Study of the gas-phase parameters affecting the silicon-oxide film deposition induced by an ArF laser

A study of the gas-phase parameters involved in ArF laser induced chemical vapour deposition of silicon-oxide thin films is presented. A complete set of experiments has been performed showing the influence of the concentration of the precursor gases, N₂O and SiH₄, and their influence on total and partial pressures on film growth and properties. In this paper we demonstrate the ability of this LCVD method to deposit silicon oxide films of different compositions and densities by appropriate control of gas composition and total pressure. Moreover, a material specific calibration plot comprising data obtained using different preparation techniques is presented, allowing determination of the stoichiometry of SiO _x films by using FTIR spectroscopy independently of the deposition method. For the range of processing conditions examined, the experimental results suggest that chemical processes governing deposition take place mainly in the gas phase.     

The multiple-scale wave equation

An analytic and numerical study of the behavior of the linear nonhomogeneous wave equation of the form ε²u_tt = Δu + tf with high wave speed (ε 1) is carried out. This study was initially motivated by meteorological observations which have indicated the presence of large spatial scale gravity waves in the neighborhood of a number of summer and winter storms, mainly from visible images of ripples in clouds in satellite photos. There is a question as to whether the presence of these waves is caused by the nearby storms. Since the linear wave equation is an approximation to the full system describing pressure waves in the atmosphere, yet is considerably more tractable, we have chosen to analyze the behavior of the linear nonhomogeneous wave equation with high wave speed. The analysis is shown to be valid in one, two, and three space dimensions. Partly because of the high wave speed, the solution is known to consist of behavior which changes on two different time scales, one rapid and one slow. Additionally, because of the presence of the nonhomogeneous forcing term tf, we show that there is a component of the solution which will vary only on a very large spatial scale. Since even the linearized wave equation can give rise to persistent large spatial scale waves under the right conditions, the implication is that certain storms could be responsible for the generation of large-scale waves. Numerical simulations in one and two dimensions confirm analytic results.     

The spin-S Blume-Capel RG flow diagram

Using the finite-size scaling renormalization group, we obtain the two-dimensional flow diagram of the Blume-Capel model forS=1 andS=3/2. In the first case our results are similar to those of mean-field theory, which predicts the existence of first- and second-order transitions with a tricritical point. In the second case, however, our results are different. While we obtain in theS=1 case a phase diagram presenting a multicritical point, the mean-field approach predicts only a second-order transition and a critical endpoint.     

Dirac-Hestenes spinor fields on Riemann-Cartan manifolds

In this paper we study Dirac-Hestenes spinor fields (DHSF) on a four-dimensional Riemann-Cartan spacetime (RCST). We prove that these fields must be defined as certain equivalence classes of even sections of the Clifford bundle (over the RCST), thereby being certain particular sections of a new bundle named the spin-Clifford bundle (SCB). The conditions for the existence of the SCB are studied and are shown to be equivalent to Geroch's theorem concerning the existence of spinor structures in a Lorentzian spacetime. We introduce also the covariant and algebraic Dirac spinor fields and compare these with DHSF, showing that all three kinds of spinor fields contain the same mathematical and physical information. We clarify also the notion of (Crumeyrolle's) amorphous spinors (Dirac-Kähler spinor fields are of this type), showing that they cannot be used to describe fermionic fields. We develop a rigorous theory for the covariant derivatives of Clifford fields (sections of the Clifford bundle, CB) and of Dirac-Hestenes spinor fields. We show how to generalize the original Dirac-Hestenes equation in Minkowski spacetime for the case of RCST. Our results are obtained from a variational principle formulated through the multiform derivative approach to Lagrangian field theory in the Clifford bundle.     

Using dynamic data exchange to exchange information between Visual Basic and Matlab : Application to a diode array spectrophotometer

Photodiode array spectrometers are increasingly being coupled to flow analysis and separation techniques. Computer programs are needed to control the data acquisition from each photodiode and to handle the data. The Microsoft Visual Basic programming language is used along with a DLL library and dynamic data exchange (DDE) to allow communication with the MATLAB computational environment.     

Infinite dimensional quadratic forms admitting composition

Composition algebras with a unit element constitute a well-known class of algebras. In this paper, those composition algebras with a one-sided unit element are characterized and examples are given of arbitrary infinite dimension.

     

Small angle neutron scattering from oxygen precipitates in silicon

The formation of silicon oxide precipitates from Czochralski grown silicon depends on the time and temperature of the heat treatment as well as on the initial content of interstitially dissolved oxygen. Samples containing between 5×10¹⁷ O_i/cm³ and 13×10¹⁷ O_i/cm³ have been heated at 750° C for 96 h. SiO₂ precipitates of various shape and size have been obtained and investigated by means of small angle neutron scattering (SANS) in the Q-range 0.05 Å^–1<Q<0.2 Å^–1. The obtained SANS patterns reveal a typical anisotropy of their intensity distribution, which splits into a central peak at Q<0.1 Å^–1 due to the shape of the individual particles and a number of weak intensities for large Q-values, originating from a correlation between defects, possibly between the precipitates. While these correlation peaks in the SANS patterns are seen best for rather low values of about (5–7)×10¹⁷ O_i/cm³ oxygen content, the central peak anisotropy is most pronounced for higher values of ca 10×10¹⁷ O_i/cm³. The integrated intensity of the central peak increases with increasing initial oxygen content. For comparison, untreated samples of the same initial oxygen content do not reveal any anisotropic SAN scattering or a broadened central peak beam.