Interference inspection of the aspherical components of an objective for nanolithography

Methods and schemes to inspect the EUV mirror shape are developed on the basis of a point diffraction interferometer with computer processing of interferograms. A measurement accuracy to within 0.001 of a wavelength in the visual range is achieved.     

Kinetics and mechanism of the formation of poly[(1,1,3,3-tetramethyldisiloxanyl)ethylene] and poly(methyldecylsiloxane) by hydrosilylation

The kinetics of the formation of poly(carbosiloxane), as well as of alkyl-substituted poly(siloxane), by Karstedt's catalyst catalyzed hydrosilylation were investigated. Linear poly(carbosiloxane), poly[(1,1,3,3-tetramethyldisiloxanyl)ethylene], (PTMDSE), was obtained by hydrosilylation of 1,3-divinyltetramethyldisiloxane (DVTMDS) and 1,1,3,3-tetramethyldisiloxane (TMDS), while alkyl-substituted poly(siloxane), poly(methyldecylsiloxane), (PMDS), was synthesized by hydrosilylation of poly(methylhydrosiloxane) (PMHS) and 1-decene. To investigate the kinetics of PTMDSE formation, two series of experiments were performed at reaction temperatures ranging from 25 to 56 °C and with catalyst concentrations ranging from 7.0 × 10⁻⁶ to 3.1 × 10⁻⁵ mol Pt/mol CHCH₂. A series of experiments was performed at reaction temperatures ranging from 28 to 48 °C, with catalyst concentrations of 7.0 ×10⁻⁶ mol of Pt per mol of CHCH₂, when kinetics of PMDS formation was investigated. All reactions were carried out in bulk, with equimolar amounts of the reacting Si H and CHCH₂ groups. The course of the reactions was monitored by following the disappearance of the Si H bands using quantitative infrared spectroscopy. The results obtained showed typical first order kinetics for the PTMDSE formation, consistent with the proposed reaction mechanism. In the case of PMDS an induction period occurred at lower reaction temperatures, but disappeared at 44 °C and the rate of Si H conversion also started to follow the first-order kinetics. © 2007 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 45: 2246–2258, 2007     

Calculation of the Radiating Characteristics of a Thermodynamically Nonuniform Gas Medium

Passive methods of remote analysis of waste gases of industrial enterprises and aircrafts engines and gases ejected in eruptions of volcanos, in fires, and in other processes disturbing the atmosphere are now of limited utility because of the lack of well-developed mathematical techniques for solving the inverse problems of gas analysis. However, the advantage of these methods is obvious, since the equipment is limited to a receiving device and the gas medium serves as a radiator. At the same time, in modern techniques, the interpretation of measurements of emissivities of gases is performed using a phenomenological approach such that experimental data on radiation characteristics of various objects are approximated by simple polynomial relations whose coefficients are determined by minimization methods. This approach does not allow one to investigate the mechanism of the processes occurring in a radiating medium and gives no way of solving the inverse problem of monitoring the composition and thermodynamic parameters of a medium which disturbs the atmosphere by thermal effects. In elaborating theoretical methods of gas analysis, the elaboration of the direct problem of calculation of radiating characteristics of gases is of importance, since it is not clear how the emissivity of a gas medium depends on its thermodynamic parameters. This paper is devoted to the above problem. Here, the error is estimated that arises in modeling a nonuniform gas medium with an actual temperature distribution, which linearly depends on coordinate, by a uniform gas layer. It is shown that the difference between the radiation intensities calculated for uniform and nonuniform media can be significant in the practically important case where the recording device is in a zone of normal temperatures. This implies that the error of reconstruction of the spectroscopic and molecular parameters of gaseous compounds from high-temperature measurements of the radiating and absorbing characteristics should take into account the thermodynamic nonuniformity of the medium.     

