Effects of Confined Laser Ablation on Laser Plasma Propulsion

We investigate the effects of confined laser ablation on laser plasma propulsion. Compared with planar ablation, the cavity ablation provides an effective way to obtain a large target momentum and a high coupling coefficient. When laser pulses are focused into a cavity with 1 mm diameter and 2ram depth, a high coupling coefficient is obtained. By using a glass layer to cover the cavity, the coupling coefficient is enhanced by 10 times. Meanwhile, it is found that with the increase of the target surface size, the target momentum presents a linear increase.     

A comparison of single shot nanosecond and femtosecond polarization-resolved laser-induced breakdown spectroscopy of Al

Aluminum samples have been analyzed by femtosecond polarization-resolved laser-induced breakdown spectroscopy (fs-PRLIBS). We compare the obtained spectra with those obtained from nanosecond PRLIBS (ns-PRLIBS). The main specific features of fs-PRLIBS are that a lower plasma temperature leads to a low level of continuum and no species are detected from the ambient gas. Furthermore, signals obtained by fs-PRLIBS show a higher stability than those of ns-PRLIBS. However, more elements are detected in the ns-PRLIBS spectra.     

大气中激光等离子体通道寿命的延长及测量分析

介绍了一种反卷积方法.利用该方法分析了实验中测得的等离子体通道的光电信号特征，获 得了空气中等离子体通道的真实寿命.还证明了利用双脉冲激光结构，可以将等离子体寿命 延长近5倍. 关键词： 反卷积 大气激光等离子体通道 等离子体寿命     

Mitigation of energetic ion debris from Gd plasma using dual laser pulses and the combined effect with ambient gas

For the next-generation beyond extreme ultraviolet lithography(EUVL) sources, gadolinium(Gd) plasma with emission wavelength at 6.7 nm seems to be the leading candidate. Similar to the Sn target 13.5 nm light source, ion debris mitigation is one of the most important tasks in the laser-produced Gd plasma EUV source development. In this paper,a dual-laser-pulse scheme, which uses a low energy pulse to produce a pre-plasma and a main pulse after a time delay to shoot the pre-plasma, is employed to mitigate the energetic ion generation from the source. Optimal conditions(such as pre-pulse energy and wavelength, and the time delay between the pre-pulse and the main pulse for mitigating the ion energy) are experimentally obtained, and with the optimal conditions, the peak of the ion energy is found to be reduced to1/18 of that of a single laser pulse case. Moreover, the combined effect by applying ambient gas to the dual-pulse scheme for ion debris mitigation is demonstrated, and the result shows that the yield of Gd ions is further reduced to around 1/9 of the value for the case with dual laser pulses.