微波ECR磁控溅射制备SiNx薄膜的XPS结构研究

利用微波电子回旋共振等离子体增强非平衡磁控溅射法在不同N2流量下制备无氢SiNx薄膜.通过X光电子能谱、纳米硬度仪等表征技术,研究了不同N2流量下制备的SiNx薄膜的化学键结构、化学键含量、元素配比及各元素沿深度分布.研究结果表明,N2流量是影响SiNx薄膜化学键结构、元素配比、元素延深度分布等性质的主要因素.在N2流量为1 sccm的条件下制备的SiNx薄膜呈富Si态;在N2流量为2 sccm的条件下制备的SiNx薄膜中Si-N键含量最高,可达到94.8%,化学吸附主要发生在薄膜表面,同时薄膜具有较好的机械性能,硬度值可达到22.9 GPa;在N2流量为20 sccm条件下制备的SiNx薄膜,薄膜表面含有46.8%的N-Si-O键及18.6%的Si-O键结构,薄膜内部含有36.8%的N-Si-O键及12.5%的Si-O键结构,表明薄膜结构疏松,在空气中易被氧化,化学吸附在薄膜表面及内部同时发生,因此薄膜具有较差的机械性能,硬度值仅为12 GPa.     

基于带电粒子活化法开展的SGⅡ-U皮秒激光质子加速实验研究

基于带电粒子活化测谱方法在SGⅡ-U装置上开展了皮秒激光靶背鞘场机制质子加速实验研究,对靶参数进行了优化.利用带电粒子活化测谱方法测量了相同激光条件、不同Cu薄膜靶厚度情况下靶背鞘场加速质子的最高截止能量、角分布、总产额以及激光能量到质子的转化效率等关键参数.实验发现,SGⅡ-U皮秒激光靶背鞘场加速机制的最佳Cu薄膜靶厚度为10 μm,对应质子最高能量接近40 MeV,质子（>4 MeV）总产额约4×10¹²个,激光能量到质子的转化效率约2%.薄膜靶更厚或者更薄都会降低加速质子的最高截止能量;当靶厚减薄至1 μm时,皮秒激光的预脉冲开始对靶背鞘场产生显著影响,质子最高截止能量急剧下降,高能质子束斑呈现空心结构;而当靶厚增加至35 μm时,虽然质子束的能量有所降低,但是质子束斑的均匀性更好.     

Analysis of Second-Harmonic Generation of Low-Frequency Dilatational Lamb Waves in a Two-Layered Composite Plate

We analyze the effect of second-harmonic generation(SHG) of primary Lamb wave propagation in a two-layered composite plate, and then investigate the influence of interfacial properties on the said effect at low frequency. It is found that changes in the interfacial properties essentially affect the dispersion relation and then the maximum cumulative distance of the double-frequency Lamb wave generated. This will remarkably influence the efficiency of SHG. To overcome the complications arising from the inherent dispersion and multimode natures in analyzing the SHG effect of Lamb waves, the present work focuses on the analysis of the SHG effect of low-frequency dilatational Lamb wave propagation. Both the numerical analysis and finite element simulation indicate that the SHG effect of low-frequency dilatational Lamb wave propagation is found to be much more sensitive to changes in the interfacial properties than primary Lamb waves. The potential of using the SHG effect of low-frequency dilatational Lamb waves to characterize a minor change in the interfacial properties is analyzed.     

Review on second-harmonic generation of ultrasonic guided waves in solid media (I):Theoretical analyses

Considering the high sensitivity of the nonlinear ultrasonic measurement technique and great advantages of the guided wave testing method, the use of nonlinear ultrasonic guided waves provides a promising means for evaluating and characterizing the hidden and/or inaccessible damage/degradation in solid media. Increasing attention on the development of the testing method based on nonlinear ultrasonic guided waves is largely attributed to the theoretical advances of nonlinear guided waves propagation in solid media. One of the typical acoustic nonlinear responses is the generation of second harmonics that can be used to effectively evaluate damage/degradation in materials/structures. In this paper, the theoretical progress of second-harmonic generation (SHG) of ultrasonic guided wave propagation in solid media is reviewed. The advances and developments of theoretical investigations on the effect of SHG of ultrasonic guided wave propagation in different structures are addressed. Some obscure understandings and the ideas in dispute are also discussed.     

