Temperature Effects of Piezoresistance Coefficient

A higher sensitivity is achieved by making use of a high electron mobility transistor （HEMT） as the piezoresistive device. The temperature dependence on the electromechanical coupling effect of accelerometers is reported. The current in the structure of our study decreases at the rate of 3.15 mA/℃ with the temperature going up at every region, and piezoresistance coefficient decreases because of the shift of energy and expansion of lattice.     

低频高灵敏度中性浮力式MEMS矢量水听器

由中北大学研制的微机电系统(MEMS)矢量水听器具有小型化、低频性能好、灵敏度高、指向性好、价格低等特点,但目前该水听器对该低频水声信号的低频探测能力不够,所以进一步提高其灵敏度对水听器的未来的发展至关重要。在声学研究的基础上,提出了中性浮力微结构并确定其参数,该结构加大了外力的有效作用面积,从而提高水听器的灵敏度,采用ANSYS有限元对水听器性能进行仿真,为了验证其可靠性,在驻波场测试水听器的性能。结果表明,该水听器的灵敏度-175dB,频响范围为20~500 Hz,满足对远距离船舶辐射噪声的探测要求,灵敏度响应曲线的起伏在±1.5dB以内,具有良好的"8"字型指向性,凹点深度为48.8dB。     

MEMS仿生矢量水听器微结构的有限元分析

结合压电原理和仿生学理论,利用MEMS工艺制作的仿生矢量水听器,具有高灵敏度、宽频带、矢量性及高信噪比等特点。为了进一步提高水听器预测水下环境中声学特性的准确性并提高其固有频率,利用有限元方法对MEMS水听器仿生微结构进行优化分析。首先,对仿生微结构固有频率和灵敏度与其结构尺寸关系作了理论分析并画出不同微结构尺寸下的固有频率和最大应力曲线。其次,运用ANSYS软件对仿生微结构进行有限元仿真并画出固有频率和最大应力响应曲线。对比分析理论与仿真结果,得出当悬臂梁长、宽、厚及仿生纤毛的高度和半径分别为400, 80, 50, 1000和80 m 时,MEMS矢量水听器的性能得到最优化,同时对理论与仿真结果的差异进行了分析。     

平面环形谐振腔微光学陀螺结构设计与优化

提出具有高群有效折射率的双环级联作为核心元件的谐振式平面光波导陀螺结构, 基于光学Sagnac原理得到了双微环耦合谐振式光学陀螺理论灵敏度与群有效折射率的一般表达式和双环与单环陀螺系统的灵敏度关系, 并由耦合模理论方法得到了双环系统耦合器的两个透射系数对应的群有效折射率变化情况. 在环腔半径R₁=R₂=100 μm、环腔传输损耗系数t₁=t₂=0.95的情况下, 针对环与环之间耦合器和环与波导之间耦合器透射系数对群有效折射率的不同影响, 得到了最大群有效折射率的产生条件. 采用文中参数(R=100 μm, t=0.95)计算的单环谐振式陀螺灵敏度为(10⁴-10⁵)°/h, 而双环级联谐振系统理论灵敏度能够达到10 °/h. 该研究对微环耦合谐振腔在角速度检测上的应用有重要的意义.     

电容式微超声波换能器的设计与电容值测试*

本文设计的微电容超声波换能器(CMUT)是由电容阵列组成的超声波传感器,主要是利用电容的改变来实现能量的转换。是基于硅硅键合技术的MEMS电容式超声传感器,制作的传感器误差小,并且工艺流程简单且能进行量产。在利用E4990A阻抗分析仪对传感器进行C—V测试分析而得出其电容的实际值与理论值的误差仅为1.6%。并且利用该仪器测试传感器电容在工作电压下随频率的变化,得出其在工作电压下,频率为400K的时候电容值为617.67PF,为对传感器进行理论计算提供了重要支撑,并且为后续转换电路的设计提供了数据支撑。     

