The correlation of the energy resolution of incident light with the measured reflectance of multilayers

This paper presents an expression for describing the correlation of the energy resolution of incident light with the measured reflectance of multilayers, and gives a new method for calculating the polychromatic-light reflectance of multilayers. Using this method we give the reflectance spectrum of some multilayers in the case in which the incident light is polychromatic. The theoretical analysis shows that for the multilayers of a given design the peak reflectance of the polychromatic light is smaller than that of the monochromatic light, but no-peak reflectance of the polychromatic light is bigger than that of the monochromatic light. Further, the measured reflectance spectrum will be a line if the energy resolution is less than a decided value. The shorter the design-wavelength of the multilayer, the stronger the effect of the energy resolution on the reflectance.     

入射光单色性与界面粗糙度对多层膜反射性能的不同影响

多层膜界面粗糙度、入射光单色性对软X射线多层膜实际反射率均有影响。利用数学卷积积分,理论上推导出一个在入射光不同单色性下精确计算多层膜反射率的公式。利用给出的理论计算公式,简要分析了入射光不同单色性、不同界面粗糙度对Mo/Si多层膜反射率的影响。理论分析发现这两种因素对Mo/Si多层膜反射率影响完全不同:入射光低的单色性不但极大降低Mo/Si多层膜峰值反射率,而且使反射曲线的半峰全宽增加;而界面粗糙度是降低Mo/Si多层膜反射曲线上各点对应值,基本不改变Mo/Si反射曲线的半峰全宽,不改变反射曲线的形状。说明这两个因素在软X射线的长波段对多层膜反射性能的影响不同。     

基于矩阵理论的螺旋液晶透射光偏振态研究

将螺旋型液品看作是N层双折射材料晶片叠合而成,而每层光轴相对于相邻的晶片有一个小的旋转.本文基于矩阵理论,研究了光在螺旋液晶中传输时偏振态的变化.经过详细的数学推导,理论研究表明.线性偏振光经过螺旋液晶后偏振态会发生改变.当满足一定的条件时,线偏振光的偏振方向旋转90°,左旋圆偏振光经过左旋螺旋液晶后转变为右旋圆偏振光.     

Effect of gas atoms on X-ray optical properties of multilayers

Multilayers always dissolve some gas atoms during sputtering. In this paper, we develop a new method to study the effect of gas atoms on X-ray reflectance of the multilayer. Our theoretical analysis shows that this effect depends not only on the content of gas atom but also on the wavelength and the grazing angle. The shorter the wavelength and the bigger the grazing angle, the stronger this effect of gas atoms. We fabricated Mo/Si multilayers under various sputtering pressures and measured their small angle X-ray diffraction spectra. The measured results coincide with those calculated by our method.     

单晶硅表面金字塔生长过程的实验研究

在普通碱液中添加一种特殊的添加剂,在不同时间下对单晶硅表面进行刻蚀.用扫描电子显微镜观察样品表面形貌,结果显示:单晶硅片放入加入添加剂2 mL的刻蚀液中,经过10 min刻蚀后晶体表面零星出现大小不一的金字塔,并有大面积的平滑区;刻蚀15 min后金字塔大小趋向一致,平滑区面积缩小;刻蚀20 min硅片表面形成平均尺寸...     

金属薄膜厚度小于电子自由程对其光反射率的影响

提出了金属薄膜厚度对薄膜中自由电子的平均自由程影响的物理模型,并给出了薄膜中自由电子的平均自由程的修正公式.理论研究表明:当膜厚小于自由电子的平均自由程时,薄膜中电子平均自由程随膜厚的减小而减小;当膜厚大于或等于自由电子的平均自由程时,薄膜中电子的平均自由程与块状材料一样.利用薄膜中电子平均自由程的计算公式,修正了薄膜...