the decrease in proton conductivity at high temperature. The radial distribution function (RDF) calculated from the WAXD pattern shows that the inter-atomic distances reflect how the increase in temperature induces a favorable packing structure under the hydrogen bond network and the chain mobility to enhance the proton transfer at high temperature, especially in the case of the copolymer with an ideal alternating structure.