Surface roughness investigation of semi-conductor wafers

Conventionally, surface roughness is predominantly determined through the use of stylus instruments. However, there are certain limitations involved in the method, particularly when a test specimen, such as a silicon wafer, has a smooth mirror-like surface. Hence, it is necessary to explore alternative non-contact techniques. Light scattering has recently been gaining popularity as an optical technique to provide prompt and precise inspection of surface roughness. In this paper, the total integrated scattering (TIS) model is modified to retrieve parameters on surface micro-topography through light scattering. The applicability of the proposed modified TIS model is studied and compared with an atomic force microscope. Experimental results obtained show that the proposed technique is highly accurate for measuring surface roughness in the nanometer range.     

ABS防抱死系统及其检测

现代汽车中有一种先进的制动机构。可保证在制动时不是完全刹死滑行，而是让车轮仍有一定的滚动．经研究这种方法可以更有效地制动．防抱死系统有一个自动检测车速的装置，用来控制车轮的转动，其原理如图1，铁质齿圈P与车轮同步转动，右端有一个绕有线圈的磁体，G是一个电流检测器．当车轮带动齿轮转动时，由于齿靠近线圈时被磁化，使磁通量增强，     

An enantioselective Michael addition of malonate to nitroalkenes catalyzed by low loading demethylquinine salts in water

An enantioselective Michael addition of malonate to nitroalkenes is efficiently catalyzed by low loading demethylquinine salts in water; the yield range from 49% to 93% and the ee up to 90%.     

THE COMRENSATED COMPACTNESS METHOD APPLIED TO QUASILINEAR PARABOLIC EQUATIONS OF HIGHER ORDER WITH BOUBLY STRONG DEGENERATION

This paper applies the compensated compactnessmethod to the study of a class of quasilinear parbolic equations of higher order with doubly strong degeneration. Some existence and uniqueness results are proved under certain conditions.     

Low-energy ion-assisted control of interfacial structures in metallic multilayers

A molecular dynamics method has been used to simulate the argon ion-assisted deposition of Cu/Co/Cu multilayers and to explore ion beam assistance strategies that can be used during or after the growth of each layer to control interfacial structures. A low-argon ion energy of 5–10 eV was found to minimize a combination of interfacial roughness and interlayer mixing (alloying) during the ion-assisted deposition of multilayers. However, complete flattening with simultaneous ion assistance could not be achieved without some mixing between the layers when a constant ion energy approach was used. It was found that multilayers with lower interfacial roughness and intermixing could be grown either by modulating the ion energy during the growth of each metal layer or by utilizing ion assistance only after the completion of each layers deposition. In these latter approaches, relatively high-energy ions could be used since the interface is buried and less susceptible to intermixing. The interlayer mixing dependence upon the thickness of the over layer has been determined as a function of ion energy.     

Synthesis of cellulose carbamate by supercritical CO2-assisted impregnation: Structure and rheological properties

Cellulose carbamate, an environmentally friendly material presents an interesting alternative to petroleum-based polymers because of its renewable, biodegradable, biocompatible nature and its solubility in conventional solvents. In synthesis process of cellulose carbamate, urea was firstly impregnated into the cellulose pulp by supercritical CO₂(scCO₂), followed by the esterification of cellulose. The structure of cellulose carbamate was characterized by Fourier transform infrared spectroscopy (FTIR), X-ray diffractometry (XRD) and scanning electron microscopy (SEM). The rheological properties of these cellulose carbamates in 9% sodium hydroxide solution were investigated, using a range of the nitrogen content, concentrations and shear rates.     

Synthesis of grafted poly(p‐phenyleneethynylene) with energy donor–acceptor architecture via atom transfer radical polymerization: Towards nonaggregating and hole‐facilitating light‐emitting material

In this contribution, we demonstrate a new effective methodology for constructing highly efficient and durable poly(p‐phenyleneethynylene) (PPE) containing emissive material with nonaggregating and hole‐facilitating properties through the introduction of hole‐transporting blocks into the PPE system as the grafting coils as well as building the energy donor–acceptor architecture between the grafting coils and the PPE backbone. Poly(2‐(carbazol‐9‐yl)ethyl methacrylate) (PCzEMA), herein, is chosen as the hole‐transporting blocks, and incorporated into the PPE system as the grafting coils via atom transfer radical polymerization. The chemical structure of the resultant copolymer, PPE‐g‐PCzEMA, was characterized by NMR and gel permeation chromatography, showing that the desirable copolymer was obtained with the narrow polydispersity. The increased thermal stability of PPE‐g‐PCzEMA was confirmed by thermogravimetric analysis and differential scanning calorimetry along with its macroinitiator. The optoelectronic properties of this copolymer were studied in detail by ultraviolet‐visible absorption, photoluminescence emission and excitation spectra, and cyclic voltammogram (CV). The results indicate that PPE‐g‐PCzEMA exhibits the solid‐state luminescent property dominated by individual lumophores, and also the energy transfer process from the PCzEMA blocks to the PPE backbone with a relatively higher energy transfer efficiency in the solid‐state compared to that of the solution state. Additionally, the hole‐injection property is greatly facilitated due to the presence of PCzEMA, as confirmed by CV profiles. All these data indicate that PPE‐g‐PCzEMA is a good candidate for use in optoelectronic devices. © 2007 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 45: 3776–3787, 2007     

Electroless deposition of open-end Cu nanotube arrays

Cu nanotube arrays were fabricated by electroless deposition using porous anodic aluminium oxide membranes as templates. This was accomplished by a four-step procedure, i.e. pore-wall modification, polishing treatment, sensitization-activation and electroless deposition. The as-synthesized Cu nanotubes possess controllable inner diameter and open ends.     

Microstructure and wear properties of laser clad Cuss/Cr5Si3 metal silicide composite coatings

Wear resistant Cu-based solid solution (Cu_ss) toughened Cr₅Si₃ metal silicide composite coatings were fabricated on austenitic stainless steel AISI321 by laser cladding process. Due to the rapidly solidified microstructural characteristics and the excellent toughening effect of Cu_ss on Cr₅Si₃, the Cu_ss/Cr₅Si₃ coatings have outstanding wear resistance and low coefficient of friction under room temperature dry sliding wear test conditions coupling with hardened 0.45% C steel.     

Chemically modified proton‐conducting membranes based on sulfonated polyimides: Improved water stability and fuel‐cell performance

A series of branched/crosslinked sulfonated polyimide (B/C‐SPI) membranes were prepared and evaluated as proton‐conducting ionomers based on the new concept of in situ crosslinking from sulfonated polyimide (SPI) oligomers and triamine monomers. Chemical branching and crosslinking in SPI oligomers with 1,3,5‐tris(4‐aminophenoxy)benzene as a crosslinker gave the polymer membranes very good water stability and mechanical properties under an accelerated aging treatment in water at 130 °C, despite their high ion‐exchange capacity (2.2–2.6 mequiv g^?1). The resulting polymer electrolytes displayed high proton conductivities of 0.2–0.3 S cm^?1 at 120 °C in water and reasonably high conductivities of 0.02–0.03 S cm^?1 at 50% relative humidity. In a single H₂/O₂ fuel‐cell system at 90 °C, they exhibited high fuel‐cell performances comparable to those of Nafion 112. The B/C‐SPI membranes also displayed good performances in a direct methanol fuel cell with methanol concentrations as high as 50 wt % that were superior to those of Nafion 112. © 2006 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 44: 3751–3762, 2006