面向单晶SiC原子级表面制造的等离子体辅助抛光技术

目前Si基半导体由于其自身材料特性的限制,已经越来越难以满足高速发展的现代电力电子技术对半导体器件的性能要求.SiC作为新一代半导体材料具有显著的性能优势,但由于其属于典型的难加工材料,实现SiC晶圆的高质量与高效率加工成为了推动其产业化应用进程的关键.本综述在回顾近年来SiC超精密加工技术研究进展的基础上,重点介绍了一种基于等离子体氧化改性的SiC高效超精密抛光技术,分析了该技术的材料去除机理、典型装置、改性过程及抛光效果.分析结果表明,该技术具有较高的去除效率,能够获得原子级平坦表面,并且不会产生亚表面损伤.同时针对表面改性辅助抛光技术加工SiC表面过程中出现的台阶现象,探讨了该台阶结构的产生机理及调控策略.最后对等离子体辅助抛光技术的发展与挑战进行了展望.     

Electrochemical tuning of the optoelectronic properties of a fluorene-based conjugated polymer

The electrochemical reduction of a fluorene-based conjugated polymer, poly(9-fluorenone-alt-9,9-dioctylfluorene), was investigated for the first time. The carbonyl group in the fluorenone unit was selectively and quantitatively converted to the methylene group, as determined by (1)H NMR, IR, and energy-dispersive X-ray (EDX) analysis. The optical and electrochemical properties of the polymers were studied by UV-vis, photoluminescence (PL), and cyclic voltammetry (CV) measurements and were found to be tunable by varying the reduction level.     

Preparation of Enzymatically Recyclable Hydrogels Through the Formation of Inclusion Complexes of Amylose in a Vine‐Twining Polymerization

In this paper, we describe the preparation of hydrogels through the formation of an inclusion complex of amylose in a vine‐twining polymerization. This is achieved by the phosphorylase‐catalyzed polymerization of α‐D ‐glucose 1‐phosphate from maltoheptaose primer, in the presence of a water‐soluble copolymer having hydrophobic graft‐chains (poly(acrylic acid sodium salt‐graft‐δ‐valerolactone)). The mixture turns into a gel during the polymerization process. Evaluation of the hydrogels is conducted by shear‐viscosity measurements of the products. For the hydrogels with relatively high viscosities, fast relaxation modes of the cooperative diffusions are observed by scanning microscopic light scattering measurements, which indicate the nanometer‐size network structures of the hydrogels. In addition, we found that the enzymatic disruption and reproduction of the hydrogels are achieved by the combination of the amylase‐catalyzed hydrolysis of the amylose component and the formation of amylose by the phosphorylase‐catalyzed polymerization.     

Testing gravity using the environmental dependence of dark matter halos

In this Letter, we investigate the environmental dependence of dark matter halos in theories which attempt to explain the accelerated expansion of the Universe by modifying general relativity (GR). Using high-resolution N-body simulations in f(R) gravity models which recover GR in dense environments by virtue of the chameleon mechanism, we find a significant difference, which depends on the environment, between the lensing and dynamical masses of dark matter halos. This environmental dependence of the halo properties can be used as a smoking gun to test GR observationally.     

Investigation of void formation beneath thin AlN layers by decomposition of sapphire substrates for self-separation of thick AlN layers grown by HVPE

Void formation at the interface between thick AlN layers and (0 0 0 1) sapphire substrates was investigated to form a predefined separation point of the thick AlN layers for the preparation of freestanding AlN substrates by hydride vapor phase epitaxy (HVPE). By heating 50–200 nm thick intermediate AlN layers above 1400 °C in a gas flow containing H₂ and NH₃, voids were formed beneath the AlN layers by the decomposition reaction of sapphire with hydrogen diffusing to the interface. The volume of the sapphire decomposed at the interface increased as the temperature and time of the heat treatment was increased and as the thickness of the AlN layer decreased. Thick AlN layers subsequently grown at 1450 °C after the formation of voids beneath the intermediate AlN layer with a thickness of 100 nm or above self-separated from the sapphire substrates during post-growth cooling with the aid of voids. The 79 μm thick freestanding AlN substrate obtained using a 200 nm thick intermediate AlN layer had a flat surface with no pits, high optical transparency at wavelengths above 208.1 nm, and a dislocation density of 1.5×10⁸ cm⁻².     

