Room-Temperature Inductively Coupled Plasma Etching of InP Using Cl2/N2 and Cl2/CH4/H2

We optimize the room-temperature etching of InP using Cl2/CH4/H2 and Cl2/N2 inductively coupled plasma reactive ions. A design of experiment is used in the optimization. The results, in terms of etch rate, surface roughness and etched profile, are presented. These Cl2-based recipes do not require substrate heating and thus can be more cost effectively and widely applied. The Cl2/CH4/H2 process is able to give a higher etch rate （about 850 nm/min） and cleaner surface with less polymer formation compared to the conventional CH4/H2 process. The Cl2/N2 process produces even higher etch rate （as high as 2μm/rain）, but rougher surface with slight sidewall undercut. The Cl2/N2 process also has no polymer formation due to the absence of methane gas. Both the processes give very good selectivity to the silicon dioxide （SiO2） etch mask. The selectivity of InP to the oxide mask （up to 55：1） for the Cl2/N2 process is one of the highest reported so far. The etched structures possess reasonably good sidewall verticality and surface quality comparable to that obtained under elevated temperature condition （〉 200℃）.     

Applied Physics A 49, no. 2 (1989)

Applied Physics A 49, no. 2 (1989)     

TIME-AVERAGED SPONTANEOUS POWER RADIATION IN PLASMA FOCUS

The time-averaged spontaneous radiation power and its spectrum are derived analytically. The collective mode is taken to be electron-cyclotron mode driven by the relativistic electron beam existing in the unstable and late phases of plasma focus. The infrared range radiation calculated is in agreement with experimental observation.     

双向抽运钛宝石啁啾脉冲激光多通放大的理论与实验研究

以双向抽运方式为基点，提出了新的、更接近实际的多通放大计算模型与方法，系统地计算分析了共焦腔双向抽运钛宝石激光放大器的放大特性，进而采用新的放大构型完成了啁啾脉冲多通放大．将实验结果与理论计算进行了比较，两者符合得很好．这种放大器大大减少了放大次数并彻底避免了再生腔必需的诸多光电元件 关键词：     

微波等离子体化学气相沉积法低温制备直纳米碳管膜

Among the three main methods for the synthesis of carbon nanotubes (CNTs)， chemical vapor deposition (CVD) has received a great deal of attention since CNTs can be synthesized at significantly low temperature. Plasma chemical vapor deposition methods can synthesize CNTs at lower temperature than thermal CVD. But in the usual catalytic growth of CNTs by CVD， CNTs are often tangled together and have some defects. These will limit the property research and potential applications. How to synthesize the straight CNTs at low temperature becomes a challenging issue. In this letter， straight carbon nanotube (CNT) films were achieved by microwave plasma chemical vapor deposition (MWPCVD) catalyzed by round Fe-Co-Ni alloy particles on Ni substrate at 610℃. It was found that， in our experimental condition， the uniform growth rate along the circumference of round alloy particles plays a very important role in the growth of straight CNT films. And because the substrate is conducting， the straight CNT films grown at low temperature may have the benefit for property research and offer the possibility to use them in the future applications.     

基于超高效液相色谱-四极杆飞行时间质谱联用技术的血瘀模型大鼠血浆代谢组学分析

采用盐酸肾上腺素加冰水浴建立急性血瘀大鼠模型，使用超高效液相色谱-四极杆飞行时间质谱（UPLC-Q-TOF/MS）检测空白对照组与血瘀模型组中血浆代谢物，用主成分分析（PCA）、有监督偏最小二乘法判别分析（PLS-DA）及正交偏最小二乘法判别分析（OPLS-DA）对代谢组学数据进行多维统计分析，筛选潜在生物标志物。与对照组相比，在血瘀模型组大鼠血浆中检测出46个差异代谢物，血瘀模型组中乙酰胆碱、N6，N6，N6-三甲基-L-赖氨酸、胞嘧啶、乙酰肉碱等21个代谢物显著上调，吲哚丙酸、LysoPC（14：0）等25个代谢物显著下调，可能与脂质代谢、半乳糖代谢、亚油酸代谢、不饱和脂肪酸生物合成、糖酵解、花生四烯酸代谢等通路有关。代谢产物可作为血瘀证研究中的重要标记物，该研究结果有助于揭示血瘀证的发病机制，可为临床血瘀疾病的诊断及选用药物治疗提供思路，为后续治疗手段提供参考依据。     

在乳液体系里制备过氧化氫基聚苯乙烯及其在接枝聚合上的应用

用不同分子量的聚苯乙烯在乳液体系中进行过氧化氢基化反应,然后测定这些产品的特性粘数,HPO值(每1,000个苯乙烯结构单元中所合的过氧化氢基平均数目)等。在过氧化氢基聚苯乙烯的红外光谱里,可以在3,200—3,600厘米~(-1)吸收区里观察到过氧化氢基的吸收带,其吸收强度随着HPO值的增大而加强。最后用这些大分子过氧化物引发甲基丙烯酸甲酯及苯乙烯聚合,得到接枝聚合物。经过分离提纯后,用下列的方法: (1)浊度滴定; (2)热机械性能的测试; (3)水解后测定交换量; (4)红外吸收光谱;证明它们是接枝共聚物。     

Matlab软件在迈克尔逊实验仪测空气折射率中的应用

通过压强变化时显示屏上干涉条纹出现或者消失的数量,迈克尔逊实验仪可以测定空气的折射率。实验中测量的物理量较多,人工处理数据比较繁琐,且容易出错,因此使用Matlab软件处理数据可以直接得到不同气压的空气的折射率,处理过程快捷精确。Matlab软件处理数据时,对实验数据进行了最小二乘法处理,可以得到空气折射率随气压变化的拟合直线。     

图上的Li-Yau不等式的一些注记

对于图G上热方程(△-/t-q)u=0的正解u=u(x,t),得到图上改进的Li-Yau梯度估计不等式,这里q满足Γ(q)≤η~2,η是一个常数,进而得到改进的Harnack型不等式,推广了以前的结果.