软X射线Mo/B_4C多层膜应力和热稳定性研究

为了实现7nm波段Mo/B4C多层膜反射镜元件的制备,研究了不同退火方式对Mo/B4C多层膜应力和热稳定性的影响。首先,采用直流磁控溅射方法分别基于石英和硅基板制作Mo/B4C多层膜样品,设计周期为3.58nm、周期数为60,Mo膜层厚度与周期的比值为0.4。其次,采用不同的退火方式对所制作的样品进行退火实验,最高退火温度500℃。最后,分别采用X射线掠入射反射、X射线散射和光学干涉仪的方法对退火前后的Mo/B4C多层膜的周期、界面粗糙度和应力进行测试。测试结果表明采用真空退火方式能够有效降低Mo/B4C多层膜的应力,且退火前后Mo/B4C多层膜的周期和界面粗糙度无明显变化,证明Mo/B4C多层膜在500℃以内具有很好的热稳定性。     

等离子体诊断用Schwarzschild显微镜的光学设计

 基于三级像差理论设计了用于激光等离子体诊断的极紫外Schwarzschild显微镜光学系统。显微镜的工作波长为18.2 nm,数值孔径为0.1,放大倍数为10。光学设计得到中心视场空间分辨力达0.3 μm,±1 mm视场内分辨力约0.4 μm的结果。分析了Schwarzschild成像系统的物镜装配、系统装调及光学元件加工误差对像质的影响,结果显示光学元件局部面形误差是影响系统成像分辨力的主要因素。通过提高系统装调的精度,可以有效补偿像距误差、两镜间距误差及曲率半径误差对像质的影响。综合考虑实际加工和装调能力,制定了系统整体公差方案,考虑公差后光学系统能够在±1 mm视场内获得3 μm的空间分辨力,达到了等离子体诊断的要求。     

基于评价函数的极紫外多层膜反射式起偏器和检偏器设计

 基于三种不同评价函数,利用全局优化算法设计了极紫外波段高性能反射式多层膜偏振元件。通过比对不同评价函数的设计结果,分析了评价函数、工作角度及膜层数对反射式多层膜偏振片性能的影响,确定了极紫外多层膜反射式偏振片设计的角度选择、膜层数选择及评价函数选择标准。为解决传统的单一性能优化造成的偏振度损失的问题,构造了偏振比对数结合反射率的评价函数,该方法设计的偏振元件性能优于传统优化方法设计的结果。     

磁控溅射制备横向梯度分布的Mo/Si周期多层膜

 采用磁控溅射方法在Si基板上镀制了横向梯度分布的Mo/Si周期多层膜。以X射线掠入射反射测量了横向梯度多层膜的膜系结构,在基板65 mm长度范围内,多层膜周期从8.21 nm线性减小到6.57 nm,周期梯度为0.03 nm/mm。国家同步辐射实验室反射率计的反射率测试结果表明：该横向梯度分布周期多层膜上不同位置,能反射在13.3~15.9 nm波段范围内不同波长的极紫外光,反射率为60%~65%。     

Nd：YAG固体脉冲激光器实验研究

介绍了Nd：YAG固体脉冲激光器相关的实验项目：静态和调Q状态的出光阈值、激光脉宽、倍频和激光光束形状等.采用普通相纸、红外相纸和激光能量计检测出不同的激光器静态和调Q出光阈值;采用散射、反射和透射方法研究了静态和调Q输出激光脉冲的宽度,发现用K9玻璃和多层膜镜测试的激光脉冲宽度比散射方法的大;采用激光能量计测试激光器静态和调Q的倍频效率和倍频激光能量与倍频晶体的位置关系;激光光束探测器表征激光器静态和调Q输出光的光斑形状.通过这些实验项目,学生将深入了解和掌握固体脉冲激光器的工作原理、性能参数,以及表征激光器性能参数的仪器设备,并深入地研究解决实验发现的问题,为今后激光相关领域的工作奠定坚实的基础.     

