Surface analytical characterization of oxide-free Si(100) wafer surfaces

Summary Wet-chemical cleaning procedures of Si(100) wafers are surface analytically characterized and compared. Hydrophobic surfaces show considerably less native oxides in comparison to hydrophilic surfaces.The growth of the oxide is determined as a function of exposure to air by means of XPS measurements. The chemically shifted Si2p XPS signal is utilized for the quantification of the growth kinetics.One hour after cleaning no chemically shifted Si2p XPS peak is discernible on the hydrophobic surfaces. Assuming homogeneous oxide growth, the detection limit of native oxides is estimated to be below 0.05 nm using an emission angle of 18° with respect to the wafer surface. The calculation of the oxide thickness from the chemically shifted and nonchemically shifted Si2p XPS peak intensities is carried out according to Finster and Schulze [1]. For more than a day after cleaning no surface oxides can be identified on the hydrophobic surfaces. The oxide growth kinetics is logarithmic. The very slow oxidation rate cannot be attributed to fluorine residues since no fluorine is seen by XPS. We explain the slow oxidation rate by a homogeneous hydrogen saturated Si(100) wafer surface.

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Oberflächenanalytische Charakterisierung oxidfreier Si(100)-Waferoberflächen

     

Reaction of 2-formyl-1,3-cyclohexanediones with cyanoacetamide

Chemistry of Heterocyclic Compounds -     

Properties of reflected sunlight derived from a Green's function method

The inference of optical depth and particle size of clouds and aerosols using remotely sensed reflected radiance at solar wavelengths has received much attention recently. The information these measurements provide is path integrated. However, very little is known about the vertical distribution of this weighting. To characterize it, we first solve the radiative transfer equation (RTE) by a Green's function approach, and then investigate the sensitivity of the weighting to vertical inhomogeneities in the extinction by introducing a function that is closely related to the Green's function, herein called the contribution function. This function calculates the contributions to the radiance at the upper boundary of the medium by underlying layers. Three hypothetical clouds of identical optical depth but exhibiting different extinction profiles were used in this study. The contribution function was found very sensitive to the extinction profile. The global reflection and transmission matrices used to construct the Green's function, derived using an eigenmatrix method, resulted in an efficient, stable, and accurate method for calculating the emerging radiances that can be extended to multi-layered media.