光刻机投影物镜的像差原位检测新技术

提出了一种新的光刻机投影物镜像差原位检测(AMF)技术。详细分析了该技术利用特殊测试标记检测投影物镜球差、像散、彗差的基本原理,论述了该技术利用对准位置坐标计算像差引起的成像位置偏移量的方法。实验结果表明AMF技术可实现球差、彗差、像散等像差参量的精确测量。AMF技术考虑了光刻胶等工艺因素对像差引起的成像位置偏移量的影响,有效避免了目前基于硅片曝光方式的彗差原位检测技术对离焦量、像面倾斜等像质参量限制的依赖。     

线电荷串产生的史密斯-帕塞尔辐射

采用积分方法分析了线电荷串,沿周期性理想金属光栅表面平行移动时产生的史密斯帕塞尔辐射。分别对短周期光栅、低能量线电荷串与长周期光栅、高能量线电荷串的辐射情况进行了数值计算。相对单个线电荷而言,N个线电荷与反射光栅作用产生的辐射场密度,在频率是线电荷串调制频率的整数倍处出现最大,辐射谱宽变窄;随电荷能量增高,辐射能量向高频方向移动,并具有强烈的定向性;可以通过调节线电荷调制频率等参量实现辐射电磁波频率锁定。研究结果表明,对高能量与低能量的电荷参量,适当选择光栅尺寸与线电荷串间隔周期,都可使辐射波工作于太赫兹波段。     

气相传输平衡技术制备LiGaO2薄膜

为获得与GaN薄膜晶格失配小的衬底材料,报道了利用气相传输平衡技术(VTE)在(100)-βGa2O3单晶衬底上制备高度[001]取向LiGaO2薄膜的方法。经过X射线衍射分析表明得到的薄膜是由单相LiGaO2组成。利用扫描电镜(SEM)观察表面形貌,发现经气相传输平衡技术处理得到的薄膜表面形貌主要受温度的影响,表面晶粒尺寸随温度上升而增大。而X射线衍射测试表明随着温度上升,所得到的薄膜也从多晶向单晶化转变。在经过退火处理后,通过观察吸收谱发现LiGaO2薄膜中产生色心,并且色心的种类与温度有关。表明可以通过气相传输平衡技术技术,在远低于LiGaO2熔点的温度制备外延GaN用(001)LiGaO2∥(100)β-Ga2O3复合衬底。     

Mechanistic Studies on Propargyl Alcohol-Tethered Alkylidenecyclopropane with Aryldiazonium Salt Initiated by Visible Light

This paper discloses the reaction mechanism of two consecutive but different visible light photo-induced chain processes for the rapid construction of spirobi[indene]skeletons.The first process is triggered by a photo-induced single-electron-transfer(SET)of an electron donor-accepter(EDA)complex.The second process is initiated by a direct SET process between aryldiazonium salt and the excited allenic intermediate.In these two processes,another SET took place respectively on the in situ formed radical intermediate to realize a redox-neutral outcome.The mechanistic studies have been carried out by control experiments,kinetic and spectroscopic analyses,deuterium labeling experiments to support these two chain processes.     

具有聚集诱导发光性质的近红外荧光染料

聚集诱导发光(AIE)现象的发现为解决传统有机荧光分子在高浓度和聚集形态下存在的荧光猝灭问题提供了最佳方案,并实现了在光电器件、化学传感、生物成像和靶向治疗等众多领域的广泛应用.随着对AIE 发光机理研究的不断深入,AIE 分子体系得到了极大的扩展.其中,一类具有给体-受体结构的AIE分子能够显著降低分子能隙,使发光分...     

Investigation on Electronic Structures and Spectra for the Substituted Fullerene C77B-

1 INTRODUCTION After Guo[1] synthesized and detected C60-nBn and C70-nBn by mass spectra, investigations on fullerenes doped by other atoms became more and more interesting. Andreoni[2] studied the impurity states of the doped fullerenes C59B; Dong[3] calculated the structural and electronic properties of C59B; Wang[4] assessed the stability of heterohedral fullerenes C60-xBx. Lamparth[5] prepared C59N and C69N , and put forward the possible structures for C59N . Sahoo[6] obtained…     

Thermal decomposition behavior of naphthalene-labeled polyethylene

Pyrolysis–GC/mass spectrometry experiments reveal that naphthalene groups attached to maleated polyethylene as the 1-naphthylethyl ester are stable for relatively long periods of time at 170°C. Decomposition can be detected for samples heated for 2.0 min at 200°C, but even at that temperature, the extent of decomposition is very small. At higher temperatures, two of the decomposition products from the labeled polymer are readily understood: 1-vinylnaphthalene and 1-naphthylethanol can form by reactions that are well-precedented in the organic chemistry literature. At 200°C, only naphthalene is formed, which requires scission of the bond between the naphthyl ring and the C₁ carbon of the ethyl group. We suggest two possible pathways for this reaction. © 1996 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 34:2045–2049, 1996     

新型对开门高低温动态试验箱研制

介绍了新型对开门高低温动态试验箱的研制过程,包括系统热负荷计算、复叠制冷循环系统的热力计算等。并根据系统的热力计算,进行了冷凝器和蒸发器的结构设计以及主要部件压缩机和通风机的设计选型。     

用实体手当作教学模型的尝试

介绍了在有机化学教学实践中总结的用实体手当作教学模型的三方面实例。该方法简便、快捷实用,可以方便学生的学习。