Wet thermal annealing effect on TaN/HfO2/Ge metal-oxide-semiconductor capacitors with and without a GeO2 passivation layer

Wet thermal annealing effects on the properties of TaN/HfO2/Ge metal-oxide-semiconductor(MOS) structures with and without a GeO2 passivation layer are investigated.The physical and the electrical properties are characterized by X-ray photoemission spectroscopy,high-resolution transmission electron microscopy,capacitance-voltage(C-V) and current-voltage characteristics.It is demonstrated that wet thermal annealing at relatively higher temperature such as 550℃ can lead to Ge incorporation in HfO2 and the partial crystallization of HfO2,which should be responsible for the serious degradation of the electrical characteristics of the TaN/HfO2/Ge MOS capacitors.However,wet thermal annealing at 400℃ can decrease the GeO x interlayer thickness at the HfO2/Ge interface,resulting in a significant reduction of the interface states and a smaller effective oxide thickness,along with the introduction of a positive charge in the dielectrics due to the hydrolyzable property of GeO x in the wet ambient.The pre-growth of a thin GeO2 passivation layer can effectively suppress the interface states and improve the C-V characteristics for the as-prepared HfO2 gated Ge MOS capacitors,but it also dissembles the benefits of wet thermal annealing to a certain extent.     

高绒度掺硼氧化锌透明导电薄膜用作非晶硅太阳电池前电极的研究

将自行研制的具有优异陷光能力的掺硼氧化锌用作p-i-n型非晶硅太阳电池的前电极,并且将传统商业用U型掺氟二氧化锡作为对比电极.相比表面较为平滑的掺氟二氧化锡,掺硼氧化锌表面大类金字塔的绒面结构会在本征层生长过程中触发阴影效应,形成大量的高缺陷材料区和漏电沟道,进而恶化电池的开路电压和填充因子.在不修饰掺硼氧化锌表面形貌的情况下,通过调节非晶硅本征层的沉积温度来消弱高绒度表面形貌引起的这种不利影响,对应的电池开路电压和填充因子均出现提升.在仅有铝背电极的情况下,在本征层厚度为200 nm的情况下,以掺硼氧化锌为前电极的非晶硅太阳电池转换效率达7.34%(开路电压为0.9 V,填充因子为70.1%,短路电流密度11.7 mA/cm2).     

In_2O_3:Sn中间层改善B掺杂ZnO薄膜的性能及其应用研究

金属有机化学气相沉积(MOCVD)法生长的掺硼氧化锌(BZO)薄膜,具有天然的"类金字塔"绒面结构,作为硅基薄膜太阳电池的前电极具有良好的陷光效果.但直接获得的BZO薄膜表面形貌过于尖锐,影响后续硅基薄膜材料生长质量及太阳电池的光电转换效率.本文设计了以一层超薄In2O3:Sn(ITO)薄膜(～4 nm厚度)作为中间层的多层膜,并通过对顶层BZO薄膜的厚度调制,改善BZO薄膜的表面特性,薄膜结构为:glass/底层BZO/ITO/顶层BZO.合适厚度的顶层BZO薄膜有助于获得类似"菜花状"形貌特征,尖锐的表面趋于"柔和",而较厚的顶层BZO薄膜仍然保持"类金字塔状"结构."柔和"的BZO薄膜表面结构有助于提高后续生长薄膜电池的结晶质量.将获得的新型"三明治"结构多层膜应用于p-i-n型氢化微晶硅(μc-Si:H)薄膜太阳电池,相比传统的BZO薄膜,电池的量子效率QE在500—800 nm波长范围提高了～10%,并且电池的Jsc和Voc均有所提高.     

