CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

It was shown both theoretically and experimentally that nanosecond order laser pulses at 10.6 micron wavelength were superior for driving the Sn plasma extreme ultraviolet (EUV) source for nano-lithography for the reasons of higher conversion efficiency, lower production of debris and higher average power levels obtainable in CO₂ media without serious problems of beam distortions and nonlinear effects occurring in competing solid-state lasers at high intensities. The renewed interest in such pulse format, wavelength, repetition rates in excess of 50 kHz and average power levels in excess of 18 kiloWatt has sparked new opportunities for a matured multi-kiloWatt CO₂ laser technology. The power demand of EUV source could be only satisfied by a Master-Oscillator-Power-Amplifier system configuration, leading to a development of a new type of hybrid pulsed CO₂ laser employing a whole spectrum of CO₂ technology, such as fast flow systems and diffusion-cooled planar waveguide lasers, and relatively recent quantum cascade lasers. In this paper we review briefly the history of relevant pulsed CO₂ laser technology and the requirements for multi-kiloWatt CO₂ laser, intended for the laser-produced plasma EUV source, and present our recent advances, such as novel solid-state seeded master oscillator and efficient multi-pass amplifiers built on planar waveguide CO₂ lasers.     

Synthesis and reversible hydration–dehydration system of copolymers bearing a vicinal tricarbonyl structure

Novel copolymers composed of a styrene (St) derivative bearing a vicinal tricarbonyl moiety and various vinyl monomers such as St, methyl methacrylate (MMA), and N‐vinylpyrrolidone (NVP) were synthesized by (1) radical copolymerization of a St derivative with a 1,3‐diketone structure with St, MMA, and NVP and (2) successive oxidation of the resulting copolymers with N‐bromosuccinimide in DMSO to convert their 1,3‐diketone moieties in the side chains into the corresponding vicinal tricarbonyl moieties. Their tricarbonyl moieties were readily hydrated in water‐containing acetone to generate the corresponding copolymers bearing geminal diol structures in the side chains. On the other hand, heating the resulting copolymers bearing the geminal diol structures in vacuo‐enabled successful recovery of the vicinal tricarbonyl moieties to demonstrate the reversible nature of this system. The hydration behavior in powdery state under air atmosphere saturated by water was also investigated. © 2012 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2012     

Synthesis of methacrylate polymer bearing cyanate groups and its chemoselective reaction with amines

A novel reactive polymer containing cyanate groups in the side chain was prepared by free radical polymerization of a cyanate‐containing monomer, 2‐(4‐cyanatophenyl)ethyl methacrylate ( 1 ). The monomer 1 and its polymer, poly[2‐(4‐cyanatophenyl)ethyl methacrylate] (PCPMA), were stable under the air for a long period. The copolymerization of 1 and methyl methacrylate provided the corresponding copolymers with various cyanate contents. The availability of the cyanate‐containing polymers as a reactive polymer was investigated. Model reaction using 4‐cyanatotoluene revealed that a cyanate group reacted with aliphatic amines, whereas no reaction occurred in the presence of water, alcohols, and aromatic amines under mild conditions. Post‐functionalization of PCPMA was demonstrated using aliphatic amines or diamines. © 2013 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2014 , 52, 699–706     

Synthesis and properties of polyhydroxyurethane bearing silicone backbone

Polyhydroxyurethane bearing silicone backbone was prepared by polyaddition of silicone diamines with a bifunctional five‐membered cyclic carbonate prepared from the corresponding diepoxide and CO₂. Polymerization in propylene glycol methyl ether acetate proceeded smoothly, and polymers could be obtained in high yields under appropriate conditions. The introduced silicone moieties improved the hydrophobicity and lowered the glass transition temperature keeping thermal stability. © 2014 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2014 , 52, 1113–1118     

Reversible fixation and release of carbon dioxide with a binary system consisting of polyethylene glycol and polystyrene‐bearing cyclic amidine pendant group

