Copper diffusion in Ti-Si-N layers formed by inductively coupled plasma implantation

Ternary Ti-Si-N refractory barrier films of 15 nm thick was prepared by low frequency, high density, inductively coupled plasma implantation of N into Ti_xSi_y substrate. This leads to the formation of Ti-N and Si-N compounds in the ternary film. Diffusion of copper in the barrier layer after annealing treatment at various temperatures was investigated using time-of-flight secondary ion mass spectrometer (ToF-SIMS) depth profiling, X-ray diffractometer (XRD), field emission scanning electron microscopy (FESEM), energy dispersive X-ray (EDX) and sheet resistance measurement. The current study found that barrier failure did not occur until 650 °C annealing for 30 min. The failure occurs by the diffusion of copper into the Ti-Si-N film to form Cu-Ti and Cu-N compounds. FESEM surface morphology and EDX show that copper compounds were formed on the ridge areas of the Ti-Si-N film. The sheet resistance verifies the diffusion of Cu into the Ti-Si-N film; there is a sudden drop in the resistance with Cu compound formation. This finding provides a simple and effective method of monitoring Cu diffusion in TiN-based diffusion barriers.     

AN IMPROVED SEARCH-EXTENTION METHOD FOR SOLVING SEMILINEAR PDES

This article will combine the finite element method, the interpolated coefftcient finite element method, the eigenfunction expansion method, and the search-extension method to obtain the multiple solutions for semilinear elliptic equations. This strategy not only grently reduces the expensive computation, but also is successfully implemented to obtain multiple solutions for a class of semilinear elliptic boundary value problems with non-odd nonlinearity on some convex or nonconvex domains. Numerical solutions illustrated by their graphics for visualization will show the efficiency of the approach.     

两种群竞争模型的奇摄动群

本文应用多重尺度法构造出非线性微分方程组的解的渐近展开式。并用微分不等式的技巧，证明原问题的解的存在性，且给出解的一致有效渐近估计．     

具有唯一4度最大度点的图的全色数

一个图Ｇ的全色数χ_T（Ｇ）是使得Ｖ（Ｇ）∪Ｅ（Ｇ）中相邻或相关联元素均染不同颜色的最少颜色数．文中证明了，若图Ｇ只有唯一的一个４度最大度点，则χ_T（Ｇ）＝Δ（Ｇ）＋１．     

Surface characterization of fluorinated polymers (PTFE, PVDF, PFA) for use in ultratrace analysis

Surface characterization of new unused PTFE, PFA and PVDF labware has been carried out by light microscopy, scanning electron microscopy, profilometry and atomic force microscopy. It has been found that in spite of higher micro-roughness, PFA exhibits the lowest nano-roughness and hence seems best suited as vessel material for relatively mild pressureless chemical operations for sample preparation of ultrapure substances, as container material for storage of ultrapure liquids, and for transport of such liquids, e.g., from the producer in the chemical to the end user in the microelectronics industry. This suitability refers only to the surface quality of the investigated materials. PTFE-surfaces, due to the sintering process of production, exhibit the most unfavourable surface quality of the investigated fluorinated polymers.     

新型稀土电子输运材料Tb(AcA)3·phen

Kido等人在文献[1]中报导,在研究有机电致发光(OEL)器件时发现,斓系化合物不能很好地传输载流子.但是,我们在实验中却现Tb(AcA)3phen·不仅是一种很好的OEL发射材料.而且具有很强的电子输运能力.     

Eu^2＋：BaFCl光激励发光过程中紫外线的激发与漂白效应

通过改变紫外线的辐射照能量范围，研究了Ｅｕ＾２＋：ＢａＦＣｌ的光激励发光性质。发现紫外线能量大于Ｅｕ＾２＋的最低激发态能量及紫外线的能量小于Ｅｕ＾２＋最低激发态的能量两种情况下，光激励发光具有明显的差异，分析了产生差异的原因，给出了紫外线的辐照能量发生转时所对应的能级位置。     

球上加权Bergman空间上的Schatten类Hankel算子

本文给出了超球上加权Ｂｅｒｇｍａｎ空间上Ｈａｎｋｅｌ算子属于Ｓｃｈａｔｔｅｎｐ－类（２≤ｐ＜＋∞）的一个充要条件，推广了文［１０］中的主要结果。     

低密度聚乙烯光引发交联机理——Ⅱ.BNB自旋捕捉ESR研究

在光引发剂二苯甲酮(BP)存在下,紫外光辐照低密度聚乙烯(LDPE)所形成的自由基中间体已被自旋捕捉剂2,4,6-三特丁基亚硝基苯(BNB)所捕捉,其自旋加合物自由基已为电子自旋共振(ESR)所特征。现已检测和鉴定到二种自旋加合物:一种是叔碳自由基;另一种是仲碳自由基。它们分别是由BP的激发三重态从LDPE链的支化点和亚甲基团上夺氢所形成的自由基中间体同自旋捕捉剂BNB反应生成的。上述的证据表明:LDPE的光引发交联点主要发生在叔碳和仲碳原子上,且H-型交联点占主导地位。     

Molecular deposition film of porphyrin and phthalocyanine bearing oppositely charged substituents

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