MOCVD生长MgZnO薄膜及太阳盲紫外光电探测器

利用MOCVD在蓝宝石衬底上,通过低温生长实现了立方结构、吸收边在255nm的Mg0.52Zn0.48O合金薄膜,并采用传统湿法刻蚀的方法在薄膜上制备了梳状叉指金电极,构成金属-半导体-金属(MSM)结构,实现了在10V偏压下,器件的光响应峰值在250nm,截止边为273nm的MgZnO太阳盲光电探测器。     

ZnSe－CdZnse多量子阱光双稳器件的研制

本文采用电化学选择性腐蚀工艺对ＧａＡｓ衬底蚀孔，在其上获得了大面积具有光滑表面的Ⅱ－Ⅵ族半导体多量子阱外延膜．通过在其表面蒸镀反射膜，制成了高质量的Ｆ－Ｐ腔，制备出ＺｎＳｅ－ＣｄＺｎＳｅ多量子阱Ｆ－Ｐ腔光双稳器件．     

高密度激发下CdS单晶的自由激子发光

本文首次在77K温度的电致发光光谱上,观测到了自由激子和自由激子(Ex-Ex)散射的发射带P。根据半经典理论,得到CdS单晶在高激发密度下的激子有效温度高于晶格温度。并且在77K温度下,通过氮分子激光器3371Å谱线的激发,观察到了Ex-Ex散射的P带的受激发射现象。     

利用脉冲激光沉积法制备高Mg掺杂的六方相MgZnO薄膜

选用Mg0.2Zn0.8O陶瓷靶,利用脉冲激光沉积(PLD)法,在单晶Si(100)和石英衬底上生长了一系列MgZnO薄膜(MZO)。通过X射线衍射(XRD)、扫描电子显微镜(SEM)、X射线能谱(EDS)和紫外可见光透射光谱(UV-Vis)等实验手段,研究了在不同工作压强下生长的薄膜样品的晶体结构、微观形貌和光学性能的变化。结果表明:所有的薄膜样品都是单一的ZnO六方相,禁带宽度随生长压强的升高而增加,变化范围在3.83～4.05eV之间,最短吸收边接近300nm。     

MgxZn1-xO合金制备及MgZnO/ZnO异质结构的光学性质

利用射频等离子体辅助的分子束外延(P-MBE)技术在c面的蓝宝石衬底上生长了具有不同Mg含量(0≤x≤0.28)的六方相MgZnO合金薄膜,研究了该系列样品Raman频移的幅度与合金组分的对应关系,为MgZnO合金中Mg含量的确定提供了新的方法。在此基础上选择具有合适带宽的MgZnO合金作为垒层,制备了MgZnO/ZnO量子阱结构。在较高的光激发密度下,观测到了发光强度随激发密度的超线性增加,并将之归因于激子-激子碰撞引起的超辐射过程。     

Compositional and Structural Properties of TiO2-xNx Thin Films Deposited by Radio-Frequency Magnetron Sputtering

TiO2-xNx thin films are deposited onto Si（100） and quartz substrates by arf magnetron sputtering method using a titanium metal disc as a target in Ar, N2, and 02 atmospheres. The substrate temperature is kept at 300℃. The O2 and Ar gas flow rates are kept to be constants and the N gas flow rate is varied. TiO2-xNx films with different N contents are characterized by x-ray diffraction and x-ray photoelectron spectroscopy. The results indicate that the TiO2-xNx thin films can be obtained at 13% N and 15% N contents in the film, and the films with mixed TiO2 and TiN crystal can be obtained at 13% N and 15% N contents in the film. In terms of the results of x-ray photoelectron spectroscopy, N ls of β-N （396 eV） is the main component in the TiO2-xNx thin films. Because the energy level of β-N is positioned above the valence-band maximum of TiO2, an effective optical-energy gap decreases from 2.8 eV （for pure TiO2 film deposited by the same rf sputtering system） to 2.3 eV, which is verified by the optical-absorption spectra.     

Temperature－Dependent Photoluminescence of ZnTe Films Grown on Si Substrates

ZnTe films have been prepared on Si substrates by metal-organic chemical vapour deposition (MOCVD), and the temperature-dependent photoluminescence (PL) properties were investigated. The near-band-edge (NBE) emission of the ZnTe sample at 83K shows an asymmetry line shape, which can be decomposed into two Gaus-siam lines labelled by FE and BE. Temperature-dependent PL intensity of the NBE peak shows two variation regions, and an expression with two dissociation channels fits well to the experimental data. The results of the temperature-dependent full width at half maximum (FWHM) and peak energy were well understood under the framework of the two-dissociation-channel model. That is, at low temperature, the emission from bound excitons governs the NBE peak, while above 157K, the free exciton emission becomes dominant gradually. A simple model with three energy levels was employed to describe the variation in emission intensity of BE and FE with temperature.     

(CdZnTe,ZnSeTe)/ZnTe复合量子阱中的超快速激子衰减

为了研究低维半导体结构中的激子过程，并进一步实现超快速的激子衰减，设计了一种新型的(CdZnTe，ZnSeTe)／ZnTe复合量子阱结构，并用低压金属有机化学气相沉积方法(LPMOCVD)制备出来。用泵浦-探测方法，采用反射式光路测量了该复合结构中CdZnTe／ZnTe量子阱的激子衰减。单指数衰减拟合给690fs的下降沿时间。     

m面蓝宝石上ZnO/ZnMgO多量子阱的制备及发光特性研究

利用等离子体辅助分子束外延设备(P-MBE)在m面的蓝宝石(m-Al₂O₃)衬底上制备了ZnO/Zn_0.85Mg_0.15O多量子阱.反射式高能电子衍射谱(RHEED)图样的原位观察表明,多量子阱结构是以二维模式生长的.从光致发光谱中可以看到ZnO/Zn_0.85Mg_0.15O多量子阱在室温仍具有明显的量子限域效应.在290 K时阱宽为3 nm的ZnO/Zn_{0.85关键词： 等离子体辅助分子束外延 ZnO多量子阱 光致发光}     

不同Ar/O2气压比例条件下立方MgZnO薄膜生长特性及紫外光吸收特性

利用脉冲激光沉积技术在非晶石英衬底上制备了立方结构MgZnO薄膜,研究了在不同Ar/O₂气压比例条件下,立方结构MgZnO薄膜的生长取向、光学带隙和Mg/Zn含量比例的变化规律。当固定氧气分压为2 Pa、通过注入惰性的Ar气使生长气压从2 Pa升高到7 Pa时,MgZnO薄膜的生长取向由（200）向（111）转变。当生长气压从2 Pa升高到6 Pa时,MgZnO薄膜光学带隙变窄。而当生长气压从6 Pa升高到7 Pa时,MgZnO薄膜光学带隙反而变宽。通过XPS数据分析,不同生长气压下MgZnO薄膜光学带隙的变化规律与薄膜Mg/Zn含量比例的变化规律不一致,MgZnO薄膜中Mg和Zn与O的结合情况的变化对薄膜的光学带隙也有影响。