亚飞秒啁啾Mo/Si多层膜反射镜的设计、制作与性能检测

针对利用高次谐波获取亚飞秒脉冲的实验需求,设计制备了啁啾为－2 800 as2的啁啾Mo/Si多层膜反射镜.数值计算表明,采用所设计的啁啾多层膜反射镜可以获得86 as的脉冲.通过直流磁控溅射方法实现了Mo/Si多层膜样品的制备.在合肥同步辐射上进行了多层膜反射率的测量,在所设计的工作波长内,多层膜的平均反射率为5.6±2.3%.在考虑最上层Si的氧化作用后,对测量曲线进行拟合,得到的反射率曲线和膜层厚度分布分别与测试曲线和设计结果相吻合.     

Fault tolerant synchronization of chaotic systems based on T-S fuzzy model with fuzzy sampled-data controller

In this paper the fault tolerant synchronization of two chaotic systems based on fuzzy model and sample data is investigated. The problem of fault tolerant synchronization is formulated to study the global asymptotical stability of the error system with the fuzzy sampled-data controller which contains a state feedback controller and a fault compensator. The synchronization can be achieved no matter whether the fault occurs or not. To investigate the stability of the error system and facilitate the design of the fuzzy sampled-data controller, a Takagi--Sugeno (T--S) fuzzy model is employed to represent the chaotic system dynamics. To acquire the good performance and produce less conservative analysis result, a new parameter-dependent Lyapunov--Krasovksii functional and a relaxed stabilization technique are considered. The stability conditions based on linear matrix inequality are obtained to achieve the fault tolerant synchronization of the chaotic systems. Finally, a numerical simulation is shown to verify the results.     

Intensities and spectral features of the ~4I_(13/2)-~4I_(15/2) potential laser transition of Er~(3+) centers in CaF_2-CeF_3 disordered crystal

A CaF_2-CeF_3 disordered crystal containing 1.06% of Er~(3+) ions was grown by the temperature gradient technique.Optical absorption and emission spectra recorded at room temperature and at 10 K, luminescence decay curve recorded at room temperature, and extended x-ray-absorption fine structure spectra were analyzed with an intention to assess the laser potential related to the ~4I_(13/2)→~4I_(15/2) transition of Er~(3+). In addition, the thermal diffusivity of the crystal was measured at room temperature. The analysis of room-temperature spectra revealed that the ~4I_(13/2) emission is long-lived with a radiative lifetime value of 5.5 ms, peak emission cross section of 0.73 × 10~(-20) cm~2, and large spectral width pointing at the tunability of the emission wavelength in the region stretching from approximately 1480 nm to 1630 nm. The energies of the crystal field components for the ground and excited multiplets determined from low-temperature absorption and emission spectra made it possible to predict successfully the spectral position and shape of the room-temperature ~4I_(13/2)→~4I_(15/2) emission band. Based on the correlation of the optical spectra and dynamics of the luminescence decay, it was concluded that in contrast to Yb~(3+) ions in heavily doped CaF_2 erbium ions in the CaF_2-CeF_3 crystal reside in numerous sites with dissimilar relaxation rates.     

极紫外与X射线波段正入射两镜反射系统的研究

基于三级象差理论,分析了几何象差对正入射望远镜性能的影响,总结了弥散斑角宽度θ随着系统f数和半视场角uP的变化趋势.弥散斑的角宽度θ随着半视场角uP的增大而增大,随着系统f数的增大而减小.当f数小于10或者半视场角uP大于0.005弧度时,弥散斑角宽度θ变化比较剧烈.详细讨论了四种典型的反射系统,Dall-Kirkham系统和反Dall-Kirkham系统的弥散斑角宽尺寸在一个数量级上,大约为卡塞格林系统的十倍.R-C系统的弥散斑角宽最小,几乎是卡塞格林系统的十分之一.通过本文的结论公式可以估算一个光学系统的象差尺寸并避免进行光线追迹.     

小波变换表征多层膜氧化层、界面层和膜厚漂移

用小波变换的方法分析了纳米多层膜的X射线掠入射反射率测试曲线.从小波变换的自相关函数峰位和峰强度信息中得到了常规曲线拟合方法难以表征的含有氧化层、界面层或厚度漂移的多层膜结构,利用其作为多层膜的初始结构再进行常规的曲线拟合,可实现多层膜结构精确表征的目的.研究成功地鉴别出钒单层膜的表面存在约3 nm厚的氧化层,分析得到Mo/Si多层膜的界面纯粗糙度约0.42 nm,表明在Ni/C多层膜中接近表面和基底的膜层存在大于5%的厚度漂移.