Study of the gas-phase parameters affecting the silicon-oxide film deposition induced by an ArF laser

A study of the gas-phase parameters involved in ArF laser induced chemical vapour deposition of silicon-oxide thin films is presented. A complete set of experiments has been performed showing the influence of the concentration of the precursor gases, N₂O and SiH₄, and their influence on total and partial pressures on film growth and properties. In this paper we demonstrate the ability of this LCVD method to deposit silicon oxide films of different compositions and densities by appropriate control of gas composition and total pressure. Moreover, a material specific calibration plot comprising data obtained using different preparation techniques is presented, allowing determination of the stoichiometry of SiO _x films by using FTIR spectroscopy independently of the deposition method. For the range of processing conditions examined, the experimental results suggest that chemical processes governing deposition take place mainly in the gas phase.     

Optical detection of NO3 and NO2 in “pure” HNO3 vapor,the liquid-phase decomposition of HNO3

Flowing and static gas-phase samples of HNO₃ in O₂ and N₂ were analyzed by long-path ultraviolet/visible (UV/VIS) spectroscopy to reveal the presence of both NO₂ and NO₃, the concentrations of which were calculated using differential absorption cross sections. NO₂ is produced predominantly by the heterogeneous decomposition of HNO₃, whereas NO₃ is generated in the gas phase by the thermal decomposition of N₂O₅, a product of the self-disproportionation of liquid HNO₃. © 1993 John Wiley & Sons, Inc.     

On Green's function for the Helmholtz equation in a wedge

It is found that, in the spherical coordinate system, the fundamental solution of the Helmholtz equation in a wedge satisfies the Sommerfeld radiation conditions at infinity uniformly in angle coordinates.Deceased.Translated from Ukrainskii Matematicheskii Zhurnal, Vol. 45, No. 9, pp. 1312–1314, September, 1993.     

Boundary-value problems for an elliptic equation with complex coefficients and a certain moment problem

Elliptic systems of two second-order equations, which can be written as a single equation with complex coefficients and a homogeneous operator, are studied. The necessary and sufficient conditions for the connection of traces of a solution are obtained for an arbitrary bounded domain with a smooth boundary. These conditions are formulated in the form of a certain moment problem on the boundary of a domain; they are applied to the study of boundary-value problems. In particular, it is shown that the Dirichlet problem and the Neumann problem are solvable only together. In the case where the domain is a disk, the indicated moment problem is solved together with the Dirichlet problem and the Neumann problem. The third boundary-value problem in a disk is also investigated.Translated from Ukrainskii Matematicheskii Zhurnal, Vol. 45, No. 11, pp. 1476–1483, November, 1993.     

Relativistic quantum defect calculations on the copper isoelectronic sequence

The quantum defect orbital (QDO ) method and its relativistic (RQDO ) counterpart have been employed in this work to compute oscillator strengths for several fine-structure transitions in members of the copper isoelectronic sequence up to Z = 92. The RQDO results are found to be in quite good agreement with the best estimates derived from other sources, whenever the comparison is possible. © 1994 John Wiley & Sons, Inc.     

Two Coulomb waves theory for direct excitation

A theoretical model of Dewangan, in which the total scattering wave function is approximated by a distorted wave containing two Coulomb wave functions, is discussed and its relation with the Brauner-Briggs-Klar model for ionization is examined. An important feature of the theory is that it includes a second Born amplitude naturally and in addition, contains, albeit approximately, both real and imaginary parts of all higher order Born terms. The theory is applied to study the 1s→2s excitation of hydrogen by electrons in the energy range 54.4 to 400eV. The differential and integral cross sections predicted by the theory are compared with the results of other theories and experimental data at 54.4eV and a good agreement is found.     

Vector potential theory on nonsmooth domains in R<Superscript>3</Superscript> and applications to electromagnetic scattering

We study boundary value problems for the time-harmonic form of the Maxwell equations, as well as for other related systems of equations, on arbitrary Lipschitz domains in the three-dimensional Euclidean space. The main goal is to develop the corresponding theory for L^p-integrable bounday data for optimal values of p's. We also discuss a number of relevant applications in electromagnetic scattering.