A possible interpretation of CDF dijet mass anomaly and its realization in supersymmetry

Recently, the CDF Collaboration reports an anomaly in dijet mass distribution in association with a lepton and missing energy. We discuss a possibility that the origin of the lepton and missing energy comes not from a W boson but a new boson particle, which is also responsible for the dijet mass peak. We show that such a situation can be realized in the framework of the minimal supersymmetric standard model and the dijet anomaly can be explained.     

Heterogeneous distribution of radiocesium in aerosols, soil and particulate matters emitted by the Fukushima Daiichi Nuclear Power Plant accident: retention of micro-scale heterogeneity during the migration of radiocesium from the air into ground and river systems

We analyzed ¹³⁷Cs in aerosols, rock, soil and river suspended sediment collected after the Fukushima Daiichi Nuclear Power Plant (FDNPP) accident. Based on the results, we discuss the post-event behavior and transportation of radiocesium in the environment from the air into ground and river systems. First, radionuclides were emitted from the FDNPP as airborne ‘hot’ particles, which contained water-soluble fractions of radiocesium. Radiocesium was still present in a water-soluble fraction after deposition on the ground. Subsequent interaction of the ‘hot’ particles with water (e.g. rainfall) dissolved and strongly fixed the radiocesium on rock and soil particles, thus changing the radiocesium into insoluble forms. The distribution of ‘hot spots’ was possibly controlled by the initial position of deposition on the ground. Consequently, ‘hot spots’ were studded on the rock surface rather than being uniformly distributed. The distribution of radiocesium in river suspended particles was not homogeneous during water transportation, reflecting the heterogeneity of radiocesium in rock and soil. Leaching experiments demonstrated that radiocesium in rock, soil and river suspended sediment was fairly insoluble, showing that the adsorption reaction is irreversible. The micro-scale heterogeneous distribution of radiocesium in aerosols, soil and suspended particles was due to the presence of ‘hot’ particles in aerosols. Dissolution of radiocesium in the ‘hot’ particles in the aerosols and subsequent irreversible adsorption onto the soil particle complex are responsible for the preservation of the heterogeneity both in soil and in river suspended particles.     

Synthesis and healing properties of poly(arylether sulfone)–poly(alkylthioether) multiblock copolymers containing disulfide bonds

Thermoplastic elastomers composed of soft and hard segments are important elastic and processable synthetic polymers. The microphase‐separated soft domains show low glass transition temperature and possess sufficient chain mobility at room temperature. In this study, we report the synthesis and healing properties of multiblock copolymers containing disulfide bonds as dynamic covalent bonds. The multiblock copolymers composed of poly(arylether sulfone) and poly(alkylthioether) segments were synthesized by oxidative coupling polymerization of the corresponding thiol‐terminated oligomers. Atomic force microscopy phase images, differential scanning calorimetry, and dynamic mechanical analysis curves indicated the microphase‐separated morphology of the multiblock copolymer. Self‐healing properties of the polymer were evaluated by changes in the elongation at break of the cut/adhered samples. The elongation recovery increased with UV irradiation time, and the multiblock copolymer showed a 93% recovery after UV irradiation for 5 h. The healing efficiency induced by UV irradiation, determined by subtracting the recovery without UV irradiation, was calculated to be 51%. According to the UV spectra and solubility changes after UV irradiation, the main healing factor in this study was the crosslinking reactions caused by thiyl radicals generated from UV irradiation instead of disulfide exchange reactions. © 2017 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2017 , 55, 3545–3553