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31.
During the forming process of the free-standing structure or the functional cavity when releasing the high aspect ratio sacrificial layer,such structures tend to stick to the substrate due to capillary force.This paper describes the application of pull-in length conception as design rules to a novel ’dimpled’ method in releasing sacrificial layer.Based on the conception of pull-in length in adhering phenomenon,the fabrication and releasing sacrificial layer methods using micro bumps based on the silicon substrate were presented.According to the thermal isolation performances of one kind of micro electromechanical system device thermal shear stress sensor,the sacrificial layers were validated to be successfully released. 相似文献
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利用提出的光学读出非制冷红外成像系统,先后制作了单元尺寸各不相同的单层膜无基底焦平面阵列(focal plane array,FPA),获得了室温物体的热图像.分析发现,当FPA的单元尺寸从200μm逐渐减小到60μm时,基于恒温基底模型的理论响应与实验结果的偏差逐渐增大.通过有限元分析方法,模拟分析了不同尺寸的微梁单元在无基底FPA中的热学行为,发现了当单元尺寸逐渐减小时恒温基底模型偏差逐渐增大的原因,即无基底FPA的支撑框架不满足恒温基底条件,受热辐射后支撑框架的温升从基底上抬高了单元的温升.论文还分
关键词:
光学读出
非制冷红外成像
焦平面阵列
无基底 相似文献
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本文将人工机械心瓣/血液耦合系统作为研究对象,采用有限元法,分析了热解碳、钛合金钢、钴-铬合金钢及陶瓷四种材料机械瓣关闭状态下受突加阶梯压力荷载时的瞬态动力行为。结果表明,人工机械瓣态动力行为近乎刚性,寻致瓣叶上产生较高冲击压力,减小机械瓣的弹性模量,可以降低瓣/血液耦合系统的冲击压力。 相似文献
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经过三十多年的研发, 接近式X射线光刻技术已经非常成熟,其具有分辨率高、焦深大、工艺宽容度大、产量高等诸多优点.对于X射线掩模吸收体材料, 如果选择金, 只能采用电镀工艺, 而且金会污染硅基集成电路;而钽硅材料可以采用干法刻蚀工艺, 不会污染硅基集成电路, 是一种理想的X射线掩模吸收体材料.本文论述了氮化硅/钽硅X射线掩模制作工艺, 不同于常规工艺, 电子束光刻显影后, 以ZEP520电子束光刻胶作为阻挡层,SF6/CHF3作为反应气体, 电感耦合等离子体直接刻蚀钽硅薄膜.初步的实验结果证明了这种X射线掩模制作工艺是可行的. 相似文献
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We propose a substrate-free focal plane array (FPA) in
this paper. The solid substrate is completely removed, and the
microcantilevers extend from a supporting frame. Using finite
element analysis, the thermal and mechanical characterizations
of the substrate-free FPA are presented. Because of the large
decrease in thermal conductance, the supporting frame is temperature
dependent, which brings out a unique feature: the lower the thermal
conductance of the supporting frame is, the higher the energy
conversion efficiency in the substrate-free FPA will be. The results
from the finite element analyses are consistent with our
measurements: two types of substrate-free FPAs with pixel sizes
of 200× 200 and 60× 60~μ m2 are implemented
in the proposed infrared detector. The noise equivalent temperature
difference (NETD) values are experimentally measured to be 520 and
300~mK respectively. Further refinements are considered in various
aspects, and the substrate-free FPA with a pixel size of 30×
30~μ m2 has a potential of achieving an NETD value of
10~mK. 相似文献
38.
俄国自彼得大帝采取开放政策以来,文化科学与教育事业虽得以发展,但最初以派留学生和聘请国外著名学者赴俄进行科学研究,担任科学院院士或以讲学的方式培养俄国的科技人才,进程比较缓慢,收效不是很大.到十月革命前,在物理学科领域中,仅出 相似文献
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光学读出式红外成像技术是近年来研究的热点,本文讨论了镜面弯曲对光学检测灵敏度的影响.由双材料微悬臂梁组成的非致冷焦平面阵列通过体刻蚀工艺加工而成,由于残余应力的影响,制成的焦平面阵列将会发生弯曲,应力导致的镜面弯曲将会降低光学探测灵敏度.本文通过傅立叶光学模拟了镜面弯曲对光学探测灵敏度的影响,并通过实验验证了该模型.实验和模拟结果表明,在镜面曲率为0.1mm-1时,光学探测灵敏度将会降低到理想情况的40%.最后我们用这个模型评价了通过表面修饰来提高光学性能的效果. 相似文献
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