Effect of Pressure on Fluid Damping in MEMS Torsional Resonators with Flow Ranging from Continuum to Molecular Regime

High quality factor of dynamic structures at micro and nano scale is exploited in various applications of micro electro-mechanical systems (MEMS) and nano electro-mechanical system. The quality factor of such devices can be very high in vacuum. However, when vacuum is not desirable or not possible, the tiny structures must vibrate in air or some other gas at pressure levels that may vary from atmospheric to low vacuum. The interaction of the surrounding fluid with the vibrating structure leads to dissipation, thus bringing down the quality factor. Depending on the ambient fluid pressure or the gap between the vibrating and the fixed structure, the fluid motion can range from continuum flow to molecular flow giving a wide range of dissipation. The relevant fluid flow characteristics are determined by the Knudsen number which is the ratio of the mean free path of the gas molecule to the characteristic flow length of the device. This number is very small for continuum flow and reasonably big for molecular flow. In this paper, we study the effect of fluid pressure on the quality factor by carrying out experiments on a MEMS device that consists of a double gimbaled torsional resonator. Such devices are commonly used in optical cross-connects and switches. We only vary fluid pressure to make the Knudsen number go through the entire range of continuum flow, slip flow, transition flow, and molecular flow. We experimentally determine the quality factor of the torsional resonator at different air pressures ranging from 760 Torr to 0.001 Torr. The variation of this pressure over six orders of magnitude ensures required rarefaction to range over all flow conditions. Finally, we get the variation of quality factor with pressure. The result indicates that the quality factor, Q, follows a power law, Q ∝P ^–r , with different values of the exponent r in different flow regimes. In the second part of the paper, we propose the use of effective viscosity for considering velocity slip conditions in solving Navier–Stokes equation numerically. This concept is validated with analytical results for a simple case and then compared with the experimental results presented in this paper. The study shows that the effective viscosity concept can be used effectively even for the molecular regime if the air-gap to length ratio is sufficiently small (h ₀/L<0.01). As this ratio increases, the range of validity decreases.     

A brief review on structural concepts of novel supramolecular proton transfer compounds and their metal complexes

Our research group has been interested in synthesis of proton transfer compounds as new supramolecular synthons for the onepot preparation of self-assembled transition metal complex-organo-networks since 2000. We have focused on the proton delivery from acids, which are considered as suitable proton donors, to amines as proton acceptors. The results were production of several proton transfer ion pairs possessing some remaining donor sites applied for coordination to metallic centers in preparation of metal-organic structures. Some of the complexes showed contributions of both cationic and anionic fragments of the starting ion pair, while some others contained only one of these species as ligand. Much of the investigations on reviewed compounds focused on the concept of supramolecular systems, co-crystallization, stereochemically active lone pairs, coordination polyhedron and mainly on various interactions involve including van der Waals, ion pairing, hydrogen bondings, face to face π-π stackings and edge to face C-H...π, C-O...π, N-H...π, S-O...π, Ti...π and Hg-Cl...π interactions. The mentioned interactions are the most commonly used strategies in the extension of supramolecular structures.     

Effect of the incomplete accommodation of the heterogeneous recombination energy on heat fluxes to a quartz surface

Taking both the heterogeneous catalytic processes, including the surface formation of particles with excited internal degrees of freedom, and the processes of multicomponent diffusion and heat transfer in the MESOX apparatus fully into account makes it possible to obtain a recombination coefficient and an accommodation coefficient of the oxygen-atoms-on-quartz recombination energy which are in good agreement with the experimental data. The heterogeneous catalysis model constructed can be used effectively for predicting the heat fluxes to the surface of reentry vehicles on their entry into the Earth’s atmosphere.     

Thermoelastoplastic deformation of a thick-walled cylinder with a radial crack

The thermoelastoplastic fracture mechanics problem of a thick-walled cylinder subjected to internal pressure and a nonuniform temperature field is solved by the method of elastic solutions combined with the finite-element method. The correctness of the solution is provided by using the Barenblatt crack model, in which the stress and strain fields are regular. The elastoplastic problem of a cracked cylinder subjected to internal pressure and a nonuniform temperature field are solved. The calculation results are compared with available data. __________ Translated from Prikladnaya Mekhanika i Tekhnicheskaya Fizika, Vol. 49, No. 3, pp. 173–183, May–June, 2008.