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61.
62.
K. Venkatakrishnan B.K.A. Ngoi P. Stanley L.E.N. Lim B. Tan N.R. Sivakumar 《Applied Physics A: Materials Science & Processing》2002,75(4):493-496
Photomasks are the backbone of microfabrication industries. Currently they are fabricated by a lithographic process, which
is very expensive and time consuming since it is a multi-step process. These issues can be addressed by fabricating photomasks
by direct femtosecond laser writing, which is a single-step process and comparatively cheaper and faster than lithography.
In this paper we discuss our investigations on the effect of two types of laser writing techniques, namely front- and rear-side
laser writing, with regard to the feature size and the edge quality of a feature. It is proved conclusively that for the patterning
of masks, front-side laser writing is a better technique than rear-side laser writing with regard to smaller feature size
and better edge quality. Moreover the energy required for front-side laser writing is considerably lower than that for rear-side
laser writing.
Received: 22 May 2001 / Accepted: 14 September 2001 / Published online: 17 October 2001 相似文献
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Sang Kyu Lee Min Ju Cho Jung‐Il Jin Dong Hoon Choi 《Journal of polymer science. Part A, Polymer chemistry》2007,45(3):531-542
New photocrosslinkable maleimide copolymers have been synthesized by the attachment of a tricyanopyrrolidene‐based chromophore. The 2‐(3‐cyano‐4‐(2‐{4‐[hexyl‐(6‐hydroxy‐hexyl)‐amino]‐phenyl}‐vinyl)‐5‐oxo‐1‐{4‐[4‐(3‐oxo‐3‐phenyl‐propenyl)‐ phenoxy]‐butyl}‐1,5‐dihydro‐pyrrol‐2‐ylidene)‐malononitrile chromophore exhibits nonlinear optical activity and contains a chalcone moiety that is sensitive to UV light (λ = 330–360 nm) for crosslink formation. The maleimide monomers have also been functionalized with chalcone moieties. The resultant copolymers exhibit great processability, and one of them shows a maximum electrooptic coefficient of 90 pm/V at 1300 nm. We could control the thermal stability of the electrooptic coefficient with the newly synthesized photoreactive copolymers successfully. © 2006 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 45: 531–542, 2007 相似文献
66.
The new phenylpropanoid diglycoside ligusinenoside A ( 1 ), and the two new 8,4′‐oxyneolignan(‘8‐O‐4′‐neolignan’) diglycosides ligusinenosides B ( 2 ) and C ( 3 ), together with nine known compounds, were isolated from the rhizomes of Ligusticum sinensis Oliv. The structures of 1 – 3 were elucidated on the basis of spectroscopic analyses. 相似文献
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建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
70.
This article studies the inshore-offshore fishery model with impulsive diffusion. The existence and global asymptotic stability of both the trivial periodic solution and the positive periodic solution are obtained. The complexity of this system is also analyzed. Moreover, the optimal harvesting policy are given for the inshore subpopulation, which includes the maximum sustainable yield and the corresponding harvesting effort. 相似文献