The effect of olefinic terminal chains on the mesomorphic properties of 4,4'-disubstituted diphenyldiacetylenes

New diphenyldiacetylenes of the type with A, B = H and/or F; m = 0, 1; n = 1-4; and X = C n H 2n + 1 , F, CF 3 or CN were synthesized and their mesomorphic properties determined by hot stage polarizing microscopy and DSC. When m = 0, all of these compounds showed only a nematic phase except when X = CF 3 when both nematic and smectic A phases were seen. Both clearing and melting temperatures were higher than those reported for substitution with the corresponding alkyl chains but the much larger increase in clearing temperatures produced considerably wider nematic phases. Eutectic mixtures of a few of these olefins yielded nematic materials also having much wider temperature ranges and higher clearing temperatures than the eutectic mixtures of the alkyl compounds, while retaining their high birefringence and low viscosities. Such materials are of interest for beam-steering devices.

Four of the diacetylenes with m = 1 ( A, B = H) were also prepared ( X = C 6 H 13 , F, n = 2, 3). When X was C 6 H 13 ( n = 2), the nematic range was smaller in the 2- than in the 1-olefin but wider than in the alkyl series. When X = F, either no nematic phase or a monotropic one was observed, whereas the 1-olefins gave a much wider nematic phase. Both transition temperatures were lower than those for the corresponding 1-olefin and alkyl analogues. The compound with X = C 6 H 13 and n = 2 had a melting temperature below room temperature.     

New Heat-Resistant Polyimidates Derived from Bisphenols and Mono- and Dicarboxylic Acid Imidoyl Chlorides

New polyimidates were prepared from bisphenols and mono- and dicarboxylic acid imidoyl chlorides. The structures of the polymers were determined, and their physicochemical, chemical, and thermal properties were studied. The possibility of preparing film and compression materials with good mechanical characteristics from these polymers was examined.     

A rapid and sensitive extractive spectrophotometric determination of copper(II) in pharmaceutical and environmental samples using benzildithiosemicarbazone.

Benzildithiosemicarbazone (BDTSC) is proposed as a sensitive and selective analytical reagent for the extractive spectrophotometric determination of copper(II). BDTSC reacts with copper(II) in the pH range 1.0-7.0 to form a yellowish complex. Beer's law is obeyed in the concentration range 0.5-0.4 microg cm(-3). The yellowish Cu(II)-BDTSC complex in chloroform shows a maximum absorbance at 380 nm, with molar absorptivity and Sandell's sensitivity values of 1.63 x 10(4) dm3 mol(-1) cm(-1) and 0.00389 microg cm(-2), respectively. A repetition of the method is checked by finding the relative standard deviation (RSD) (n = 10), which is 0.6%. The composition of the Cu(II)-BDTSC complex is established as 1:1 by slope analysis, molar ratio and Asmus' methods. An excellent linearity with a correlation coefficient value of 0.98 is obtained for the Cu(II)-BDTSC complex. The instability constant of the complex calculated from Edmond and Birnbaum's method is 7.70 x 10(-4) and that of Asmus' method is 7.66 x 10(-4), at room temperature. The method is successfully employed for the determination copper(II) in pharmaceutical and environmental samples. The reliability of the method is assured by analyzing the standard alloys (BCS 5g, 10g, 19e, 78, 32a, 207 and 179) and by inter-comparison of experimental values, using an atomic absorption spectrometer.     

Inverse Problem with Free Boundary for Heat Equation

We establish conditions for the existence and uniqueness of a solution of the inverse problem for a one-dimensional heat equation with unknown time-dependent leading coefficient in the case where a part of the boundary of the domain is unknown.     

Formation of coherent spatial structures in the reaction-diffusion atmospheric system under the action of a planetary wave

On the example of the effect of an atmospheric wave with given amplitude on the density oscillations of minor gas constituents near the mesopause (at heights 80–90 km, we consider the influence of the quasi-resonant periodic spatial transport on a distributed system responding subharmonically to a periodic external action (diurnal sunlight variations). Numerical modeling revealed the formation of a coherent horizontal distribution of the dynamical variables (i.e., the concentrations of small constituents). Application of this effect to the mesopause conditions is discussed.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Radiofizika, Vol. 47, No. 9, pp. 739–752, September, 2004.