Refocusing and locating effect of fluorescence scattering field

Optical imaging deep inside scattering medium has always been one of the challenges in the field of bioimaging, which significantly drawbacks the employment of con-focal microscopy system. Although a variety of feedback techniques, such as acoustic or nonlinear fluorescence-based schemes have realized the refocusing of the coherent light, the problems of non-invasively refocusing and locating of linearly-excited fluorescent beads inside the scattering medium have not been thoroughly explored. In this paper, we linearly excited the fluorescent beads inside a scattering medium by using our homemade optical con-focal system, collected the fluorescence scattering light as the optimized target, and established a theoretical model of target contrast enhancement, which is consistent with the experimental data. By improving both the cost function and variation rate within the genetic algorithm, we could refocus the fluorescence scattering field while improving the contrast enhancement factor to 12.8 dB. Then, the positions of the fluorescent beads are reconstructed by sub-pixel accuracy centroid localization algorithm, and the corresponding error is no more than 4.2 μ with several fluorescent beads within the field of view. Finally, the main factors such as the number of fluorescent beads, the thickness of the scattering medium, the modulating parameter, the experimental noise and the system long-term stability are analyzed and discussed in detail. This study proves the feasibility of reconstructing fluorescent labeled cells inside biological tissues, which provides certain reference value for deep imaging of biological tissues.     

模平方小波阈值在MEMS陀螺信号降噪中的应用

在深入分析现有软阈值和硬阈值小波去噪方法的基础上,综合二者的优点,提出一种模平方小波阈值去噪方法,并将其应用到MEMS陀螺仪输出信号的滤波处理中,从而有效地减小了信号中的高频噪声,提高了信噪比,抑制了MEMS陀螺仪的随机漂移.文中详细介绍了该方法的原理与实现过程,并结合某项目研究中MEMS惯性测量系统的实地跑车实验,对其中MEMS陀螺仪的实测数据进行了分析研究,肯定了使用该方法对MEMS陀螺仪输出信号进行滤波消噪处理的可行性和有效性.     

MEMS仿生矢量水听器微结构力学建模及实验验证

MEMS仿生矢量水听器是一种新型水声传感器, 其工作性能决定于内部MEMS声电换能微结构的几何、材料及流体环境参数。为深入探讨该水听器的工作机理并提高其工作性能, 针对其内部微结构通过合理的简化建立了相应的单自由度等效力学模型, 并推导出理想流体环境下该微结构一阶固有频率与其几何、材料及流体环境参数间的解析表达式。在此基础上, 推导出现有水听器微结构的一阶固有频率, 并搭建实验平台进行验证, 实验结果表明理论值与实验值间的相对误差低于5%, 从而验证了该力学模型的有效性, 为水听器的设计及优化提供了理论基础和参考依据, 同时也为具有类似结构的传感器的性能分析奠定了基础。     

Abnormal Visible Luminescence Mechanism of Tb^3＋-Yb^3＋ Codoped SiOu-Al2O3-CaF2 Glass Studied by Time-Resolved Spectra

The upconversion energy transfer mechanism in Tb^3＋-Yb^3＋ co-doped SiO2-Al2O3-CaF2 glass is investigated by time-resolved spectra. The effect of donor ion Yb^3＋ is involved in the dynamic decay behavior of acceptor ion Tb^3＋, which provides direct proof for the energy transfer from Yb^3＋ to Tb^3＋. The pump power dependence curves show that the upconversion luminescence is a two-photon process. The measured decay curves of the 5D4 state （Tb^3＋） contain two parts： a slow decay process corresponding to its radiation, and a fast one with a decay parameter approximately twice the lifetime of the ^2F5/2 state （Yb^3＋ ）. The fast decay process is contradictory to the generally accepted cooperative sensitization upconversion rate equation model. Since the effect of the host environmental is excluded by comparative experiments, we believe that there should be another energy transfer mechanism in Tb^3＋-Yb^3＋ co-doped SiO2-Al2O3-CaF2 glass in addition to the cooperative sensitization process.     

面向电容式微机械超声换能器器件的32通道收发 电路设计与测试*

针对以电容式微机械超声换能器(CMUT)阵列为探头的超声成像系统,设计了一种兼具现场可编程门阵列(FPGA)控制、脉冲驱动以及微弱电流信号检测功能的电路。利用FPGA产生64路控制信号,控制脉冲信号的频率、脉冲个数、占空比等参数;脉冲电路在FPGA以及直流电压的控制下,产生32路脉冲信号;接收电路通过跨阻放大结构实现32路电流信号检测;32通道收发电路利用脉冲产生芯片内自带的T/R开关进行高压隔离。通过搭建测试平台,对收发电路功能及一致性进行测试,并连接CMUT进行自发自收测试。测试结果表明,32通道收发电路具有良好的一致性,电路可以实现基于CMUT阵列的32通道超声信号的发射,检测回波信号,并对CMUT器件的带宽进行测试。电路具有功能完善,结构稳定的优点,为基于CMUT阵列的超声成像系统的应用提供了硬件支持。