Photocurrent properties of high—sensitivity GaN ultraviolet photodetectors

GaN epilayers were grown on sapphire substrates by metal-organic chemical vapour deposition. Metal－semiconductor－metal photoconductive detectors were fabricated using this material. The photocurrent properties of the detectors were measured and analysed. The spectrum response shows a high sensitivity in the wavelength region from 330 to 360nm, with a peak at 358nm and a sharp cutoff near 360nm. The maximum responsivities at 358nm were 700A/W (2V) and 7000A/W (30V). The relationship between responsivity and bias indicates that the responsivity increases linearly with bias until 30V. The influence of the spacing between two electrodes on the detector responsivity was also studied.     

GaN基半导体新热点:从半导体照明到功率电子器件

Ⅲ族氮化物(又称GaN基)宽禁带半导体属于新兴的第三代半导体体系,在短波长光电子器件和功率电子器件领域具有重大应用价值。过去10多年,以蓝光和白光LED为核心的半导体照明技术和产业飞速发展,形成了对国家经济和人民生活产生显著影响的高技术产业。近年来GaN基功率电子器件受到了学术界和产业界的高度重视,形成了新的研发和产业化热点。首先介绍了半导体照明技术和产业的发展历程和现状,分析了当前GaN基LED芯片技术面临的关键科学和技术问题;然后重点介绍了GaN基微波功率器件和电力电子器件的发展历程和动态,包括微波功率器件已经取得的突破性进展和产业化现状,电力电子器件相对Si和SiC同类器件的优势和劣势,并对GaN基功率电子器件当前面临的关键科学和技术挑战进行了较详细的分析。     

Influence of applied electric field on the absorption coefficient and subband distances in asymmetrical AlN/GaN coupled double quantum wells

The influence of applied electric fields on the absorption coefficient and subband distances in asymmetrical AlN/GaN coupled double quantum wells (CDQWs) has been investigated by solving Schr?dinger and Poisson equations self-consistently. It is found that the absorption coefficient of the intersubband transition (ISBT) between the ground state and the third excited state (1_odd-2_even) can be equal to zero when the electric fields are applied in asymmetrical AlN/GaN CDQWs, which is related to applied electric fields induced symmetry recovery of these states. Meanwhile, the energy distances between 1_odd-2_even and 1_even-2_even subbands have different relationships from each other with the increase of applied electric fields due to the different polarization-induced potential drops between the left and the right wells. The results indicate that an electrical-optical modulator operated within the opto-communication wavelength range can be realized in spite of the strong polarization-induced electric fields in asymmetrical AlN/GaN CDQWs.     

Optical Properties of Phase-Separated GaN1-xPx Alloys Grown by Light-Radiation Heating Metal-Organic Chemical Vapour Deposition

Based on the results of the temperature-dependent photoluminescence (PL) measurements, the broad PL emission in the phase-separated GaNP alloys with P compositions of 0.03, 0.07, and 0.15 has investigated. The broad PL peaks at 2.18, 2.12 and 1.83eV are assigned to be an emission from the optical transitions from several trap levels, possibly the iso-electronic trap levels related to nitrogen. With the increasing P composition (from 0.03 to 0.15), these iso-electronic trap levels are shown to become resonant with the conduction band of the alloy and thus optically inactive, leading to the apparent red shift (80-160meV) of the PL peak energy and the trend of the red shift is strengthened. No PL emission peak is observed from the GaN-rich GaNP region, suggesting that the photogenerated carriers in the GaN-rich GaNP region may recombine with each other via non-radiation transitions.     

表面钝化前后Al0.22Ga0.78N/GaN异质结势垒层应变的高温特性

用高分辨X射线衍射仪(HRXRD)研究了表面钝化前后Al0.22Ga0.78N/GaN异质结势垒层应变的高温特性,温度变化范围从室温到813K.结果表明,对未钝化的异质结,当测试温度高于523K时,Al0.22Ga0.78N势垒层开始出现应变弛豫;钝化后,在Al0.22Ga0.78N势垒层中会产生一个附加的平面拉伸应变,并随着温度的增加,势垒层中的平面拉伸应变会呈现出一个初始的增加,接着应变将减小,对100nm厚的Al0.22Ga0.78N势垒层,应变只是轻微地减小,但对于50nm厚的Al0.22Ga0.78N势垒层,则出现了严重的应变弛豫现象.     

