排序方式: 共有110条查询结果,搜索用时 250 毫秒
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本文研究了薄膜厚度对MOCVD技术制备未掺杂ZnO薄膜的微观结构和电学特性影响.XRD和SEM的研究结果表明,随着薄膜厚度的增加,ZnO薄膜(110)峰趋于择优取向,且晶粒逐渐长大,薄膜从球状和细长棒状演变为具有类金字塔绒面结构特征的ZnO薄膜;Hall测量表明,较厚的ZnO薄膜有助于提高薄膜电学特性,可归于晶粒长大和晶体质量提高.40min沉积时间(膜厚为1250nm)制备出的ZnO薄膜具有明显绒面结构,其晶粒尺寸为300~500nm,电阻率为7.9×10-3Ω·cm,迁移率为26.8cm2/Vs. 相似文献
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采用甚高频等离子化学气相沉积技术(VHF-PECVD)制备了系列p-i-n型微晶硅太阳电池,研究了电池有源层硅烷浓度的变化对电池性能的影响.结果发现:随着硅烷浓度的提高电池的短路电流密度先提高然后降低,转换效率与之有相同的变化趋势,而开路电压随硅烷浓度的提高而增加,这些变化来源于有源层材料结构的改变.电池的填充因子几乎不受硅烷浓度的影响,但受前电极的影响很大.不同系列电池转化效率的最高点虽然处于非晶到微晶的过渡区,但对应电池的晶化率不同.另外,研究结果也给出非晶/微晶过渡区随着辉光功率的提高和沉积气压的降低向高硅烷浓度方向转移. 相似文献
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Research on the boron contamination at the p/i interface of microcrystalline silicon solar cells deposited in a single PECVD chamber 下载免费PDF全文
This paper studies boron contamination at the interface between the
p and i layers of μ c-Si:H solar cells deposited in a
single-chamber PECVD system. The boron depth profile in the i layer
was measured by Secondary Ion Mass Spectroscopy. It is found that
the mixed-phase μ c-Si:H materials with 40% crystalline
volume fraction is easy to be affected by the residual boron in the
reactor. The experimental results showed that a 500-nm thick μ
c-Si:H covering layer or a 30-seconds of hydrogen plasma treatment
can effectively reduce the boron contamination at the p/i interface.
However, from viewpoint of cost reduction, the hydrogen plasma
treatment is desirable for solar cell manufacture because the
substrate is not moved during the hydrogen plasma treatment. 相似文献
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Fabrication of high growth rate solar-cell-quality μc-Si:H thin films by VHF-PECVD 总被引:4,自引:0,他引:4 下载免费PDF全文
Several series of Si:H films were fabricated by the very high frequency plasma enhanced chemical vapour deposition (VHF-PECVD) at different substrate temperatures (T_s) and silane concentration (SC=[SiH_4]/[SiH_4+H_2]%). The results of Raman spectroscopy showed structural evolution of the Si:H films with the variation of T_s and SC. The results of x-ray diffraction (XRD) measurements indicated that T_s also influences the crystal orientation of the Si:H films. The modulation effect of T_s on crystalline volume fraction (X_c) is more evident for the high SC, which shows different trend compared to low SC. In addition, the growth rate of the films also showed a regular change with the variation of SC and T_s. Different samples in the series showed a similar increase in dark conductivity and a decrease in photosensitivity with increasing T_s and decreasing SC. Device-quality microcrystalline silicon materials were deposited at a high growth rate, characterized by relatively low dark conductivity and relatively high photosensitivity in a certain crystalline range. The microcrystalline silicon solar cell with a conversion efficiency of 4.55% has been prepared by VHF-PECVD. 相似文献
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在镍基催化剂上进行了乙烷氧化脱氢制乙烯的研究.结果表明,浸渍法制备的催化剂性能最佳.以浸渍法引入CeO2后,催化剂的低温反应活性显著提高.采用O2-TPD-MS、TPR和XPS等表征技术对催化剂进行了表征,结果显示:在ODE反应中,在低温下起主导作用的是"非化学计量氧"(O2-、O-和O22-);在高温下起主导作用的是晶格氧;CeO2的添加减弱了NiO与载体-γAl2O3间的强相互作用,提高了镍物种在载体上的分散度,高分散于催化剂表面的微晶NiO的量明显增加,此物种有利于催化剂的低温活性;影响了催化剂表面氧物种的分布,表面的晶格氧的相对浓度提高了,非化学计量氧的相对浓度降低了. 相似文献
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本文采用甚高频等离子增强化学气相沉积(VHF-PECVD)技术,通过调节硅烷浓度,获得了系列硅薄膜材料,并用拉曼散射光谱和X射线衍射光谱对材料的结构特性进行了测试分析,同时还使用原子力显微镜观察比较了薄膜的表面形貌。结果发现:在非晶/微晶过渡区内存在着一个光敏性较大的区域,这个区域内的材料晶化率为零,但是表面存在一些微小的晶粒;与拉曼散射光谱相比,X射线衍射光谱对微小的晶化更加敏感。以这部分材料作为太阳电池的本征层,在SnO2衬底上制备了p-i-n型太阳电池,电池的初始开路电压(Voc)达到了0.891V。 相似文献
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This paper reports that the optical emission spectroscopy (OES) is
used to monitor the plasma during the deposition process of
hydrogenated microcrystalline silicon films in a very high frequency
plasma enhanced chemical vapour deposition system. The OES
intensities (SiH\sj{*}, H微晶硅 VHF-PECVD 发射光谱学 薄膜物理学 microcrystalline silicon,
VHF-PECVD, optical emission spectroscopy 2005-11-09 2005-11-092005-12-12 This paper reports that the optical emission spectroscopy (OES) is used to monitor the plasma during the deposition process of hydrogenated microcrystalline silicon films in a very high frequency plasma enhanced chemical vapour deposition system. The OES intensities (Sill^*, H^* and H^*β) are investigated by varying the deposition parameters. The result shows that the discharge power, silane concentrations and substrate temperature affect the OES intensities. When the discharge power at silane concentration of 4% increases, the OES intensities increase first and then are constant, the intensities increase with the discharge power monotonously at silane concentration of 6%. The SiH^* intensity increases with silane concentration, while the intensities of H^*α and H^*β increase first and then decrease. When the substrate temperature increases, the SiH^* intensity decreases and the intensities of H^*α and H^*β are constant. The correlation between the intensity ratio of IH^*α/ISiH^* and the crystalline volume fraction (Xc) of films is confirmed. 相似文献