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891.
通过反应磁控溅射过程中的等离子体发射光谱,研究了制备ZnO薄膜的沉积温度、氧气流量比例R=O2/(O2+Ar)对Zn和O原子发射光谱的影响,并结合ZnO薄膜的结构和物理性能,探讨了沉积温度在ZnO薄膜生长中的作用.研究结果显示:当R≥0.75%时, Zn的溅射产额随R的增加基本呈线性下降规律.当R介于10%—50%时,氧含量的变化相对平缓,有利于ZnO薄膜生长的稳定性控制.Zn原子发射光谱强度随沉积温度的变化可以分为三个阶段.当沉积温度低于250℃时,发射光谱强
关键词:
ZnO
薄膜生长
反应磁控溅射
等离子体发射光谱 相似文献
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895.
AFM study of gold nanowire array electrodeposited within anodic aluminum oxide template 总被引:7,自引:0,他引:7
Uniform gold nanowires were synthesized by electrodepositing the gold under a very low ac frequency in the pores of an anodic
aluminum oxide (AAO) template. The surface of the Au/AAO composite is very even and appeared purplish red. Atomic force microscopy
observation indicates that the template membranes we obtained have hexagonally close-packed nanochannels. The gold nanowire
array is very orderly arranged after partially dissolving the aluminum oxide membrane. Gold nanowires were also characterized
by transmission electron microscopy and the phase structure of the Au/AAO composite was proved by X-ray diffraction.
Received: 19 April 2001 / Accepted: 28 April 2001 / Published online: 27 June 2001 相似文献
896.
Wang X. Yang S. Wang J. Li M. Jiang X. Du G. Liu X. Chang R.P.H. 《Optical and Quantum Electronics》2002,34(9):883-891
High quality ZnO film was deposited by plasma-assisted metal-organic chemical vapor deposition (MOCVD). We observed a dominant peak at 34.6° due to (0 0 2) ZnO, which indicated that the growth of ZnO film was strongly C-oriented. The full-width at half-maximum (FWHM) of the -rocking curve was 0.56° indicating relatively small mosaicity. Photoluminescence (PL) measurement was performed at both room temperature and low temperature. Ultraviolet (UV) emission at 3.30 eV was found with high intensity at room temperature while the deep level transition was weakly observed at 2.513 eV. The ratio of the intensity of UV emission to that of deep level emission was as high as 193, which implied high quality of ZnO film. From PL spectrum at 10 K, we observed A-exciton emission at 3.377 eV and D°X bound exciton transition at 3.370 eV. The donor–acceptor transition and LO phonon replicas were observed at 3.333 and 3.241 eV respectively. Raman scattering was performed in back scattering at room temperature. The E2, A1(LO) and A1(TO) mode was seen at 437.6, 575.8 and 380 cm–1 respectively. In comparison with Raman spectrum of ZnO powder, we found that ZnO film was nearly free of strain, which indicated high crystal quality. 相似文献
897.
Fabrication of bamboo-shaped GaN nanorods 总被引:1,自引:0,他引:1
H. Li J.Y. Li M. He X.L. Chen Z. Zhang 《Applied Physics A: Materials Science & Processing》2002,74(4):561-562
Bamboo-shaped GaN nanorods were formed through a simple sublimation method. They were characterized by means of X-ray powder
diffraction (XRD), transmission electron microscopy (TEM), high-resolution transmission electron microscopy (HRTEM) and selected-area
electron diffraction (SAED). The TEM image showed that the nanorods were bamboo-like. XRD, HRTEM and SAED patterns indicated
that the nanorods were single-crystal wurtzite GaN.
Received: 8 January 2001 / Accepted: 28 April 2001 / Published online: 20 December 2001 相似文献
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