Characterizing photolithographic linewidth sensitivity to process temperature variations for advanced resists using a thermal array

A thermal system is developed to rapidly characterize the linewidth sensitivity of advanced resists to process temperature variations in the photolithographic manufacturing sequence. This thermal array consists of a 7×7 grid of individually programmable heating zones distributed within a thermal cycling apparatus. It is used to improve the quality and quantity of data for determining the optimal thermal conditions by effectively producing equivalent operating conditions besides the spatially controlled temperature. The system is demonstrated for the optimization of the post-apply and post-exposure thermal-processing conditions for chemically amplified photoresists used in the fabrication of quartz photomasks . PACS 07.20.Hy; 81.16.Nd; 81.70.Pg     

Broadband control of plate radiation using a piezoelectric, double-amplifier active-skin and structural acoustic sensing

The potential of a piezoelectric, double-amplifier active-skin with structural acoustic sensing (SAS) is demonstrated for the reduction of broadband acoustic radiation from a clamped, aluminum plate. The active-skin is a continuous covering of the vibrating portions of the plate with active, independently controllable piezoelectric, double-amplifier elements and is designed to affect control by altering the continuous structural radiation impedance rather than structural vibration. In simulation, acoustic models are sought for the primary and secondary sources that incorporate finite element methods. Simulation indicates that a total radiated power attenuation in excess of 10 dB may be achieved between 250 and 750 Hz with microphone error sensing, while under SAS the radiated power is reduced by nearly 8 dB in the same frequency range. In experiment, the adaptive feed forward filtered-x LMS (least mean square) algorithm, implemented on a Texas Instruments C40 DSP, was used in conjunction with the 6I6O control system. With microphone error sensing, 11.8-dB attenuation was achieved in the overall radiated power between 175 and 600 Hz, while inclusion of SAS resulted in a 7.3-dB overall power reduction in this frequency band.     

Resistive and Magnetic Susceptibility Transitions in Superconducting (TMTSF)2C104

We report measurements of the ac magnetic susceptibility and dc resistive superconducting transitions in the organic superconductor (TMTSF)₂C10₄. Inductive measurements show complete diamagnetic shielding below a broad transition and initial flux penetration at very low fields [H_c1(0) < 1 Oe]. The resistive transition is also broad, but occurs at a significantly higher temperature than the inductive transition, T_c = 1.0 K and 0.65 K respectively. Resistance measurements also show evidence of a phase transition in the vicinity of 24 K. Magnetic field induced transitions, measured both inductively and resistively, show marked anistropy both in magnitude and in breadth of the transition. Results suggest that (TMTSF)₂C10₄ is a quasi ID or 2D superconductor at high temperatures and high magnetic fields and an anisotropic bulk superconductor at low temperatures and fields. Associated thermoelectric power measurements suggest that spin density waves coexist with the superconducting state.     

Parallel Optimization of Synthetic Pathways within the Network of Organic Chemistry

Finding a needle in a haystack: The number of possible synthetic pathways leading to the desired target of a synthesis can be astronomical (10(19) within five synthetic steps). Algorithms are described that navigate through the entire known chemical-synthetic knowledge to identify optimal synthetic pathways. Examples are provided to illustrate single-target optimization and parallel optimization of syntheses leading to multiple targets.     

Musical background not associated with self-perceived hearing performance or speech perception in postlingual cochlear-implant users

In normal-hearing listeners, musical background has been observed to change the sound representation in the auditory system and produce enhanced performance in some speech perception tests. Based on these observations, it has been hypothesized that musical background can influence sound and speech perception, and as an extension also the quality of life, by cochlear-implant users. To test this hypothesis, this study explored musical background [using the Dutch Musical Background Questionnaire (DMBQ)], and self-perceived sound and speech perception and quality of life [using the Nijmegen Cochlear Implant Questionnaire (NCIQ) and the Speech Spatial and Qualities of Hearing Scale (SSQ)] in 98 postlingually deafened adult cochlear-implant recipients. In addition to self-perceived measures, speech perception scores (percentage of phonemes recognized in words presented in quiet) were obtained from patient records. The self-perceived hearing performance was associated with the objective speech perception. Forty-one respondents (44% of 94 respondents) indicated some form of formal musical training. Fifteen respondents (18% of 83 respondents) judged themselves as having musical training, experience, and knowledge. No association was observed between musical background (quantified by DMBQ), and self-perceived hearing-related performance or quality of life (quantified by NCIQ and SSQ), or speech perception in quiet.     

Modeling of a passive distributed vibration control device using a superposition technique

The modeling of a distributed vibration control device is considered for use in predicting the vibration attenuation benefits and best design practices when such devices are attached to vibrating structures. Three-dimensional (3D) finite element (FE) analysis is possible but the geometric intricacies of the distributed spring layer and potential lack of symmetries of the device placement on a host structure make such a model expensive to compute, particularly for optimization purposes. Thus, an equivalent 2D model is desirable, whereby conventional Ritz-method solution forms may be implemented. This paper describes the continuum domain model of interest and explores the applicability of a superposition approach by which a non-continuous distributed spring layer is homogenized into a 2D continuum. Simple FE models are described which allow computation of the required elasticity parameters of the spring layer. An eigenfrequency analysis comparing 3D FE and 2D model results show good agreement in the lowest order natural frequencies over a range of typical device design parameters. Experimental measurements further validate the modeling approach by comparison of FRF results. The superposition method is found to accurately model non-continuous materials such as the corrugated distributed spring layer of interest and should therefore be applicable to other embodiments of such layers.     

The hafnium-mediated NH activation of an amido-borane

Treatment of Cp(2)HfCl(2) with two equivalents of LiNH(2)BH(C(6)F(5))(2) in toluene solution yields Cp(2)Hf{NHBH(C(6)F(5))(2)}, which has been crystallographically characterised. The otherwise base-free [NHBH(C(6)F(5))(2)] complex is stabilised by an agostic interaction.     

Matrix isolation ESR and theoretical studies of metal phosphides

The ZnP, (67)ZnP, CdP, (111)CdP, and (113)CdP radicals have been formed by laser ablation of the metal with GaP pressed into the metal surface, isolated in an inert neon matrix at 4.3 K and their electronic structure was established using electron spin resonance spectroscopy. The following magnetic parameters were determined experimentally for ZnP/(67)ZnP, g(⊥)=1.9982(2), A(⊥)(P)=111(6)?MHz, A(⊥)((67)Zn)=160(2)?MHz, and D=-29?988(3)?MHz and estimates were made for the following ZnP/(67)ZnP magnetic parameters: g(∥)=1.9941(2), A(∥)(P)=-5(6)?MHz, and A(∥)((67)Zn)=180(50)?MHz. The following magnetic parameters for CdP/(111)CdP/(113)CdP were determined experimentally: g(⊥)=1.9963(2), A(⊥)(P)=97(3)?MHz, A(⊥)((111)Cd)=862(3)?MHz, and A(⊥)((113)Cd)=902(3)?MHz. Evidence for the formation of the MgP radical was also obtained and an approximate hyperfine coupling constant of A(⊥)(P)=157(6)?MHz was determined. The low-lying electronic states of ZnP and MgP were also investigated using the multiconfigurational self-consistent field technique. Potential energy surfaces, binding energies, optimized bond lengths, energy separations, and dissociation energies have been determined. Both radicals are found to have (4)Σ(-) ground states with a leading configuration at r(e) of 10σ(2)11σ(2)5π(1)5π(1)12σ(1) for ZnP and 7σ(2)8σ(2)3π(1)3π(1)9σ(1) for MgP. Significant mixing to this state is calculated for MgP.