Annealing effects on the microwave permittivity and permeability properties of Fe79Si16B5 microwires and their micowave absorption performances

This paper reports that amorphous magnetic microwires(Fe79Si16B5) have been fabricated by a melt-extraction technique and have been annealed at 600°C and 750°C respectively.Differential scanning calorimeter measurements show that nanocrystalline magnetic phase(α-Fe) has been formed in the amorphous matrix when it was annealed at 600°C.Hard magnetic phase(Fe2B) was formed in the microwires annealed at 750°C,which increases the magnetic coercivity.Microwave permittivity and permeability are found to be dependent on the microstructures.The permittivity fitting results show that multi Lorentzian dispersion processes exist.For microwires annealed at 750°C,their resonance peaks due to the domain wall movements and natural resonance are found higher than those of microwires annealed at 600°C.The microwave absorption performance of microwires annealed at 600°C is found better than microwires annealed at 750°C.     

单根砷掺杂氧化锌纳米线场效应晶体管的电学及光学特性

采用化学气相沉积（CVD）的方法在砷化镓基底上合成直径为20 nm左右、长约数十微米的氧化锌纳米线,然后采用热扩散的方法,将生长于砷化镓基底之上的氧化锌纳米线通过600 ℃,30 min的有氧退火处理后,获得了砷掺杂的氧化锌纳米线.将获得的掺杂后的氧化锌纳米线采用电子束曝光以及真空溅射镀膜的方法将钛/金合金作为接触电极引出,从而构建成场效应晶体管.文中研究了单根氧化锌纳米线砷掺杂前后的电学特性,证实了通过砷掺杂来获得p型的氧化锌纳米线的可行性.构建的p型砷掺杂氧化锌场效应晶体管的跨导为35 nA/V,载流 关键词： p型ZnO纳米线 砷掺杂 场效应晶体管 光致发光     

星载InSAR基线矢量方位动态测量方法研究

 星载InSAR干涉基线矢量方位角的测量精度对整个系统的测绘精度有着十分重要的影响。针对星载InSAR测量系统对其干涉基线矢量方位角的测量要求,给出了一种基于图像处理的CCD摄像测量方法。利用CCD摄像测量法对主副天线在平面内的相对位移进行了精确测量。分析了系统的理论误差,构建了完整的实验系统,并对光学靶标的固定步长位移进行验证性实验测量,实验结果与理论分析值具有较好的一致性,测量系统的测量精度优于1σ,证明了该测量方法具有很好的可行性。     

6H-SiC衬底上AlGaN基垂直结构紫外LED的制备

利用金属有机物化学气相沉积方法,在n型6H-SiC衬底上制备了15对Si掺杂Al_(0.19)Ga_(0.81)N/Al_(0.37)Ga_(0.63)N DBR,并采用低温AlN缓冲层有效抑制了DBR结构中裂纹的产生,得到了表面均方根粗糙度仅为0.4 nm且导电性能良好的n型DBR,其在369 nm处峰值反射率为68%,阻带宽度为10 nm。在获得导电DBR的基础上,进一步在n型6H-SiC衬底上构建了有、无DBR的垂直结构紫外LED。对比两者电致发光光谱,发现DBR结构的引入有效增强了LED紫外发光强度。     

Time-domain analysis of second-harmonic generation of primary Lamb wave propagation in an elastic plate

Within the second-order perturbation approximation,this paper investigates the physical process of generation of the time-domain second harmonic by a primary Lamb wave waveform in an elastic plate.The present work is performed based on the preconditions that the phase velocity matching is satisfied and that the transfer of energy from the primary Lamb wave to the double frequency Lamb wave is not zero.It investigates the influences of the difference between the group velocities of the primary Lamb wave and the double frequency Lamb wave,the propagation distance and the duration of the primary Lamb wave waveform on the envelope shape of the time-domain second harmonic.It finds that the maximum magnitude of the envelope of the second-harmonic waveform can grow within some propagation distance even if the condition of group velocity matching is not satisfied.Our analyses also indicate that the maximum magnitude of the envelope of the second-harmonic waveform is kept constant beyond a specific propagation distance.Furthermore,it concludes that the integration amplitude of the time-domain second-harmonic waveform always grows with propagation distance within the second-order perturbation.The present research yields new physical insight not previously available into the effect of generation of the time-domain second harmonic by propagation of a primary Lamb wave waveform.