油基钻井液条件下油层的NMR判识方法

油基钻井液具有润滑性好、抑制性强等特点,有利于井壁稳定和油气层保护,在非常规油气水平井及深井、超深井中广泛使用．但是,油基钻井液具有较强的荧光背景和全烃基值,岩屑难以洗出本色,地层油与钻井液的基础油融合,给油层的识别和评价带来了严重影响．为此,创新采用高分辨率低场核磁共振技术随钻监测钻井液含油率及含油性的变化．室内实验结果表明,油基钻井液不同于混油钻井液,后者属于水包油体系,钻遇油层后,在钻井液T₂谱上出现新峰;而前者属于油包水体系,钻遇油层后,在钻井液T₂谱上不出现新峰,但可通过含油性的变化识别重质油层,通过含油率的变化识别轻-中质油层,并在S903H井全油基钻井液及极端的地质条件下取得了较好的应用效果,证明了钻井液核磁共振是油基钻井液条件下一项有效的油层识别技术．     

Thickness dependent manipulation of uniaxial magnetic anisotropy in Fe-thin films by oblique deposition

The uniaxial magnetic anisotropy of obliquely deposited Fe(001)/Pd film on MgO(001) substrate is investigated as a function of deposition angle and film thickness. The values of incidence angle of Fe flux relative to surface normal of the substrate are 0°, 45°, 55°, and 70°, respectively. In-situ low energy electron diffraction is employed to investigate the surface structures of the samples. The Fe film thicknesses are determined to be 50 ML, 45 ML, 32 ML, and 24 ML(1 ML = 0.14 nm) by performing x-ray reflectivity on the grown samples, respectively. The normalized remanent magnetic saturation ratio and coercivity are obtained by the longitudinal surface magneto-optical Kerr effect. Here, the magnetic anisotropy constants are quantitatively determined by fitting the anisotropic magnetoresistance curves under different fields.These measurements show four-fold cubic anisotropy in a large Fe film thickness(50 ML) sample, but highly in-plane uniaxial magnetic anisotropies in thin films(24 ML and 32 ML) samples. In the obliquely deposited Fe films, the coercive fields and the uniaxial magnetic anisotropies(UMAs) increase as the deposition angle becomes more and more tilted. In addition, the UMA decreases with the increase of the Fe film thickness. Our work provides the possibility of manipulating uniaxial magnetic anisotropy, and paves the way to inducing UMA by oblique deposition with smaller film thickness.     

Fabrication and Mossbauer Study of FeCo Alloy Nanotube Array

Arrays of FeCo nanotubes are fabricated in the pores of porous anodic aluminium oxide templates. Transmission electron microscopic result shows that the nanotubes are regular and uniform. Magnetic hysteresis loops measured at room temperature are different from those of nanowires with the same composition, which are caused by the unique shape of nanotubes. The M6ssbauer spectra show that the hyperfine field is smaller than that of the bulk＇s and increases with decrease of measuring temperature. However, the areas of the doublets appeared in M6ssbauer spectra decrease with decrease of measuring temperature.     

空芯光波导在光谱气敏检测中的应用

空芯光波导(HWG)用于光谱气体检测中,既可以实现光路的传输,又可以充当气体样品池实现长光程高灵敏度测量,具有体积小,响应时间快、成本低、光路稳定灵活等优点。介绍了基于镀银/碘化银的空芯光波导(Ag/AgI-HWG)、光子带隙空芯光波导(PBG-HWG)和基片集成空芯光波导(iHWG)等类型的空芯光波导,并总结了近年来空芯光波导在光谱气敏检测中的研究及进展,梳理了其应用方式及应用领域。研究表明,空芯光波导替代传统的气体池与傅里叶变换红外光谱(FTIR)、激光吸收光谱和拉曼光谱等不同的光谱技术结合已取得一系列成果,且已经应用于环境监测、呼气诊断和工业过程检测和控制等领域。其中,基于中红外激光吸收光谱的空芯光波导传感器组成相对简单,成本较低,与各类光波导的兼容性和环境适应性较强,发展前景较好。总之,随着激光技术、光波导技术和光谱技术的发展,基于空芯光波导的光谱气体检测正在迅速发展,并逐步由实验室走向现场应用。