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91.
Wong D. Patran A. Tan T.L. Rawat R.S. Lee P. 《IEEE transactions on plasma science. IEEE Nuclear and Plasma Sciences Society》2004,32(6):2227-2235
This paper investigates the emission characteristics of a high-performance low-energy (3-kJ) repetitive dense plasma focus device, NX2, operated at up to 1-Hz repetition rate to develop it as an intense source of soft X-rays (SXR) for microlithography and micromachining. Various SXR yield optimization studies with argon and neon as filling gases were performed under different operating conditions (charging voltage, filling pressure, anode length, and insulator sleeve length). The SXR yield was computed using signals obtained from a PIN diode SXR spectrometer with appropriate filters. When operated in neon, the average optimum SXR (/spl lambda//spl sim/1 nm) yield in 4/spl pi/ steradians was found to be up to 140 J/shot, which corresponded to a wall plug efficiency of 5.6%. Operation in argon showed that optimized SXR (/spl lambda//spl sim/0.4 nm) yield was up to 1.3 J/shot. While operating with neon under optimized conditions with a water-cooled anode in repetitive mode, the NX2 device was used as a SXR source to imprint a test lithograph on a highly sensitive chemically-amplified resist SU-8. Test structures showing the effect of a stepper with aspect ratio 3:1 on 10-/spl mu/m-thick SU-8 resist film were obtained. 相似文献
92.
Vijay Nair P.B. Beneesh V. Sreekumar S. Bindu Rajeev S. Menon Ani Deepthi 《Tetrahedron letters》2005,46(2):201-203
The zwitterionic species generated by the addition of dimethoxycarbene to dimethyl butynedioate is trapped by arylidenemalononitrile to yield cyclopentenone derivatives. 相似文献
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Thioketones react with molybdenum hexacarbonyl in tetrahydrofuran (60–65°C, 2–3 h) to give molybdenum pentacarbonyl complexes in 52–80% yield. Geometric isomers were isolated in the case of thiocamphor. 相似文献
98.
We study the boundedness and the compactness of composition operators on some Banach function spaces such as absolutely continuous Banach function spaces on a -finite measure space, Lorentz function spaces on a -finite measure space and rearrangement invariant spaces on a resonant measure space. In addition, we study some properties of the spectra of a composition operator on the general Banach function spaces.
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100.
S. Karamat R. S. Rawat T. L. Tan P. Lee R. Chen H. D. Sun W. Zhou 《Applied Physics A: Materials Science & Processing》2010,99(4):717-722
Multilayer structures A–B–A⋅⋅⋅ consisting of alternating layers of a metal A and a semiconductor B can show large anisotropy
in their transport properties. In tilted multilayer structures, where layer planes and sample surface include a nonzero tilt
angle, nonvanishing off-diagonal elements in the sample’s transport tensors lead to transverse Seebeck and Peltier effects.
Achievable temperature differences and figures of merit for transverse Peltier cooling are discussed and compared with experiments,
coefficients of performance for transverse power generation are calculated. 相似文献