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11.
Formation of the intermediate semiconductor larger for the Ohmic contact to silicon carbide using Germanium implantation 下载免费PDF全文
By formation of an intermediate semiconductor layer (ISL) with a
narrow band gap at the metallic contact/SiC interface, this paper
realises a new method to fabricate the low-resistance Ohmic contacts
for SiC. An array of transfer length method (TLM) test patterns is
formed on N-wells created by P+ ion implantation into
Si-faced p-type 4H-SiC epilayer. The ISL of nickel-metal Ohmic
contacts to n-type 4H-SiC could be formed by using Germanium ion
implantation into SiC. The specific contact resistance ρc as low as 4.23× 10-5~Ωega \cdotcm2 is
achieved after annealing in N2 at 800~°C for 3~min,
which is much lower than that (>900~°C) in the typical SiC
metallisation process. The sheet resistance Rsh of the
implanted layers is 1.5~kΩega /\Box. The technique for
converting photoresist into nanocrystalline graphite is used to
protect the SiC surface in the annealing after Ge+ ion
implantations. 相似文献
12.
Theoretical investigation of incomplete ionization of dopants in uniform and ion-implanted 4H-SiC MESFETs 下载免费PDF全文
The effects of incomplete ionization of nitrogen in 4H-SiC have
been investigated. Poisson's equation is numerically analysed by
considering the effects of Poole--Frenkel, and the effects of
the potential on $N^+_\dd$ (the concentration of ionized donors)
and $n$ (the concentration of electrons). The pinch-off voltages
of the uniform and the ion-implanted channels of 4H-SiC
metal-semiconductor field-effect transistors (MESFETs) and
the capacitance of the gate are given at different temperatures.
Both the Poole--Frenkel effect and the potential have influence on
the pinch-off voltage $V_{\rm p}$ of 4H-SiC MESFETs. Although the
$C$-$V$ characteristics of the ion-implanted and the uniform channel of
4H-SiC MESFETs have a clear distinction, the effects of incomplete
ionization on the $C$-$V$ characteristics are not significant. 相似文献
13.
结合了“栅极工程”和“应变工程”二者的优点, 异质多晶SiGe栅应变Si MOSFET, 通过沿沟道方向使用不同功函数的多晶SiGe材料, 在应变的基础上进一步提高了MOSFET的性能. 本文结合其结构模型, 以应变Si NMOSFET为例, 建立了强反型时的准二维表面势模型, 并进一步获得了其阈值电压模型以及沟道电流的物理模型. 应用MATLAB对该器件模型进行了分析, 讨论了异质多晶SiGe栅功函数及栅长度、衬底SiGe中Ge组分等参数对器件阈值电压、沟道电流的影响, 获得了最优化的异质栅结构. 模型所得结果与仿真结果及相关文献给出的结论一致, 证明了该模型的正确性. 该研究为异质多晶SiGe栅应变Si MOSFET的设计制造提供了有价值的参考.
关键词:
异质多晶SiGe栅
应变Si NMOSFET
表面势
沟道电流 相似文献
14.
Epitaxial channel metal-oxide semiconductor field-effect
transistors (MOSFETs) have been proposed as one possible way to
avoid the problem of low inversion layers in traditional MOSFETs.
This paper presents an equation of maximum depletion width modified
which is more accurate than the original equation. A 4H--SiC epitaxial
n-channel MOSFET using two-dimensional simulator ISE is simulated.
Optimized structure would be realized based on the simulated results
for increasing channel mobility. 相似文献
15.
Effect of Carbonized Conditions on Residual Strain and Crystallinity Quality of Heteroepitaxial Growth 3C-SiC Films 下载免费PDF全文
Heteroepitaxial growth of SiC on n-Si(111) substrates is performed by a low pressure chemicaJ vapor deposition process. The effects of different carbonized temperature and carbonized time on the crystalline quality and the residual strain of 3C-SiC films are discussed. The results show that the residual strain is obviously reduced and the crystalline quality is greatly improved at the best carbonized temperature of 1000℃ and the carbonized time of 5 min. Under these optimized carbonization conditions, thick epitaxial films of about 15 μm with good crystalline quality and low residual strain can be obtained. 相似文献
16.
17.
5-amino-l,10-phenanthroline (5-AP), as a tautomeric heterocyclic aromatic chelating fluorophore (THACF), can sense Zn^2+ selectively by shifting emission from 495 to 564 nm upon Zn^2+ addition in ethanol. The ratiometric fluorescent sensing behavior has been correlated to the tautomerization of 5-AP affected by solvents and metal chelation. The strategy using THACF as ratiometric fluorescent sensor for Zn^2+ not only simplifies the synthetic procedure but also gives a promising alternative for Zn^2+ ratiometric fluorescent sensor design. 相似文献
18.
Comparison of the formation epitaxial graphenes on Si- and process and properties of C-face 6H-SiC substrates 下载免费PDF全文
In this paper,the epitaxial graphene layers grown on Si-and C-face 6H-SiC substrates are investigated under a low pressure of 400 Pa at 1600 C.By using atomic force microscopy and Raman spectroscopy,we find that there are distinct differences in the formation and the properties between the epitaxial graphene layers grown on the Si-face and the C-face substrates,including the hydrogen etching process,the stacking type,and the number of layers.Hopefully,our results will be useful for improving the quality of the epitaxial graphene on SiC substrate. 相似文献
19.
20.
将随机游走法和等效电路压缩相结合,对静态P/G网(Power and Ground Networks)进行分析.针对一个大规模的电路,在经过多层的参数提取和建模后,得到静态P/G网模型.首先根据网络的规律性,运用等效电路压缩法将原始的P/G网进行压缩处理,然后运用随机游走法求解,最后利用计算得到的化简网络电压值,通过相关的插值公式得到原网络的电压值.实验数据表明,改进的压缩式随机游走法可有效简化网络的复杂性,节省计算时间,计算速度提高到普通随机游走法的两个数量级以上. 相似文献