In this study, we investigated the CO₂‐capture/release behavior of the polystyrene‐bearing cyclic amidine pendant groups, which was synthesized via free radical polymerization of HCl salt of the corresponding styrene monomer followed by neutralization. For comparison, we also prepared the polystyrene bearing N‐formyl‐1,3‐propanediamine pendant groups through the hydrolysis of the cyclic amidine group by treatment with an alkaline solution. First, we examined the CO₂‐capture/release behaviors of the amidine and amine monomers in aqueous solution in terms of conductivity. The conductivity of a wet DMSO solution of the amidine monomer increased upon CO₂ bubbling at 25 °C and reached a stationary value of about 11 mS/m, which indicated the formation of the bicarbonate salt. Conversely, the conductivity decreased to its original value upon N₂ bubbling at 50 °C, reflecting the complete release of the trapped CO₂ molecules. Both solutions showed the changes in the conductivity with quick responses, and no appreciable difference was observed between them. We then investigated the CO₂‐capture/release behaviors of the amidine and amine polymers, by taking advantage of the binary system with polyethylene glycol, and found that the binary system with the amidine polymer captured and released CO₂ more efficiently than that with the amine polymer. © 2014 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2014 , 52, 2025–2031     

Synthesis of thermally stable aromatic poly(spiroorthocarbonate)s having a Cardo or bent structure

Novel poly(spiroorthocarbonate)s [poly(SOC)]s having a Cardo or bent structure were synthesized by polycondensation of several bis‐catechols having fluorene (BCFL), spirobisindane (BCSPI), or spirobischromane (BCSPC) in the structure with 2,2,6,6‐tetrachlorobenzo[1,2‐d:4,5‐d’]bis[1,3]dioxole (4ClBD). Synthesis of poly(SOC)s was confirmed by NMR and IR spectrometry. The poly(SOC)s obtained from BCFL or BCSPC were soluble in common organic solvents. The glass transition temperature of the poly(SOC)s was not detected by differential scanning calorimetry (DSC) in the range of 50–300 °C. The 10 wt % decomposition temperature of the poly(SOC)s was found to be above 400 °C. These results indicated the high thermal stability of the poly(SOC)s. Soluble poly(SOC)s could be possessed to form a film on a glass plate by the spin coat method. The obtained polymer films were 0.2 μm in thickness with 95% light transmission in the optical wavelength range. These results suggested that the Cardo or bent structure may block the packing of the main‐chain of the structure, which improves the solubility of the polymers, increases transparency, and enhances the thermal stability of SOCs. © 2015 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2016 , 54, 1409‐1416     

Selective nucleophilic additions to poly(methacrylate)s containing isothiocyanate moieties in the side chains and their application in cross‐linking

Reactivity of isothiocynate moieties in the side chain of polymethacrylate with amine, alcohol, or thiol was investigated, and the reactions were applied to preparation of networked polymers. Isothiocyanate of polymer side chain rapidly reacted with amines without a catalyst, to give the corresponding thioureas. However, it did not react with alcohols or thiols under the same conditions. Using 1,8‐diazabicyclo[5.4.0]undec‐7‐ene (DBU) as a catalyst, addition of alcohols or thiols to the isothiocyanate proceeded smoothly. Addition of amines, alcohols, and thiols to isothiocyanates moiety contained in the side chain of polymethacrylate also proceeded readily with or without the catalyst, respectively, to effectively give the corresponding side chain modified polymers. Occurrence of these additions was confirmed by ¹H NMR and IR measurements. Glass transition temperatures and thermal decomposition temperatures of the obtained polymers were investigated by differential scanning calorimetry and thermogravimetric analysis. Networked polymers were easily prepared by addition of 1,6‐hexamethylenediamine or hexamethylene glycol to the polymethacrylate having isothiocyanato groups. © 2014 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2014 , 52, 1832–1842     

Functional 1,3‐benzoxazine bearing 4‐pyridyl group: Synthesis and thermally induced polymerization behavior

1,3‐benzoxazine 1 , bearing 4‐pyridyl moiety on the nitrogen atom, was synthesized from p‐cresol, 4‐aminopyridine, and paraformaldehyde. The efficient synthesis was achieved by adding acetic acid to suppress the strong basicity caused by the presence of 4‐aminopyridine derivatives. Upon heating 1 at 180 °C, it underwent the thermally induced ring‐opening polymerization. The resulting polymer was composed of two types of repeating unit, i.e., (1) Mannich‐type one (‐phenol‐CH₂‐NR‐CH₂‐) that can be expected from the general ring‐opening polymerization of conventional benzoxazines and (2) a typical phenolic resin‐type one (‐phenol‐CH₂‐phenol‐) induced by release of 4‐aminopyridine and paraformaldehyde (unit B). Another structural feature of the polymer was that it possessed a benzoxazine moiety at the chain end. © 2013 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2014 , 52, 410–416