Magnetointersubband Oscillations of the Two-Dimensional Electron Gas in AlxGa1-xN／GaN Heterostructures

Shubnikov-de Haas (SdH) measurements are performed over a temperature range of 1.5-20 K in Al0.22 Ga0.78N/GaN heterostructures with two subbands occupied. In addition to an intermodulation between two sets of SdH oscillations from the first and second subbands, a beating in oscillatory magnetoresistance at 12K is observed, due to the mixing of the first subband SdH oscillations and ‘magnetointersubband‘ (MIS) oscillations. A phase shift of π between the SdH and MIS oscillations is also clearly identified. Our experimental results, i.e. that the SdH oscillations dominate at low temperature and MIS oscillations dominate at high temperature, fully comply with the expected behaviour of MIS oscillations.     

AlxGa1-xN/GaN调制掺杂异质结构的子带性质研究

通过低温和强磁场下的磁输运测量研究了Al0.22Ga0.78N/GaN调制掺杂异质结构中2DEG的子带占据性质和子带输运性质.在该异质结构的磁阻振荡中观察到了双子带占据现象,并发现2DEG的总浓度随第二子带浓度的变化呈线性关系.得到了该异质结构中第二子带被2DEG占据的阈值电子浓度为7.3×1012cm-2.采用迁移率谱技术得到了不同样品的分别对应于第一和第二子带的输运迁移率.发现当样品产生应变弛豫时第一子带的电子迁移率骤然下降,而且第二子带的电子迁移率远大于第一子带的电子迁移率.用电子波函数分布和应变弛豫时的失配位错散射解释了上述现象.同时进一步说明了界面粗糙散射和合金无序散射是决定AlxGa1-xN/GaN异质结构中2DEG迁移率的主要散射机理.     

Mosaic Structure Evolution in GaN Films with Annealing Time Grown by Metalorganic Chemical Vapour Deposition

We investigate mosaic structure evolution of GaN films annealed for a long time at 800℃ grown on sapphire substrates by metalorganic chemical vapour deposition by high-resolution x-ray diffraction. The result show that residual stress in GaN films is relaxed by generating edge-type threading dislocations （TDs） instead of screw-type TDs. Compared to as-grown GaN films, the annealed ones have larger mean twist angles corresponding to higher density of edge-type TDs but smaller mean tilt angles corresponding to lower density of screw-type TDs films. Due to the increased edge-type TD density, the lateral coherence lengths of the annealed GaN films also decrease. The results obtained from chemical etching experiment and grazing-incidence x-ray diffraction （GIXRD） also support the proposed structure evolution.     

侧向外延生长GaN的结构特性

研究了在刻有图形的GaN"衬底”上用HVPE方法侧向外延生长(ELO)GaN的结构特性.在SiO2衬底上侧向外延生长GaN已经实现,并得到了平面的ELO GaN薄膜.采用扫描电子显微镜、透射电微镜和原子力显微镜技术研究了这种ELO GaN材料的结构和表面形貌.原子力显微镜图像表明:在ELO范围中的4μm2面积上不存在明显的阶状形貌.透射电子显微镜的观测表明在ELO范围内位错密度很低.在接合的界面上没观察到有空隙存在.但观测到晶格的弯曲高达3.3°,这被归因为由GaN层下的"籽层”和接合界面处的水平倾料和猝灭所产生的螺旋位错的积聚.     

AlxGa1-xN/GaN双量子阱的结构和掺杂浓度对子带间跃迁波长和吸收系数的影响

用薛定谔方程和泊松方程自洽计算的方法研究了Al_0.75Ga_0.25N/GaN对称双量子阱(DQWs)中子带间跃迁(ISBT)的波长和吸收系数对中间耦合势垒高度、中间耦合势垒宽度、势阱宽度和势垒掺杂浓度的依赖关系.研究发现,第一奇序子带S_1ood与第二偶序子带S_2even ISBT波长随着中间耦合势垒高度的降低而变短.当中间耦合势垒高度高于0.62 eV时,S_{1odd<关键词：自洽x}Ga_1-xN/GaN双量子阱')\" href=\"#\">Al_xGa_1-xN/GaN双量子阱子带间跃迁