纯有机染料共敏化纳米晶太阳能电池的性能研究

采用曙红与香豆素混合的方法,配制成敏化剂修饰纳米晶薄膜.实验结果证明,这种共敏化的方法可以在可见光范围内有效提高电池的吸光度,使得电池的性能比单独使用曙红敏化有了大幅度提高.在模拟太阳光下,曙红与香豆素共敏化的电池的开路电压达到了532 mV,短路电流达到了0.1125 mA/cm2.     

A two-dimensional high-frequency electrostatic microscanner

The design of a two-dimensional high-frequency electrostatic microscanner is presented, and an improved method for routing isolation trenches is investigated to increase the reliability and mechanical stability of the resulting device. A sample device is fabricated and tested using an optimized micromachining process. Measurement results indicate that the sample device oscillates at inherent frequencies of 11586 and 2047 Hz around the two rotational axes, thereby generating maximum twisting angles of ±7.28° and ±5.63°, respectively, under two square waves of 40 V. These characteristics confirm the validity of our design and satisfy the requirements of a laser projector with VGA standards.     

一种基于PIN结的硅基微型核电池研究

针对PN结式微型核电池由于衬底掺杂浓度较大而造成的少子寿命短,收集效率低等缺点,提出使用硅基PIN结作为微型核电池的换能结构,构建了PIN换能结构的电学模型,并对其性能影响因素进行了分析和仿真,优化了换能结构参数.完成换能结构加工之后,分别使用⁶³Ni,¹⁴⁷Pm和²⁴¹Am对换能结构进行了辐照实验.实验结果表明,PIN换能结构通过增加耗尽层宽度来增大电子空穴对的收集空间,通过使用保护环来降低漏电流,能够有效提高短路电流和开路电压,最终提升能量转换效率. 关键词： 微型核电池 辐射伏特 微机电系统 PIN结     

一种MEMS周期可调光栅衍射特性的实验研究

介绍了一种周期连续可调的微型可编程光栅.光栅采用静电梳齿驱动,不同驱动电压对应不同周期变化,从而引起特定级次衍射角发生变化.为了测得不同驱动电压下的衍射角变化,搭建了实验测量光学系统,利用激光三角法测量原理及图像处理的方法得出实验结果.测量结果与光栅测量参量计算角度变化基本一致,不同电压下的衍射角变化与不同的周期变化对应良好.     

微型可编程光栅最大闪耀角的理论分析与实验

在微机电系统技术的基础上,采用两层多晶硅表面微加工工艺.设计并加工制作了一种闪耀角可调式的微型可编程光栅.介绍了微型可编程光栅的基本工作原理及结构设汁特点.针对其最主要的一个光学参量--最大闪耀角,根据设汁的光栅结构尺寸进行了理论计算,并利用ANSYS有限元仿真结合Matlab软件的数据处理功能进行了数值模拟.没计并搭建了一个简单易操作的光学实验系统,对最大闪耀角进行了实际测量.结果表明.理论计算、数值模拟以及实际测量的最大闪耀角非常吻合,制作的微型可编程光栅的最大闪耀角超过5°.     

The fabrication of nickel silicide ohmic contacts to n-type 6H-silicon carbide

This paper reports that the nickel silicide ohmic contacts to n-type 6H-SiC have been fabricated. Transfer length method test patterns with NiSi/SiC and NiSi硅化镍;欧姆触点;n型碳化硅;制造;能带;带隙Project supported by the National Basic Research Program of China (Grant No~2002CB311904), the National Defense Basic Research Program of China (Grant No~51327010101) and the National Natural Science Foundation of China (Grant No~60376001).2006-09-192006-10-30This paper reports that the nickel silicide ohmic contacts to n-type 6H-SiC have been fabricated. Transfer length method test patterns with NiSi/SiC and NiSi2/SiC structure axe formed on N-wells created by N^＋ ion implantation into Si-faced p-type 6H-SiC epilayer respectively. NiSi and NiSi2 films are prepared by annealing the Ni and Si films separately deposited. A two-step annealing technology is performed for decreasing of oxidation problems occurred during high temperature processes. The specific contact resistance Pc of NiSi contact to n-type 6H-SiC as low as 1.78× 10^-6Ωcm^2 is achieved after a two-step annealing at 350 ℃for 20 min and 950℃ for 3 min in N2. And 3.84×10-6Ωcm^2 for NiSi2 contact is achieved. The result for sheet resistance Rsh of the N＋ implanted layers is about 1210Ω/□. X-ray diffraction analysis shows the formation of nickel silicide phases at the metal/n-SiC interface after thermal annealing. The surfaces of the nickel silicide after thermal annealing are analysed by scanning electron microscope.     

一种新型微机电系统扫描镜的谐振频率研究

在微光机电系统(MOEMS)技术的基础上,采用绝缘体上硅(SOI)的体硅加工工艺,设计并加工制作了一种新型的静电驱动的谐振式微机电系统(MEMS)扫描镜。介绍了其基本工作原理及结构设计特点;理论计算了圆形和方形两种结构的尺寸扫描镜的谐振频率,并利用ANSYS有限元软件进行仿真;设计并搭建了一个简单易操作的光学测试系统,对研制出的MEMS扫描镜(7.1mm×5.2mm)进行扫描角度测试。利用该器件参数激励的迟滞频率特性,对其谐振频率进行实际测量。同时,为验证其所测谐振频率的准确性,利用激光多普勒测振(LDV)系统对其进行测试。在工作电压10V,方形和圆形扫描镜的驱动频率分别为556Hz和596Hz时,机械扫描角度分别可达到约6°和5°,谐振频率分别约为300Hz和277Hz。并分析误差产生的原因及其结果。     

Two-dimensional microscanner for laser projection

The design of a two-dimensional(2D) microscanner actuated electrostatically is presented,and a silicon-oninsulator(SOI) micromachining process is utilized to fabricate the sample.The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two rotational axes,generating maximum twisting angles of ±10 and ±5.3 under two 10-V square waves,respectively.A monochromatic laser projection system based on Lissajous pattern is demonstrated using the developed microscanner,revealing an image resolution of 168×56 at 20 frames per second.