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Structural and electrical properties of reactive magnetron sputtered yttrium-doped HfO_2 films 下载免费PDF全文
Hafnium oxide thin films doped with different concentrations of yttrium are prepared on Si(100) substrates at room temperature using a reactive magnetron sputtering system.The effects of Y content on the bonding structure,crystallographic structure,and electrical properties of Y-doped HfO_2 films are investigated.The x-ray photoelectron spectrum(XPS) indicates that the core level peak positions of Hf 4 f and O 1 s shift toward lower energy due to the structure change after Y doping.The depth profiling of XPS shows that the surface of the film is completely oxidized while the oxygen deficiency emerges after the stripping depths have increased.The x-ray diffraction and high resolution transmission electron microscopy(HRTEM) analyses reveal the evolution from monoclinic HfO_2 phase towards stabilized cubic HfO_2 phase and the preferred orientation of(111) appears with increasing Y content,while pure HfO_2 shows the monoclinic phase only.The leakage current and permittivity are determined as a function of the Y content.The best combination of low leakage current of 10-7 A/cm~2 at 1 V and a highest permittivity value of 29 is achieved when the doping ratio of Y increases to 9 mol%.A correlation among Y content,phase evolution and electrical properties of Y-doped HfO_2 ultra-thin film is investigated. 相似文献
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利用全氢聚硅氮烷(PHPS)转化制备的氧化硅材料在存储芯片、柔性显示封装等领域展现出较高的应用价值. 本工作系统研究了PHPS在高温加热条件下的氧化硅形成过程, 考察了转化过程中化学组成和微观结构对体积收缩、折射率和力学性能的影响. 研究结果表明: 转化温度低于180 ℃时, PHPS的转化以Si—H和Si—N的水解缩合反应为主, 转化程度较低, 形成的是氧化硅为分散相、PHPS为连续相的海岛结构; 转化温度在180~300 ℃区间内, 转化以氧化反应为主, 氧化硅相逐渐生长, 形成双连续的相结构, 且在温度高于200 ℃时发生相反转, 氧化硅相成为连续相. 转化温度在300~600 ℃区间时, 氧化硅网络骨架基本形成, 在高温的作用下进一步致密化. PHPS转化样品的体积收缩、折光指数和力学性能与其转化程度和相分布有关. 相似文献
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不同类型的CO32-替换羟基磷灰石固溶体晶体化学FT-IR研究 总被引:13,自引:0,他引:13
利用FT-IR结合XRD对不同类型的CO32-替换磷灰石固溶体进行了晶体化学研究,结果表明:B型替换碳羟磷灰石(CHAP)的替换方式是[CO3·OH]四面体替换[PO4]四面体;A型替换CHAP的替换方式是[CO3]三角形配位体替换通道位置的OH-;AB混合型替换CHAP的FT-IR谱中非对称伸缩振动ν3分裂为ν3-1、ν3F、ν3-4,高斯函数法拟合表明ν3F峰是A型替换的ν3-2与B型替换的ν3-3的叠合。当WCO32-≦3.34%时,随CO32-含量增加,A型替换量增大,替换指数(SI)增大,且当WCO32-=3.34%时,SI达最大值,当3.34%CO32-≦7.52%时,随CO32-含量增加,SI减小,B型替换量增大,且当WCO32-=7.52%时总固溶量饱和。 相似文献
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