单晶硅化学机械抛光划痕演变研究

化学机械抛光法是制作超光滑单晶硅镜片的常用工艺,抛光过程中的各类杂质粒子经常会导致加工表面产生划痕,降低镜片的表面质量。为系统研究不同晶向单晶硅表面塑性划痕与抛光液中杂质的关系,设计了金刚石微粉掺杂抛光Si(111)、Si(110)和Si(100)晶面的实验。利用轮廓仪测量了不同晶向、不同掺杂浓度下的划痕形貌,并通过计算载荷归一化后的划痕宽度分布、划痕深度分布、粗糙度和二维功率谱密度来评估划痕形貌。结果显示,抛光液中杂质粒子粒径、硅片表面的划痕宽度均服从正态分布。随着杂质粒子浓度的增加,划痕形貌从非周期性特征转变为周期性波动,粗糙度出现突跃点。此外,在同浓度金刚石微粉掺杂情况下,Si(110)面在划痕产生初期有更好的杂质粒子容忍度。     

4.75 keV能点四通道Kirkpatrick-Baez显微镜

基于CH柱形靶压缩实验的时间分幅诊断需求,研制了4.75 keV能点四通道Kirkpatrick-Baez(KB)显微镜。进行了四通道KB系统的光学设计、像质模拟和分析。采用支撑锥芯的方式解决了四通道KB物镜的集成装配问题,并通过4.75 keV+8 keV双能点多层膜完成了实验室内的KB系统装调。该套系统在神光Ⅱ装置成功进行了像质考核实验,获得了高分辨的四象限网格图像,成像间距符合设计要求,具备了开展时间分幅惯性约束聚变物理实验的条件。     

2.5 keV能点多层膜KB显微镜成像性能

研究了Kirkpatrick-Baez（KB）显微镜成像系统的结构设计、元件制备。通过分析掠入射角、放大倍数和反射镜曲率半径对成像系统调制传递函数（MTF）的影响,确定了KB显微镜系统的初始结构参数,实现了2.5 keV能点多层膜KB显微镜的设计、制备以及装调,在神光Ⅱ强激光装置上完成了像质标定实验。结果表明:2.5 keV能点多层膜KB显微镜在100 m视场内观测周期为20 m平面调制靶时的MTF高于0.6,与OMEGA装置同类型KB系统的空间分辨能力相当,明显优于现有的针孔相机和点投影成像技术。该显微镜与条纹相机配合,已成功实现对短扰动波长平面调制靶烧蚀演化行为的动态诊断。     

基于等效层法分析对称性倍频分束镜的半波孔

半波孔问题严重影响了倍频分束镜在高功率激光系统中的应用。为研究半波孔的产生机理,分别模拟了由高、低折射率膜层厚度失配和膜料色散失配引起的1/4波长对称规整膜系的半波孔。基于等效层理论,在Matlab平台上计算膜系的等效折射率E,绘出其对应的反射率极值包络曲线。通过研究对称膜系的等效折射率、反射率光谱和反射率包络之间的关系,从原理上分析了半波孔的大小、位置和变化趋势等特点。结果表明,膜层的厚度失配使对称膜系的等效折射率在光谱半波处产生截止带。膜层数越多,膜层厚度和膜料色散的失配越严重,则倍频分束镜的半波孔越深。     

Optimization of geometrical design of nested conical Wolter-I X-ray telescope

Optical design of nested conical Wolter I X-ray telescope covering energy band from 1 to 30 keV is investigated systematically. Recurrence relation of the nested structure is deduced, and the impact of the initial parameters on the performance is analyzed. Due to the need for hard X-ray astronomical observations in China, the initial structure is presented, for which six groups of W/B4C aperiodic multilayer coatings between the innermost and the outermost shell of the mirror are designed. The effective area, resolution, and field of view are calculated in the simulation. The results show that the effective area can achieve 71 cm2 and the field of view can achieve 13 at 30 keV. The resolution is estimated to be ～10 in half-power diameter.     

Output regulation for linear multi-agent systems with unmeasurable nodes

The output regulation of linear multi-agent systems with partial unmeasurable agents is investigated in this paper. All the agents except the exosystem can be classified into two groups. Agents in the first group can be measured by themselves and their neighbors. State variables are not fully accessible for direct communication and full order Luenberger observers are constructed for the unmeasurable agents. We give a state feedback control law to solve the output regulation problem under the communication topologies based on both measurable and unmeasurable agents. The heterogeneous agents’ synchronization problem is a general case of our results. Finally, examples are utilized to show the effectiveness of the obtained results.     

New synchronization analysis for complex networks with variable delays

This paper deals with the issue of synchronization of delayed complex networks. Differing from previous results,the delay interval [0,d(t)] is divided into some variable subintervals by employing a new method of weighting delays. Thus,new synchronization criteria for complex networks with time-varying delays are derived by applying this weighting-delay method and introducing some free weighting matrices. The obtained results have proved to be less conservative than previous results. The sufficient conditions of asymptotical synchronization are derived in the form of linear matrix inequality,which are easy to verify. Finally,several simulation examples are provided to show the effectiveness of the proposed results.     

一维光子晶体的双通道位置设计及调整

通过对法布里-珀罗滤光片性质的研究,以及对法布里-珀罗滤光片中缺陷层厚度变化对通道数目、位置影响的分析,为双通道一维光子晶体的设计提出了一条新的思路。在法布里-珀罗结构的基础上引入一维光子晶体的双对称结构,并通过改变双对称结构的三个缺陷层厚度来实现对禁带内两个通道系列位置的独立调整。设计过程中采用有效界面法对通道的位置进行初步的计算,并通过计算机理论模拟对膜层进行修正,使通道的位置满足设计要求。设计结果表明,通过调整两个厚度参量可以克服双通道一维光子晶体中的通道干涉现象,从而实现通道位置的独立调整。     

Influence of Small-Size Contaminations on Thin Film Structural Properties

An approach for studying the influence of nano-particles on the structural properties of deposited thin films is proposed. It is based on the molecular dynamic modeling of the deposition process in the presence of contaminating nano-particles. The nano-particle is assumed to be immobile and its interaction with film atoms is described by a spherically symmetric potential. The approach is applied to the investigation of properties of silicon dioxide films. Visualization tools are used to investigate the porosity associated with nano-particles. The structure of the film near the nano-particle is studied using the radial distribution function. It is found that fluctuations of film density near the nano-particles are essentially different in the cases of low-energy and high-energy deposition processes.     

亚飞秒啁啾Mo/Si多层膜反射镜的设计、制作与性能检测

针对利用高次谐波获取亚飞秒脉冲的实验需求,设计制备了啁啾为-2 800 as2的啁啾Mo/Si多层膜反射镜.数值计算表明,采用所设计的啁啾多层膜反射镜可以获得86 as的脉冲.通过直流磁控溅射方法实现了Mo/Si多层膜样品的制备.在合肥同步辐射上进行了多层膜反射率的测量,在所设计的工作波长内,多层膜的平均反射率为5.6±2.3%.在考虑最上层Si的氧化作用后,对测量曲线进行拟合,得到的反射率曲线和膜层厚度分布分别与测试曲线和设计结果相吻合.